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Nikon NWL860 Series Manual

Nikon NWL860 Series Manual

Wafer loader
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M232 E
04.7.CF.3
Wafer Loader NWL860 Series
IFC Function
(SECS Communications)
Specifications

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Table of Contents
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Summary of Contents for Nikon NWL860 Series

  • Page 1 M232 E 04.7.CF.3 Wafer Loader NWL860 Series IFC Function (SECS Communications) Specifications...
  • Page 2 Thank you for purchasing a Nikon Product. Communications requirements for the Nikon Wafer Loader NWL860 series are specified in this IFC Function (SECS Communications) Specifications. To ensure correct usage, please read this manual before using. No part of this manual may be reproduced or transmitted in any form without the prior consent of Nikon.

  • Page 4: Table Of Contents

    Table of Contents Chaper 1 General Description Chaper 1 General Description ................4 1. Wafer Loader Model No................4 2. Summary ..................... 4 3. IFC Protection ....................4 4. Standard Compliance ................. 4 5. Hardware and Setting ................. 5 Chaper 2 System Specification ................
  • Page 5 Chaper 1 General Description 5. Message Protocol ..................17 5-1. Detection of Double Block ................17 5-2. Handling of Multi-Block ................17 5-3. Multi-Transaction ..................17 5-4. Size of Incoming Message ................17 5-5. Size of Outgoing Message ................17 6.
  • Page 6 Chaper 1 General Description 5-7. ALID ......................66 5-8. ALTX ......................68 5-9. CCODE ......................69 5-10. CEED ......................72 5-11. CEID ......................73 5-12. COMMACK ....................75 5-13. CPNAME ....................... 75 5-14. CPACK ......................75 5-15. CPVAL ......................75 5-16.

  • Page 7: Chaper 1 General Description

    General Description General Description 1. Wafer Loader Model No. This specification applies to the following wafer loader models. NWL860TMB-SP NWL860INX In this document, these models will be referred to collectively as NWLs. This specification applies to the following ROM versions. NWL3R-IFC Version 2.30 or later for NWL860TMB-SP NWL3A-IFC Version 2.30 or later for NWL860INX 2.

  • Page 8: Hardware And Setting

    Chaper 1 General Description 5. Hardware and Setting Some ROMs used with the NWL are not designed for IFC function. If the ROM name does not include “-IFC”, it cannot be used for communications. Additionally, some NWLs are not designed for IFC function. To add IFC functionality to these NWLs, you must upgrade the ROM and modify related settings.

  • Page 9: Chaper 2 System Specification

    System Specification System Specification 1. Communications Port Three communications ports are available. ① COM1: Used for communications with PC (host) COM2: Used for communications with indexer (equipment) ② ③ COM3: Used for debug monitoring (reserved for Remote Box) 2. Control Mode (Note) Control mode is not a communications mode;...

  • Page 10: Offline Control Mode

    Chapter 2 System Specification 2-3. Offline Control Mode The equipment is controlled locally. All operating switches and control knobs are enabled. The control mode is switched to online remote or online local control mode by selecting the option setting. When the equipment is in maintenance mode, control mode is automatically set to offline mode. The offline control mode is further divided into two states.

  • Page 11: Chaper 3 Interface Specification

    Interface Specification Interface Specification 1. Physical Interface (Common to all ports) 1-1. Interactive Signal Connection Circuit RS-232C: Conforms to the EIA Standard. 1-2. Connector D-Sub 25-pin female (ISO 2110-1980) or equivalent. Locking: Female 4-40 threaded jack screw lock 1-3. Data Rate 300, 1200, 2400, 4800, 9600 (default) baud 1-4.

  • Page 12: Character

    Chapter 3 Interface Specification 2. Character 2-1. Character Length 10 bits 2-2. Format Data Bit (LSB) (MSB) Start Bit Stop Bit 2-3. Start Bit 1 bit (0) 2-4. Data Bit 8 bits 2-5. Parity Bit 2-6. Stop Bit 1 bit (1)

  • Page 13: Block Transfer Protocol

    Chapter 3 Interface Specification 3. Block Transfer Protocol 3-1. System Line contention system (The master is the equipmemt.) 3-2. Transmission Control Character * “H” stands for hexadecimal numbers. ENQ (05H): Request to send ① EOT (04H): Ready to receive ② ACK (06H): Acknowledge ③...

