Related Manuals for Edwards EXT400/200/30H
Summary of Contents for Edwards EXT400/200/30H
- Page 1 B756-60-880 Issue D Original Instruction Manual EXT400/200/30H Split Flow Compound Turbomolecular Vacuum Pump Description Item Number 80 Volt EXT400/200/30H Compound Turbomolecular Pump B756-60-000...
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Page 2: Declaration Of Conformity
EU authorised to assemble the technical file, that the product(s) EXT Compound Turbomolecular pump: EXT400/200/30H B756-60-000 to which this declaration relates is in conformity with the following standard(s) or other... -
Page 3: Table Of Contents
Service, spares and accessories .............. 25 Introduction ......................25 Service ........................25 Spares ........................25 7.3.1 Inlet-screens ......................25 7.3.2 Inlet-flange seals ......................25 © Edwards Limited 2008. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 4 For return of equipment, complete the HS Forms at the end of this manual. Illustrations Figure Page Dimensions of the EXT400/200/30H split flow pump (units in mm) ..........7 EXT400/200/30H split flow system .................. 10 Correct installation of inlet-screen .................. 12 Mounting attitude of the EXT400/200/30H split flow pump .............13 Installation of optional accessories ..................
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Page 5: Introduction
Split Flow Compound Turbomolecular Vacuum Pump. Please read and follow all instructions in this manual. The EXT400/200/30H Split Flow Compound Turbomolecular Vacuum Pump is designed for use with an Edwards EXDC Controller. Read this manual and the instruction manual supplied with your controller before you attempt to install or operate the equipment. - Page 6 B756-60-880 Issue D This page has been intentionally left blank. Page 2 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 7: Technical Data
CAUTION Do not use the EXT400/200/30H Split Flow pump to pump gases containing more than 20 % oxygen. If you do, the lubricant will polymerise and the pump will fail prematurely. Note: Concentrations of gases may be modified by the compression of the pump. -
Page 8: Vent Gas Specification And Vent Control Data
≥15 seconds Time for rotational speed to reduce to 50 % ≤ 0.5 bar gauge Purge gas pressure If you wish to use purge pressures in excess of this value, consult Edwards. Table 3 - Technical data Parameter EXT400/200/30H Notes Mass 14.67 kg... - Page 9 < 45 dBA Recommended controller EXDC160 EXDC160 maximum VA input 250 VA Quiescent power 25 W ‡‡ Recommended backing pump E2M28 © Edwards Limited 2008. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 10: Materials Exposed To Gases Pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin and carbon-fibre reinforced epoxy resin. Page 6 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 11: Dimensions Of The Ext400/200/30H Split Flow Pump (Units In Mm)
B756-60-880 Issue D Figure 1 - Dimensions of the EXT400/200/30H split flow pump (units in mm) 1. 6 slots 8.4 mm by 12 mm deep © Edwards Limited 2008. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 12 B756-60-880 Issue D This page has been intentionally left blank. Page 8 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 13: Installation
If the pump is not to be used immediately, store the pump in suitable conditions as described in Section 6.1. It is advised to retain all packing materials for use, should you return it for service. © Edwards Limited 2008. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 14: Typical Installation
11. EXDC controller 5. Backing valve 12. Vent valve 6. Vacuum gauge 13. Control system 7. Foreline trap The accessories available for the EXT400/200/30H Split Flow pump are detailed in Section 7.4; the accessories are shown in Figure Page 10 ©... -
Page 15: Connection To The Vacuum System
WARNING The impeller blades on an EXT400/200/30H are very sharp. Care should be taken when handling the pump not to dislodge or damage the protective inlet screens. WARNING Under no circumstances must a part of the human body be exposed to a vacuum. -
Page 16: Inlet-Screens (Supplied Fitted)
Use the O-rings supplied with the pump and use six M8 bolts tightened to a torque of 20 Nm (15 lbf ft) to connect the inlet-flange of the pump to the vacuum system. Page 12 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 17: Backing Connection
The customer must ensure safe ducting of the backing line if oil mist or hazardous substances are present. WARNING The EXT400/200/30H must not be operated, or vented from a positive pressure gas supply, with a restricted/blocked backing line. CAUTION Do not use the EXT400/200/30H Split Flow pump with a backing pressure below 5 x 10 mbar (5 x 10 Pa). -
Page 18: Vent Options, Vent Valve Connection And Control
