Output Power Connection; Optimal Output Connection - Advanced Energy MDX II User Manual

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Advanced Energy

Output Power Connection

The standard output connector is a molded, pluggable connector with cable compression
screws. Either type MV-90 cable or discrete high-voltage wires are required to make the
output connection.
The cables for the output connection are not included with the MDXII power supply. Use
connecting wire that is consistent with your application and applicable requirements.
DANGER:
RISK OF DEATH OR BODILY INJURY: disconnect all sources of input power and
wait a few minutes before working on this unit or anything connected to it. Internal
components may remain live for 1 min after the MDXII unit has been disconnected.
DANGER:
Before making any other connection, connect the protective earth terminal to a
protective earth-ground.

OPTIMAL OUTPUT CONNECTION

To meet applicable EMI requirements, AE recommends using shielded output cable between
the MDXII power supply and your chamber. A shielded cable minimizes system noise from
chamber arcs and takes full advantage of the MDXII unit's improved process rate.
The optimal output connection satisfies the following conditions:
1. The outer shield should be terminated at one end only (at the ground connection provided
at the MDXII output connector), leaving the shield unterminated at the load.
(If the shield is terminated at both the MDXII unit and at the load, the outer shield could
carry some of the load current, causing the cable to radiate noise.)
2. The current-carrying elements of the output cable should be close to each other to
minimize magnetic noise fields.
Note: The conducting elements are those parts of the cable connected to the positive and
negative terminals on the MDXII unit's outconnector. Magnetic noise fields occur
in a size proportional to the "loop area" between the conducting elements. If you
minimize the loop area, you can minimize the magnetic noise.
4-10 Installation 5700262-R