  • Page 14: Message

    Chapter 3 Interface Specification 4. Message 4-1. Format Message length 1 byte Header 10 bytes Message data max 244 bytes Time Checksum 2 bytes Messages consists of the following blocks. 4-2. Message Length The first message byte. This gives the total length (byte count) of the header and the message data. 4-3.
  • Page 15 Chapter 3 Interface Specification 4-6-3. R-Bit Defines the direction of message transmission. R = 0: Host (H) → Equipment (E) R = 1: Host (H) ← Equipment (E) 4-6-4. Message ID Consists of 2 bytes; seven upper bits (stream code) + eight lower bits (function code). See 4-6-6.
  • Page 16 Chapter 3 Interface Specification Stream 0 1 – 63 64 – Reserved by the SECS Function Code Defined by the user 4-6-8. Standard Message ID For standard stream and function codes, see “4. Detailed Message Format” in Chapter 4. 4-6-9. Block No.

  • Page 17: Message Data

    Chapter 3 Interface Specification Source ID An identification code given to the message for every source in the application level. The source ID of a primary message is a copy of the transaction ID. When a message is retransmitted due to errors or for other reasons, the source ID is incremented. The source ID of a secondary message is a copy of the system byte of the received primary message.
  • Page 18 Chapter 3 Interface Specification 4-7-5. Length Byte Count Defines the number of bytes making up the length byte. 0 = Illegal, data format error 1 = 1-byte binary length byte (max. 255) 2 = 2-byte binary length byte (max. 64 K) 3 = 3-byte binary length byte (max.
  • Page 19 Chapter 3 Interface Specification 01101001 Item 2-byte integer, length byte 1 00000010 Byte length 2 yyyyyyyy Upper byte for a number Y yyyyyyyy Lower byte for a number Y 01101001 Item 2-byte integer, length byte 1 00000010 Byte length 2 zzzzzzzz Upper byte for a number Z zzzzzzzz...

  • Page 20: Message Protocol

    Chapter 3 Interface Specification 5. Message Protocol 5-1. Detection of Double Block Double blocks are detected by checking the block header system byte. If a double block is detected, the data is ignored. 5-2. Handling of Multi-Block Multi-block messages are handled at both the transmitting and receiving ends. 5-3.

  • Page 21: Examples Of Data Link Protocol

    Chapter 3 Interface Specification 6. Examples of Data Link Protocol 6-1. Normal Transmission and Receipt Request to send Ready to receive Message length DATA DATA · · Checksum Checksum Acknowledge Send a reply. Message length DATA * For details on T1–T3, see “3-3. (Block Transfer) Protocol Parameter” in this chapter. 6-2.

  • Page 23: Chaper 4 Communications Specification

    Communications Specification Communications Specification 1. Compliance with GEM 1-1. GEM Compliance Level Shown by E30 GEM Compliance Sheet (E30 Table 8.3) GEM Compliance GEM Basic Requirements Capability Compliance State model   Equipment processing state S1F13/F14 scenario initiated by host Event report Online check Error message Control (started by operator)

  • Page 24: Gem Basic Requirements

    Chapter 4 Communications Specification 1-2. GEM Basic Requirements 1-2-1. State Model I Online Communications State Model ① DISABLE ② ③ ENABLE ④ COMMUNICATING ⑤ ⑥ COMMUNICATING State Explanation DISABLE Communications between host and equipment are disabled. This setting has two sub-states; COMMUNICATING and NOT ENABLE COMMUNICATING.
  • Page 25 Chapter 4 Communications Specification I Control State Model ① OFFLINE ③ ② ONLINE ④ ⑥ LOCAL REMOTE ⑤ State Explanation When the equipment is offline, the equipment and host are able to exchange messages, but use of OFFLINE messages for automation is restricted. When online, the equipment can be controlled ONLINE through exchange of messages with the host.

  • Page 26: Equipment Processing State

    Chapter 4 Communications Specification I Control State Changed by Operator <To save changes: Engineer mode> Start the equipment in engineer mode. → Select Setting. → Select Option.→ Select SECS. → Select OFFLINE, LOCAL, or REMOTE. <To make temporary changes: Operator mode> (Online Local →...