When using the manual vent valve supplied, we recommend that you either limit the vent or only open the vent-valve after the EXT400/200/30H Split Flow pump speed has fallen to 50 % of full rotational speed. -
Page 19: Electrical Installation
The customer must ensure appropriate routing of cables and pipework to avoid slip/trip hazards. The EXT400/200/30H Split Flow pump should be electrically bonded to earth using the connection provided (M5 thread located next to the pump electrical connector). Refer to the instruction manual supplied with the controller to complete the electrical installation. -
Page 20: Cooling
3.6.2 Forced-air cooling An air-cooler accessory is available for the EXT400/200/30H pump (refer to Section 7). Fit the air-cooler as described in the instruction manual supplied with it. If you wish to use an alternative fan for air-cooling, ensure that the flow rate is above 70 m (40 cfm). -
Page 21: Operation
Use the procedure below to shut down a basic, manually-controlled pumping system with a manual vent-valve and an EXDC Controller. Refer to the EXC Controller instruction manual when using an EXC Controller. 1. Close the valve in the backing-line connecting the EXT400/200/30H Split Flow pump to the backing-pump. 2. Switch off the backing-pump. -
Page 22: Safety Interlocks And Control System
B756-60-880 Issue D 4. When the EXT400/200/30H Split Flow pump rotational speed has fallen below 50 % of full rotational speed, turn the manual vent-valve anti-clockwise to open it. Refer to Section 3.4 for venting procedure. Safety interlocks and control system The pump protection and safety interlock features are listed below. -
Page 23: Maintenance
Rotor life The fatigue life of the EXT400/200/30H rotor is typically 40,000 to 50,000 cycles of acceleration from rest to full speed and then back to rest. As a precautionary measure, Edwards recommends that pumps are returned for a major service (rotor replacement) after 20,000 cycles or ten years, whichever occurs first. -
Page 24: Cleaning The Pump
Note that if you use an EXDC Pump Drive Module to control the EXT400/200/30H Split Flow pump, or if you use an EXC Controller configured for remote operation to control the EXT400/200/30H Split Flow pump, some of the checks... - Page 25 If so, the rotor may be out of high-pitched noise? balance. Consult Edwards or your supplier. None of the above. Consult Edwards or your supplier. © Edwards Limited 2008. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
- Page 26 If not, the EXT pump bearings may be damaged. Consult Edwards or your supplier. None of the above. Consult Edwards or your supplier. Page 22 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 27: Storage And Disposal
In this event, use appropriate Personal Protective Equipment when handling and disposing of the pump, and ensure that all pump inlets and outlets are capped off before disposal. Dispose of the EXT400/200/30H Split Flow Turbomolecular Pump and any components and accessories safely in accordance with all local and national safety and environmental requirements. - Page 28 B756-60-880 Issue D This page has been intentionally left blank. Page 24 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
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Page 29: Service, Spares And Accessories
Inlet-screens are fitted to your pump as supplied to prevent damage from the entry of debris into the pump. The Item Number of replacement inlet-screens is given in Table 7.3.2 Inlet-flange seals The EXT400/200/30H Split Flow pump is supplied with inlet seals. The Item Number of replacement seals is given in Table Table 7 - Spares Description Item Number... -
Page 30: Exdc Drive Modules
D396-14-000 7.4.4 Pump-to-controller cables You must fit a pump-to-controller cable between an EXC Controller and the EXT400/200/30H Split Flow pump. A cable is not supplied with the EXT400/200/30H Pump or the EXC Controller (except EXC100L). Refer to Table Table 10 - Pump-to-controller cable... -
Page 31: Acx Air-Cooler
ACX250H B580-53-160 7.4.7 VRX vent-restrictor Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT400/200/30H Split Flow pump. Refer to Section 3.4 for information on the selection of the correct VRX vent-restrictor. Refer to... -
Page 32: Installation Of Optional Accessories
B756-60-880 Issue D Figure 5 - Installation of optional accessories 1. ACX cooling fan 2. TAV vent-valve 3. EXDC controller Page 28 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited. -
Page 33: Index
Maintenance ..........19 Materials exposed to gases pumped ....6 Mechanical fixing ........11 Operation ..........17 Pumping media ..........3 Pump-to-controller cables ......26 © Edwards Limited 2008. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited. - Page 34 B756-60-880 Issue D This page has been intentionally left blank. Page 30 © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.