Edwards iXM1200 Xcede customer special A Instruction Manual

Edwards iXM1200 Xcede customer special A Instruction Manual

Dry pump system
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edwardsvacuum.com
Dry Pump System
iXM
INSTRUCTION MANUAL
M56635880_D
Original instructions

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Summarization of Contents

Copyright and Legal Notices
Copyright Notice
Copyright notice for Edwards Limited.
Associated Publications
List of related Edwards publications.
Trademark Credit
Information on registered trademarks.
Disclaimer
Liability and warranty disclaimers.
CE Compliance Declaration
Declaration of Conformity Statement
Statement of compliance with European CE legislation.
Additional Legislation and Compliance Information
EU EMC Directive Class A Equipment
Information on Electromagnetic Compatibility Directive.
EU RoHS Directive Exemptions
Material exemptions under the RoHS directive.
EU REACH Regulation Compliance
Compliance with REACH regulation requirements.
Article 33 Declaration
Declaration for substances of very high concern.
Additional Compliance Information
Scope and compliance with other standards.
China Material Content Declaration
Hazardous Substances Declaration
Declaration of hazardous substances in product components.
Commission the System
Commissioning Procedure
Procedure for initial system setup and verification.
System Operation
System Start-up
Steps for starting the dry pump system.
System Shut Down
Steps for safely shutting down the system.
Gas Module Configuration
Adjusting settings for the gas module.
System Operating Temperature Configuration
Setting operational temperature parameters.
System Maintenance
Routine Maintenance Checks
Inspection of connections, pipelines, and fittings.
Fault Finding and Troubleshooting
System Warnings
Information on warning indicators and messages.
System Alarms
Information on alarm indicators and messages.
Unplanned Shutdowns and Alarms
Causes and actions for unexpected shutdowns.
PDT Events and Faults
Details on system events and error codes.
Inverter Warnings and Alarms
Troubleshooting inverter related issues.
System Decommissioning
Decommissioning Safety Precautions
Safety guidelines for system shutdown and removal.
Relocating the System
Procedure for moving the system for maintenance.
Draining Cooling Water
Steps to drain cooling water for decommissioning.
System Transportation
Guidelines for safely transporting the system.
System Storage
Storage Procedures
Steps for storing the system.
System Disposal
Hazardous Material Disposal
Safe disposal procedures and environmental requirements.
Equipment Service
Return Equipment for Service Procedure
Requirements for sending equipment for service.
Available Accessories
Disconnect Box Accessories
Accessories for system isolation and safety interlocks.
Accessory Modules
Modules for connecting additional accessories.
Pump Display Terminal (PDT)
Device for pump control and monitoring.
PDT Holster and Extension Cables
PDT Holster
Holders for the Pump Display Terminal.
PDT Extension Cable
Cables to extend PDT reach.
Interface Modules
MicroTIM Modules
Tool specific control via parallel or serial interface.
EMS Modules
Tool specific controlled stop interfaces.
iGateway Modules
Ethernet connectivity for system integration.
Exhaust Accessories
Exhaust Check Valve Kits
Valves to prevent backflow in exhaust lines.
Exhaust Extraction Cover Kits
Kits for safe gas extraction.
Safety and Compliance
Definition of Warnings and Cautions
Explains warning, caution, and notice classifications.
Safety Symbols
Identifies common safety symbols used in the manual.
General System Description
Overview of iXM Series
Describes the iXM dry pump series and its applications.
Applications of the iXM System
Details the intended uses of the iXM pumping system.
Advanced Control and Monitoring
Information on EdCentra for monitoring and data acquisition.
Green Mode Functionality
Describes the Green Mode for reduced utility consumption.
Technical Data and Specifications
General Technical Data
Provides specifications for iXM pumps.
Operating and Storage Conditions
Environmental and operational parameters.
Manufacturing Materials
Lists materials in contact with pumped gases.
Loading Data and Specifications
Center of Gravity and Levelling Foot Loads
Data for iXM200, iXM600, iXM1200, and iXM3000 models.