  • Page 27: Saving Of Settings

    Chapter 4 Communications Specification State Explanation INIT The equipment is undergoing system initialization. IDLE The equipment is ON and awaiting commands. ACTIVE The equipment is ON and operating. PAUSE The equipment is temporarily halted. ERROR The equipment is in an error state. MAINTENANCE The equipment is in maintenance status.

  • Page 28: List Of Secs Messages To And From The Host

    Chapter 4 Communications Specification 2. List of SECS Messages to and from the Host H: Host E: NWL S: Single block M: Multi-block <Stream Function> <Function> <Direction of Transmission> H ↔ E S* F0 Abort Transaction Stream 1: Equipment State H →...
  • Page 29 Chapter 4 Communications Specification Stream 6: Data collection H ← E S6 F5 Multi-block data send inquire (MBI) REPLY H → E Multi-block grant (MBG) S · M H ← E Event report send (ERS) REPLY H → E Event report acknowledge (ERA) H →...

  • Page 30: Functions Implemented In Communications With Host And Scenario

    Chapter 4 Communications Specification 3. Functions Implemented in Communications with Host and Scenario This chapter complies with the SEMI E30-95 (GEM). 3-1. Establishment of Communications Notification that interrupted communications (power off or error) are restored. This notification may be made by the host or by the equipment (NWL). <Scenario>...

  • Page 31: Carrier File Management

    Chapter 4 Communications Specification <Scenario> Process program (sample file) uploading by host ○ Message: S7F25,F26 <Comment> [Host] [Equipment] <Comment> S7F25 → Requests formatted process program. ← S7F26 Transmits formatted process program data. 3-3-2. Sample File Downloading The host transmits information to the equipment involving PPID and the size of the sample ①...

  • Page 32: Equipment Information Management

    Chapter 4 Communications Specification <Scenario> Process program (carrier file) downloading by host ○ Message: S7F23,F24,F27,F28 <Comment> [Host] [Equipment] <Comment> S7F23 → Transmits formatted process program. ← S7F24 Acknowledges formatted process program. ← S7F27 Transmits process program verification. Acknowledges process program verification. S7F28 → 3-5.
  • Page 33 Chapter 4 Communications Specification <Scenario> Collection event occurs at equipment. ○ Message: S6F11,F12 <Comment> [Host] [Equipment] <Comment> [IF] The event report is multi-block data; ← S6F5 [THEN] The equipment sends a multi-block data send inquiry. S6F6 → Grants multi-block data send inquiry. ←...

  • Page 34: Control Mode Selection

    Chapter 4 Communications Specification 3-6-4. Report Transmission upon Request The equipment transmits the report requested by the host to the host. The equipment does not send a multi-block data send inquiry before transmission, even if the report is to be transmitted in multi-block data format. <Scenario>...
  • Page 35 Chapter 4 Communications Specification 3-7-4. Switching to Remote by Equipment (Operator) The operator switches equipment control mode from local to remote. <Scenario> Remote selected by operator ○ Message: S6F11,F12 <Comment> [Host] [Equipment] <Comment> ← S6F11 Transmits event report; control state is remote. S6F12 →...

  • Page 36: Remote Control

    Chapter 4 Communications Specification 3-8. Remote Control Remote control of equipment from the host is performed through transmission of commands from the host and corresponding event reports from equipment. (Examples: Changes in current PPID, startup, stop, and individual operation (mapping)) <Scenario>...

  • Page 37: Status Data Collection

    Chapter 4 Communications Specification 3-10. Status Data Collection The host can query the equipment for status information selected by the host. <Scenario> ○ Equipment status report request Message: S1F3,F4 <Comment> [Host] [Equipment] <Comment> S1F3 → Requests status variable report. ← S1F4 Replies by transmitting requested status variable data.
  • Page 38 Chapter 4 Communications Specification 3-11-4. Message Error by Unrecognized Data Format <Scenario> Message error by unrecognized data format ○ Message: S9F7 <Comment> [Host] [Equipment] <Comment> SxFx → Transmits a message. Detects illegal data format. ← S9F7 Notifies the host that an unrecognized data format is detected.

