Arc Controls; Arc Counting Features And Limits - Advanced Energy MDX II User Manual

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only way to clear this message is to press the STOP switch, which also shuts off the output.
You must then either reset that target life counter or select another target before the output will
turn on again.
Note: If the life for the selected target is set to zero, the MDXII unit does not monitor target
life or notify you of the end of target life.
User port pins 1 and 20 tell an external device (such as the Advanced Energy
switching box) which of eight targets the MDXII unit has been set to decrement. They reflect
selections made from the control panel, host computer, or User port.
If you switch to analog control from local or host control, the target that is specified through
the User port has priority. For example, if the MDXII unit is in local control and target 2 is
specified from the control panel, and then you switch to analog control, where target 5 is
specified, target 5 becomes the active target. When you switch to another control mode, target
5 is still specified until you request another target. (See page 9-1 for information on selecting
targets from the User port.)
Note: You can switch targets only when output is turned off.
Parameters you can monitor through the User port are:
• Target life remaining (pin 30)
• End of target life (pin 22)
Note: Output is not automatically turned off at the end of a target life.

ARC CONTROLS

Arc conditions are detected quickly, and MDXII output is modified quickly to prevent damage
to the target and substrate. Several different control and reporting options are available from
the control panel and through the serial interface.
The arc-handling features provide multi-level suppression and quenching of different types of
arcs. The advantage is reduced target burn-in time and material loss. These features prevent
energy from being delivered into hot spots because they sense a drop in impedance and
immediately shut off the output power. After an arc occurs and power shuts off, these features
prevent repeated arcing by controlling start-up to ensure the hot spots cool before power is
reapplied.
The MDXII unit can easily be configured at the factory to take action when it senses an arc.
Sensitive circuitry shuts off output power if the voltage drops below the limit (50 to 400 V)
you set.

Arc Counting Features and Limits

The software can detect and count both voltage arcs (Varcs) and current arcs (Iarcs). Thus, you
can program an arc count limit (the number of arcs to be tolerated during a process) for each
type of arc (Varc or Iarc) through a control panel or the serial port.
5700262-R
Operation Overview
MDXII Power Supplies
®
cathode-
5-5

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