Nitrogen Purge Data
Nitrogen Purge Requirements
Specifications for nitrogen supply and quality.
Gas Module Types and Flows
Details gas module settings and flow rates.
Electrical Data and Specifications
Pump Electrical Specifications
Power ratings and motor specifications.
General Electrical Data
Supply voltage, frequency, and protection requirements.
Electrical Connection Details
Mains Connection Details
Information on mains connectors and wiring.
PDT, System, and Ethernet Interfaces
Details on interface connections and ratings.
Heater Data
TX Variant Heater Specifications
Heater control and power consumption data.
Tracer Gas Analysis and Emission Testing
Tracer Gas Test Parameters
Test conditions for fugitive emission testing.
Tracer Gas Test System Parameters
System configurations for emission testing.
Worst Case Test Results
Results for various process gases.
System Installation Guide
Installation Safety
Critical safety precautions during installation.
Unpack and Inspect the System
Procedure for unpacking and checking the pump.
System Positioning
System Positioning Guidelines
Instructions for placing the pump in its final location.
System Installation Procedures
Securing the System
Methods to prevent unwanted movement.
System Connections
Connect to Vacuum and Exhaust System
Procedures for connecting to vacuum and exhaust.
Connecting the Pump Inlet
Connecting the Pump Inlet Flange
Detailed steps for inlet flange connection.
Connecting the Pump Exhaust
Connecting the Pump Exhaust
Procedure for connecting the exhaust outlet.
Factory Extraction System Connection
Connecting to Factory Extraction System
Connecting to an optional exhaust ventilation system.
Electrical Supply Safety
Hazardous Voltages and Connections
Warnings about high voltages and connections.
Protective Earth Conductor Requirements
Ensuring proper grounding for safety.
Mains Input Supply Connector Details
Connector Hood and Cable Gland
Steps for attaching the cable gland and hood.
Coding Pin Configuration
Configuring pins based on supply voltage.
Phase Wire Connection
Detailed steps for connecting phase wires.
Mains Connector Identification
Connector Pin Identification
Mapping pins to phases and earth.
Torque Settings for Connector Pins
Recommended torque for pin connections.
Additional RF Earth Connection
RF Earth Connection
Connecting an additional RF ground for high emission areas.
Cooling Water Supply Connection
Setting Cooling Water Flow Rate (Method 1)
Procedure to set water flow rate using power cycling.
Setting Cooling Water Flow Rate (Method 2)
Procedure to set water flow rate using PDT.
Connecting Accessories
Accessory Installation Safety
Safety precautions when installing accessories.
Hot Surfaces Warning
Caution about hot surfaces when installing accessories.
Additional Safety Equipment Installation
Hazardous Gases Monitoring
Installing equipment to monitor nitrogen flow.
Nitrogen Purge Safety
Ensuring safety if nitrogen supply fails.
System Commissioning
Commission the System
Procedure for initial system setup and verification.
System Leak Testing
Gas Leakage Warning
Importance of leak testing after installation.
Pump Start/Stop and Control via PDT
PDT Display for Pump Control
Tables showing pump start/stop operations via PDT.
Warning and Alarm Display Acknowledgement
How to acknowledge warnings and alarms.
PDT Menu Navigation
Normal Menu
Displays default parameters on the PDT.
Status Menu
Shows current system status and parameters.
PDT Setup Menu
Setup Menu Options
Accessing command and fault history menus.
PDT Commands Menu
Navigating the Commands Menu
Options for controlling system functions.
PDT Select Line Menu
Selecting Display Lines
Customizing displayed parameters.
PDT Units Menu
Displaying Units
Setting units for parameters.
Inverter Fault History Menu
Inverter Fault History
Viewing past inverter fault records.
Fit Accessory Menu
Fitting Accessories
Configuring installed accessories.
IP Configuration Menu
Configuring IP Settings
Setting network parameters like IP address and DNS.
PDT Display Attributes Menu
Normal Display Settings
Customizing parameters shown in Normal display.
System Operation
Start-up Procedures
Steps for starting the dry pump system.