  • Page 39: Detailed Message Format

    Chapter 4 Communications Specification 4. Detailed Message Format 4-1. Stream 1 Function Abbr. REPLY ↔ Required Are You There Requestst Checks whether the equipment is operating online. When receiving “function 0,” the host cannot communicate with the equipment. Structure <HEADER> Function Abbr.
  • Page 40 Chapter 4 Communications Specification Function Abbr. REPLY → Required Selected Equipment Status Request The host queries the equipment for the selected status variable value. Structure <HEADER> L, n 1.<SVID1> n.<SVIDn> Function Abbr. REPLY ← Selected Equipment Status Data The equipment reports SVID values by order of request. The host should retain a record of the SVID whose values were requested.
  • Page 41 Chapter 4 Communications Specification Function Abbr. REPLY → SVNR Required Status Variable Name list Request The host queries the equipment to check status variables. Structure <HEADER> L, n 1.<SVID1> n.<SVIDn> Function Abbr. REPLY ← SVNRR Status Variable Name list Reply The equipment reports the name and unit of the requested status variables.
  • Page 42 Chapter 4 Communications Specification Function Abbr. REPLY ↔ Required Establish Communication Request At the logical level at which power is switched on again after completion or interruption of communications, this command establishes the start of a new communications session. Structure <HEADER>...
  • Page 43 Chapter 4 Communications Specification Function Abbr. REPLY → ROFL Required Request OFF-LINE The host asks the equipment to shift to offline status. Structure <HEADER> Function Abbr. REPLY ← OFLA OFF-LINE Acknowledge Transmits OK or NG to S1F15. Structure <HEADER> <OFLACK>...
  • Page 44 Chapter 4 Communications Specification Function Abbr. REPLY → RONL Required Request ON-LINE The host asks the equipment to shift to online status. Structure <HEADER> Function Abbr. REPLY → ONLA ON Line Acknowledge Transmits OK or NG to S1F17. Structure <HEADER> <ONLACK>...

  • Page 45: Stream 2

    Chapter 4 Communications Specification 4-2. Stream 2 Function Abbr. REPLY → Required Equipment Constant Request Inquires for correction value, servo gain, limit for alarm, data collection mode, and other values that do not vary significantly (constant). Structure <HEADER> L, n 1.<ECID1>...
  • Page 46 Chapter 4 Communications Specification Function Abbr. REPLY → Required New Equipment Constant Send Changes one or more equipment constants. Structure <HEADER> L, n 1.L, 2 1.<ECID1> 2.<ECV1> n.L, 2 1.<ECIDn> 2.<ECVn> Function Abbr. REPLY ← New Equipment Constant Acknowledge Transmits OK or NG to S2F15. Structure <HEADER>...
  • Page 47 Chapter 4 Communications Specification Function Abbr. REPLY → ECNR Required Equipment Constant Name list Request The host gathers basic information on equipment constants currently valid for the equipment. Structure <HEADER> L, n 1.<ECID1> n.<ECIDn> Function Abbr. REPLY ← Equipment Constant Name list Replies to S2F29.
  • Page 48 Chapter 4 Communications Specification Function Abbr. REPLY → Required Define Report The host defines a series of reports on the equipment. Structure <HEADER> L, 2 1.<DATAID> 2.L, a 1.L, 2 1.<RPTID1> 2.L, b 1.<VID1> b.<VIDb> a. L, 2 1.<RPTIDa> 2.L, c 1.<VID1>...
  • Page 49 Chapter 4 Communications Specification Function Abbr. REPLY → Required Link Event Report The host links to the report collected event ID (CEID). Structure <HEADER> L, 2 1.<DATAID> 2.L, a 1.L, 2 1.<CEID1> 2.L, b 1.<RPTID1> b.<RPTIDb> a.L, 2 1.<CEIDa> 2.L, c 1.<RPTID1>...
  • Page 50 Chapter 4 Communications Specification Function Abbr. REPLY → EDER Required Enable/Disable Event Report The host enables or disables a series of reports on the collected event ID (CEIDs). Structure <HEADER> <CEED> L, n   represents the number of CEID.) 1.<CEID1> n.<CEIDn>...
  • Page 51 Chapter 4 Communications Specification Function Abbr. REPLY → Required Host Command Send The host asks the equipment to implement a particular remote command with the related parameters. Structure <HEADER> L, 2 1.2<RCMD> 2.L, n   (Number of parameters) 1.L, 2 1.<CPNAME1>...

