Connecting the Oerlikon Leybold oil-filled roughing
pumps
This option requires the use of two, identical, Oerlikon
roughing pumps.
To connect the alternative, oil-free roughing pumps, see
Note:
Oerlikon Leybold oil-filled roughing pump:
Exhaust port
Connecting the Oerlikon Leybold oil-filled roughing pumps
®
Leybold™, oil-filled
page
Electrical
connections
Inlet port
TP03296
B-10.
B-3