System Control Modules Overview
Controlling the System
Overview of control modules (PDT, MicroTIM, etc.).
Start Up via MicroTIM
MicroTIM System Operation
Operating the system via MicroTIM.
Start Up via PDT
PDT System Operation
Operating the system via PDT.
Start Up via Front Panel Control
Front Panel Control Operation
Operating the system using front panel controls.
Pump Restart Procedures
Pump Restart Guidelines
Procedures for restarting the pump.
System Shut Down Procedures
System Shut Down Warnings
Safety warnings for shutting down the system.
System Shut Down Modes
Available Shut Down Modes
Details on auto, fast, and ramped shut down.
Controlled Stop Procedures
Controlled Stop Safety
Warnings for hot surfaces during controlled stop.
Gas Module Configuration
iXM Varimode Gas Module Adjustment
Procedure for adjusting gas ballast flow settings.
System Maintenance
General Maintenance Safety
General safety precautions for maintenance.
System Leak Testing
Importance of leak testing post-maintenance.
Cleaning Material Precautions
Caution against using abrasive cleaning agents.
Lockout and Tagout Safety
Safety procedure for energy isolation.
Hot Surface Precautions
Caution about hot components during maintenance.
Protective Equipment Requirements
Required PPE for maintenance tasks.
Routine Visual Inspection
Recommended monthly system inspection.
System Maintenance Tasks
Inspect Connections, Pipelines, and Fittings
Procedure for checking system components.
Cleaning Exhaust Components
Examining and cleaning exhaust parts.
Fault Finding and Warnings
System Warning Indicators
Information on warning indicators and messages.
PDT Warning Messages
PDT displayed warning messages and actions.
PDT Warning Messages and Actions
Warning Messages and Actions
Detailed list of PDT warnings and remedies.
Warning Details: Power, Gas, Pressure, Sensors
Warning 1.01 - Power Interrupt
Cause and remedy for power interruption warning.
Warning 31.13 - Gas Missing
Cause and remedy for gas module communication fault.
Warning 31.01 - SYS CONFIG FAULT
Cause and remedy for system configuration fault.
Warning 35.09 - N2Purge Low
Cause and remedy for low nitrogen purge flow.
Warning 35.11 - N2 Purge High
Cause and remedy for high nitrogen purge flow.
Warning 35.13 - Gas Sensor Fault
Cause and remedy for gas sensor fault.
Warning 39.11 - Exh Press High
Cause and remedy for high exhaust pressure.
Warning Details: Pressure, Temperature, Sensors
Warning 39.13 - Exh Press Fault
Cause and remedy for exhaust pressure fault.
Warning 54.11 - MB Mtr Temp High
Cause and remedy for booster motor temperature high.
Warning 54.13 - Sensor Missing/Fault
Cause and remedy for booster sensor issues.
Warning 55.11 - DP Temp High
Cause and remedy for dry pump temperature high.
Warning 55.13 - Sensor Missing/Fault
Cause and remedy for dry pump sensor issues.
Warning Details: Temperature and Sensor Faults
Warning 56.11 - Exh Temp High
Cause and remedy for exhaust temperature high.
Warning 56.13 - Sensor Missing/Fault
Cause and remedy for exhaust sensor issues.
Warning 57.11 - DP Mtr Temp High
Cause and remedy for dry pump motor temp high.
Warning 57.13 - Sensor Missing/Fault
Cause and remedy for dry pump motor sensor issues.
Warning 63.11 - DP Temp High
Cause and remedy for dry pump internal temperature high.
Warning 63.13 - Sensor Missing/Fault
Cause and remedy for dry pump sensor issues.
Warning Details: Temperature, AC Supply, Exhaust
Warning 70.11 - DP E/C Temp High
Cause and remedy for dry pump end cover temp high.
Warning 70.13 - Sensor Missing/Fault
Cause and remedy for dry pump end cover sensor issues.
Warning 71.13 - AC Sup Missing
Cause and remedy for accessory module communication loss.