  • Page 52: Stream 5

    Chapter 4 Communications Specification 4-3. Stream 5 Function Abbr. REPLY ← Required Alarm Report Send Transmits notification that an alarm has occurred or has been canceled. This message is transmitted when an alarm is activated or canceled. The errors that cannot be recovered and the caution flag are not required to have corresponding release messages.
  • Page 53 Chapter 4 Communications Specification Function Abbr. REPLY → Required Enable/Disable Alarm Send (Enable/disable alarm send) Sets or resets the enable bit of an alarm report from the equipment. Using this bit, the equipment determines whether to send an alarm report to the host. Some alarms may not be controlled by this method. Structure <HEADER>...
  • Page 54 Chapter 4 Communications Specification Function Abbr. REPLY → Required List Alarm Request (Alarm list request) The host asks the equipment to send an alarm information list. Structure <HEADER> <ALID1..ALIDn> Function Abbr. REPLY ← List Alarm Request (Alarm list data) This indicates the current alarm status (alarm has occurred/is being canceled). It may contain more than one alarm data.
  • Page 55 Chapter 4 Communications Specification 4-4. Stream 6 Function Abbr. REPLY ← Required Multi-block Data Send Inquire When a discrete type data report S6F11 requires multi-block format, this transaction must be performed before transmission. Structure <HEADER> L, 2 1.<DATAID> 2.<DATALENGTH> Function Abbr.
  • Page 56 Chapter 4 Communications Specification Function Abbr. REPLY ← Required Event Report Send The equipment sends a series of defined and linked enabled reports to the host as soon as an event occurs. Structure <HEADER> L, 3 1.<DATAID> 2.<CEID> 3.L, a 1.L, 2 1.<RPTID1>...
  • Page 57 Chapter 4 Communications Specification Function Abbr. REPLY → Required Event Report Request (Event report request) The host queries the equipment for a series of given reports. <HEADER> <CEID> Function Abbr. REPLY ← Event Report Data (Event report data) The equipment transmits reports linked to the given CEID. Structure <HEADER>...
  • Page 58 Chapter 4 Communications Specification Function Abbr. REPLY → Required Individual Report Request The host requests defined reports from the equipment. Structure <HEADER> <RPTID> Function Abbr. REPLY ← Individual Report Data The equipment sends variable data defined for the given RPTID to the host. Structure <HEADER>...
  • Page 59 Chapter 4 Communications Specification 4-5. Stream 7 Function Abbr. REPLY ↔ Required Process Program Load Inquire Used before process program transmission (S7F3,F4) sent before loading or unloading of process programs. Structure <HEADER> L, 2 1.<PPID> 2.<LENGTH> Function Abbr. REPLY ↔ Process Program Load Grant Grants permission to load process program.
  • Page 60 Chapter 4 Communications Specification Function Abbr. REPLY → Required Current EPPD Request Requests the current equipment process program directory (EPPD), a list of the process program PPID stored by the equipment. Structure <HEADER> Function Abbr. REPLY ← Current EPPD Data Transmits the current EPPD.
  • Page 61 Chapter 4 Communications Specification Function Abbr. REPLY ↔ Required Formatted Process Program Send (Formatted process program send) Transmits a formatted process program to the host or equipment. If S7F23 is in multi-block data format, an S7F1 transaction must be performed before this transaction. Structure <HEADER>...
  • Page 62 Chapter 4 Communications Specification Function Abbr. REPLY ↔ Required Formatted Process Program Request (Formatted process program request) The host or equipment requests a process program. Structure <HEADER> <PPID> Function Abbr. REPLY ↔ Formatted Process Program DATA (Formatted process program data) Transfers process program in response to PPID request.
  • Page 63 Chapter 4 Communications Specification Function Abbr. REPLY ← Required Process Program Verification Send (Process program verification send) The equipment notifies the host that the equipment has received and checked the process program. The results of the check are shown in the error list. A list length of 0 or a single-element list with ACKC7A of 0 indicates that no errors are found in the process.

