Chapter 1 System Configurations and Part Names
1.4 Name of Each Part
Positioning pin
Stage support block
Nosepiece support block
Epi-fl filter turret
Shielding plate
Epi-fl filter turret
support block (left)
support block (right)
Positioning pin
Dia-illuminator pillar support block
Support pillar extension
TI-BSUK70 70 mm stage up kit
Figure 1.4-19
2-24