Warning 84.11 - Exh Temp High
Cause and remedy for exhaust pipe temperature high.
Warning 84.13 - Sensor Missing/Fault
Cause and remedy for exhaust pipe sensor issues.
Warning Details: Valves and Inverters
Valve Not Shut/Open Warnings
Causes and remedies for gate valve position issues.
GV Missing/Fault Warnings
Causes and remedies for gate valve sensor faults.
Inverter Communication Warnings
Troubleshooting inverter communication errors.
System Alarms
Alarm Indicators and PDT Messages
Information on alarm indicators and PDT messages.
PDT Alarm Messages and Actions
List of PDT alarm messages and their actions.
PDT Alarm Messages and Actions
Alarm 1.01 - Stop Activated/Sys Config Fault
Causes and remedies for stop activation and config faults.
Alarm 39.12 - Exh Press High
Cause and remedy for high exhaust pressure alarm.
Alarm 54.12 - MB Mtr Temp High
Cause and remedy for booster motor temp alarm.
Alarm 55.12 - DP Temp High
Cause and remedy for dry pump temperature alarm.
PDT Alarms: Temperature and Speed
Alarm 57.12 - DP Mtr Temp High
Cause and remedy for dry pump motor temp alarm.
Alarm 63.12 - DP Temp High
Cause and remedy for dry pump internal temp alarm.
Alarm 70.12 - DP E/C Temp High
Cause and remedy for dry pump end cover temp alarm.
Alarm 84.12 - Exh Temp High
Cause and remedy for exhaust pipe temperature alarm.
Alarm 174.10 - MB Low Speed
Cause and remedy for low booster speed alarm.
Inverter Related Alarms (MB/DP)
Alarms related to booster and dry pump inverters.
PDT Alarms: Inverter and Speed Issues
Alarm 184.10 - DP Low Speed
Cause and remedy for low dry pump speed alarm.
Inverter Communication Alarms (DP/MB)
Troubleshooting inverter communication issues.
Alarm Conditions and 'Run 'til Crash' Mode
'Run 'til Crash' Operation Mode
Explanation of 'Run 'til Crash' mode and its implications.
Unplanned Shut Downs and Alarms
Pump Protection Sensors
Sensors triggering warnings and alarms.
System Decommissioning
Decommissioning Safety Precautions
Safety precautions for decommissioning.
Lockout and Tagout for Decommissioning
Safety measures for isolating energy sources.
Hot Surface Precautions During Decommissioning
Caution about hot components during decommissioning.
Protective Equipment for Decommissioning
Required PPE for decommissioning tasks.
Relocate System for Decommissioning
Relocation Safety Precautions
Warnings for handling system during relocation.
Transportation and Lifting Safety
Guidelines for lifting and moving the system.
Cooling Water Freezing Warning
Risk of damage from freezing cooling water.
Drain Cooling Water for Decommissioning
PPE for Cooling Water Draining
Required PPE for cooling water draining.
Hot Surface Warning During Draining
Caution about hot surfaces during draining.
System Storage
Coolant Condensation Warning
Risk of damage from freezing coolant.
System Storage Procedures
Steps for storing the system.
System Disposal
Hazardous Material Disposal
Safe disposal procedures and environmental requirements.
Equipment Service
Return Equipment for Service Procedure
Requirements for sending equipment for service.
Accessories
Disconnect Box Accessories
Accessories for system isolation and safety interlocks.
Accessory Modules
Modules for connecting additional accessories.
Pump Display Terminal (PDT)
Device for pump control and monitoring.
PDT Holster and Extension Cables
PDT Holster
Holders for the Pump Display Terminal.
PDT Extension Cable
Cables to extend PDT reach.
Interface Modules
MicroTIM Modules
Tool specific control via parallel or serial interface.
EMS Modules
Tool specific controlled stop interfaces.
iGateway Modules
Ethernet connectivity for system integration.
Exhaust Accessories
Exhaust Check Valve Kits
Valves to prevent backflow in exhaust lines.
Exhaust Extraction Cover Kits
Kits for safe gas extraction.

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