  • Page 64: Stream 9

    Chapter 4 Communications Specification 4-6. Stream 9 Function Abbr. REPLY ← Unrecognized Device ID Transmits notification that the device ID in the message block header is not recognized at the node. Structure <HEADER> <MHEAD> Function Abbr. REPLY ← Unrecognized Stream Type Transmits notification that the stream type in the message block header is not recognized by the equipment.
  • Page 65 Chapter 4 Communications Specification Function Abbr. REPLY ← Unrecognized Function Type Transmits notification that the function type in the message ID is not recognized by the equipment. Structure <HEADER> <MHEAD> Function Abbr. REPLY ← Illegal Data Transmits notification that the equipment is able to understand the stream and function, but unable to interpret the data format.
  • Page 66 Chapter 4 Communications Specification Function Abbr. REPLY ← Required Transaction Timer Time-out Transmits notification that the set time for the transaction (receiving) timer has elapsed and that the current transaction is terminated. Structure <HEADER> <SHEAD> Function Abbr. REPLY ← Data Too Long Transmits notification that the equipment has received data longer than can be processed.
  • Page 67 Chapter 4 Communications Specification Function Abbr. REPLY ← Conversation Time-out Transmits notification that the equipment has failed to receive expected data within a certain timeframe. Structure <HEADER> L, 2 1.<MEXP> 2.<EDID>...

  • Page 68: Definition Of Message Variable (Data Item)

    Chapter 4 Communications Specification 5. Definition of Message Variable (Data Item) Numbers are expressed in decimal form, unless otherwise specified. Hexadecimal numbers are indicated by H (XXH). 5-1. ACKC5 Variable Constant Message Format ACKC5 Acknowledge code 1 byte S5F2 Format: 10 0 = Accepted S5F4 (Binary)

  • Page 69: Aled

    Chapter 4 Communications Specification 5-6. ALED Variable Constant Message Format ALED Alarm enable/disable 1 byte S5F3 Format: 10 Bit 8 = 1 Enable alarm. Bit 8 = 0 Disable alarm. 5-7. ALID Variable Constant Message Format S5F1 Format: 52 ALID This ID is used to distinguish errors shown in the error display screen from other errors.
  • Page 70 Chapter 4 Communications Specification ALID ALTX Default ALID ALTX Default Buf OrFl pstn move T.O. System cant unload wafer Uplmt snsr of elvtr cant be OFF Buf surf mac pstn move T.O. Uplmt snsr of elvtr cant be ON Buf BS mac pstn move T.O. Lrlmt snsr of elvtr cant be OFF Buf sec macX tilt err Lrlmt snsr of elvtr cant be ON...

  • Page 71: Altx

    Chapter 4 Communications Specification ALID ALTX Default ALID ALTX Default SECS undefined function Remove box line err Check the cable connection Check the cable connection SECS undefined data format Initialization can’t be done Check the cable connection Indicate the operation by the function key on the display SECS data too long Check the cable connection...

  • Page 72: Ccode

    Chapter 4 Communications Specification 5-9. CCODE Variable Constant Message Format CCODE Command code S7F23 Format: 52 Control unit used to express a process program S7F26 (2-byte integer) (sample/carrier file) (The inspection items and settings are determined by the PPRAM, described later.) A process program is transmitted by order of CCODE No.
  • Page 73 Chapter 4 Communications Specification Variable Constant Message Format CCODE 104 = Back Side Center Macro inspection time S7F23 Format: 52 Same as 102 above. S7F26 (2-byte integer) 105 = Orientation flat/Notch alignment angle for LOAD PPARM Format: 32 (2-byte integer with sign) 0: (0°), 90: (90°), 180: (180°), 270: (270°) 106 = Orientation flat/Notch alignment angle for accepted wafer storage Same as 105 above.
  • Page 74 Chapter 4 Communications Specification Variable Constant Message Format CCODE 115 = Back Side Center Macro tilt (VR-dependent/ S7F23 Format: 52 independent) S7F26 (2-byte integer) PPARM Format: 52 (2-byte integer) MSB of Upper Byte = 1: Set independent of equipment VR setting (The value of the PPARM lower byte is used.) MSB of Upper Byte = 0: The equipment VR...

