Troubleshooting Immediately After Power Failure Occurs - Edwards STP-XF1303 Series Instruction Manual

Turbomolecular pump
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If the temperature of the STP pump predetermined part is higher than the setting value by 10 ºC (18
ºF) or more due to the occurrence of an abnormality/error in the TMS sensor or other fault, the
4
"POWER" LED on the front panel of the STC-U illuminates in red. The heater turns OFF and the
cooling water unit operates. The STP pump decelerates and stops. At this time, the "FAILURE" LED
on the STP control unit will illuminates, and the error message "TMS Higher Temp" will be displayed
on the LCD.
Note : When the temperature decreases within the set temperature + 10 °C, the "POWER" LED
turns to green and the temperature control restart.
If the temperature of the specified point becomes lower than an abnormal detected temperature due
to the occurrence of an abnormality/error in the TMS heater or other fault, the "POWER" LED on the
front panel of STC-U illuminates in red. The heater and cooling water unit turns OFF, and the STP
pump decelerates and stops. At this time, the "FAILURE" LED on the STP control unit will illuminate,
and the error message "TMS Lower Temp" will be displayed on the LCD.
Note : "TMS Lower Temp" is not detected for a certain time after the STP pump starts.
When an abnormality/error occurs in the STC-U remote cable, the "POWER" LED flashes in red. The
heater and cooling water unit turns OFF, and the STP pump decelerates and stops. At this time, the
"FAILURE" LED on the STP control unit will illuminate, and the error message "T.Cable
Disconnected" will be displayed on the LCD.
4.5

Troubleshooting immediately after power failure occurs

If the RESET operation does not extinguish the "FAILURE" LED, confirm that the STP pump has
stopped, turn OFF the primary power (Switch the MAIN POWER "OFF"), then turn ON the primary
Refer to the Instruction Manual (C) of STP control unit for the method of resetting operation.
When "POWER" LED on the STC-U indicates an abnormal state and the error messages displayed
as in Table 6 and Table 7 on the LCD on the STP control unit, take appropriate measures.
Note : When error message except for in Table 6 or Table 7 is displayed on the LCD, refer to the
Instruction Manual (C) of STP control unit and take measures.
MT-92E-A01-C
Page 30
When disconnecting cables from the STC-U, STP pump and/or the STP control unit
to perform troubleshooting and take the necessary action, confirm that the STP pump
has stopped, power off the primary power (turn the MAIN POWER "OFF") and isolate
(Lockout/Tagout) the electrical energy source water and gas and other energy
sources on the vacuum equipment. Failure to do so may result in the inadvertent
rotation of the STP pump which may result in an accident, an electric shock or
damage to equipment. Moreover, an accident caused by water leaks or gas leak may
power again (turn the MAIN POWER "ON").
STC-U eTMS unit
WARNING
occur.
CAUTION

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