  • Page 75: Ceed

    Chapter 4 Communications Specification Variable Constant Message Format CCODE 0 = Start from bottom pocket S7F23 Format: 52 1 = Start from top pocket S7F26 (2-byte integer) 205 = Orientation flat/notch PPARM Format: 52 (2-byte integer) 0 = Orientation flat 1 = Notch 206 = SEMI/JEIDA PPARM Format: 52 (2-byte integer)

  • Page 76: Ceid

    Chapter 4 Communications Specification 5-11. CEID Variable Constant Message Format CEID Collected Event ID S2F35 Format: 52 S2F37 (2-byte integer) Transmits notification of a processing state change S6F11 important for the host. An even-numbered ID S6F15 represents a normal change, while an odd- numbered ID represents an abnormal change.
  • Page 77 Chapter 4 Communications Specification Variable Constant Message Format CEID 0608 = Pause S2F35 Format: 52 0610 = Pause canceled. S2F37 (2-byte integer) 0612 = Inspection of one item is completed. S6F11 Occurs on completion of: S6F15 • Surface Macro inspection •...

  • Page 78: Commack

    Chapter 4 Communications Specification Variable Constant Message Format CEID 9005 = Indexer pod has been unlocked S2F35 Format: 52 (abnormal). S2F37 (2-byte integer) 9010 = MSC interlock is enabled. S6F11 9012 = MSC interlock is disabled. S6F15 9097 = Indexer error occurs. 9098 = Indexer error is canceled.

  • Page 79: Datalenghth

    Chapter 4 Communications Specification 5-16. DATALENGHTH Variable Constant Message Format DATALENGHTH Total length (byte count) of the message data S2F39 Format: 30, 31 S6F5 (32 or 34 for the sign, 50 or 51 for Yes/No, 52 or 54 for integer) 5-17.

  • Page 80: Ecdef

    Chapter 4 Communications Specification 5-20. ECDEF Variable Constant Message Format ECDEF Equipment constant default S2F30 Depends on ECID. The default value of an equipment constant. See ECV:DEFAULT in “5-21. ECID” below. The format and code depend on the ECV. 5-21. ECID Variable Constant Message...
  • Page 81 Chapter 4 Communications Specification Variable Constant Message Format ECID Range: 1.35–2.10 (1.35–2.10 mm) S2F13 Format: 51 Precision: 0.01 mm Default = 2.10 S2F15 (1-byte integer) 007 = Elevator downward travel for wafer transfer S2F29 (8-inch wafer) S2F30 ECNAME = ELV_DN_8 ECV: Format 44 (4-byte floating point) Range: 2.05–2.80 (2.05–2.80 mm)
  • Page 82 Chapter 4 Communications Specification Variable Constant Message Format ECID 022 = SECSDEVID S2F13 Format: 51 ECNAME = SECS_DEVID S2F15 (1-byte integer) ECV: Format 52 (2-byte integer) S2F29 Range: 0–32767 S2F30 Setting unit: 1 Default = 101 023 = SECST1 (character to character time-out) ECNAME = SECS_T1 ECV: Format 51 (1-byte integer) Range:...

  • Page 83: Ecmax

    Chapter 4 Communications Specification Variable Constant Message Format ECID 042 = Programmable stop time S2F13 Format: 51 ECNAME = PS_TIME S2F15 (1-byte integer) ECV: Format 31 (1-byte integer with sign) S2F29 -1–99 (second) S2F30 -1 = Infinite Setting unit: 1 (1 second) Default = -1 043 = Programmable stop angle ECNAME = PS_ROT...

  • Page 84: Edid

    Chapter 4 Communications Specification 5-26. EDID Variable Constant Message Format EDID ID of data to receive S9F13 Depends on ECID. MEXP EDID EDID S7F3 <PPID> A[16],B[16] 5-27. ERACK Variable Constant Message Format ERACK Enable/disable event report acknowledge code S2F38 Format: 10 0 = Accepted (Binary) 1 = Denied: At least one CEID doesn’t exist.

  • Page 85: Lrack

    Chapter 4 Communications Specification 5-31. LRACK Variable Constant Message Format LRACK Link report acknowledge code, 1 byte S2F36 Format: 10 0 = Accepted (Binary) 1 = Denied: Not enough space 2 = Denied: Ineffective format 3 = Denied: At least one CEID link is already defined.

  • Page 86: Mhead

    Chapter 4 Communications Specification 5-35. MHEAD Variable Constant Message Format MHEAD Header of a message with error, 10 bytes S9F1 Format: 10 S9F3 (Binary) S9F5 S9F7 S9F11 5-36. OFLACK Variable Constant Message Format OFLACK Acknowledge code for offline request, 1 byte S1F16 Format: 20 (ASCII)

  • Page 87: Ppid

    Chapter 4 Communications Specification 5-40. PPID Variable Constant Message Format PPID Process program ID S7F1 Format: 20 Name of process program (sample file/carrier file) S7F17 (ASCII) S7F20 “_” in the file name means a blank. S7F23 (Sample File Created by NWL) S7F25 S_1–S10 S7F26...
  • Page 88 Chapter 4 Communications Specification Variable Constant Message Format RCMD S2F41 Format: 20 Content: PPID of the carrier file to implement When the command is enabled, collection event (ASCII) CEID = 0804 or 0808 occurs. <STOP> Completes the ongoing sequence of operations to finish a lot.
  • Page 89 Chapter 4 Communications Specification Variable Constant Message Format RCMD S2F41 Format: 20 When the command is enabled, collection event CEID = 0606 occurs. (ASCII) <MACRO_NG> Equivalent to pressing the Macro-NG key; enabled only when a Macro inspection is underway. When the reject type is not specified, a list of zero length follows MIC_NG.

  • Page 90: Rptid

    Chapter 4 Communications Specification Variable Constant Message Format RCMD S2F41 Format: 20 <INX_PD_ULK> Unlocks the indexer pod door. (ASCII) Command Parameter: Not Required Collection event doesn’t occur. <EEPROM_DMP> Updates all EEPROM data. Enabled when equipment processing status is READY. CPNAME = EEPROM_DATA CPVAL: Format 10 (Binary) Collection event doesn’t occur.

  • Page 91: Softrev

    Chapter 4 Communications Specification 5-45. SOFTREV Variable Constant Message Format SOFTREV Software revision code, 6 bytes maximum S1F2 Format: 20 ROM Version S1F13 (ASCII) S1F14 V1.22: 122000 V1.22S1(custom-built): 122S01 S7F23 S7F26 5-46. SV Variable Constant Message Format Status variable data S1F4 Depends on SVID.

  • Page 92: Svname

    Chapter 4 Communications Specification Variable Constant Message Format SVID 7 = J/S Y Tilt value S1F3 Format: 51 SVNAME = J/S_Y S1F11 (1-byte integer) SV: Format 51 (1-byte integer) S1F23 0–255 (0: MIN, 255: MAX, 128: Neutral) 11 = Current Control State SVNAME = CNT_ST SV: Format 51 (1-byte integer) 0 = Offline...
  • Page 93 Chapter 4 Communications Specification Variable Constant Message Format Results are transmitted in order of wafer S2F33 Format: 51 number on orientation flat alignment, (1-byte integer) Surface Macro, Back Side Edge Macro, and Back Side Center Macro, in this order. Wafer results are delimited from following wafer results by a comma.
  • Page 94 Chapter 4 Communications Specification Variable Constant Message Format 3 = Result data for the preceding inspection item S2F33 Format: 51 V Format: 20 (ASCII) (1-byte integer) Wafer number, inspection item, and results are transmitted. The meaning of the characters is the same as for VID = 1 above.
  • Page 95 Chapter 4 Communications Specification Variable Constant Message Format N = N/A (Not equipped with sensor, or S2F33 Format: 51 sensor setting is OFF.) (1-byte integer) 13 = Wafer pocket number V format: 20 (ASCII) Transmit a wafer pocket number. This wafer pocket number is transmitted together with CEID when CEID is any of the following: 200 (transfer to surface macro position complete);...

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