Troubleshooting - Ulvac G-TRAN Series Instruction Manual

Multi ionization gauge sensor unit
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17.

Troubleshooting

17.1.
Troubleshooting
The cause of the malfunction of this unit is often miswiring of electrical wiring.
If you notice any "strange" operation, please check the following first:
① Wiring between this unit and the remote host
② Wiring between this unit and the display unit (when using the display unit)
③ Signal Short/Open
When using a display unit, please check the display unit instruction manual as well.
Also, check whether this unit can operate independently. If this unit can measure
independently, the trouble may be caused by other units.
● POWER LED does not light when the power is supplied
Cause
Incorrect wiring or disconnection of the power
supply cable.
The power supply voltage is not within the
specification range.
Internal circuit failure.
● POWER LED is on, but 0V is still output
Cause
Incorrect wiring or disconnection of the cable.
The power supply voltage is not within the
specification range.
Internal circuit failure.
● The voltage outputs more than 9.9V, or the error signal is still outputting
Cause
Disconnection of filament.
The sensor unit is not installed.
The filament is short-circuited to the case.
Internal circuit failure.
● FIL LED blinks, the filament turns ON/OFF
Cause
Disconnection of filament.
The sensor is contaminated.
The sensitivity is decreased significantly.
The power supply voltage is lower than DC20V.
Solution
Correct the wiring and check the continuity with
a tester.
Check the power supply voltage with a tester.
This unit requires repair or inspection by ULVAC.
Solution
Correct the wiring and check the continuity with
a tester.
Check the power supply voltage with a tester.
This unit requires repair or inspection by ULVAC.
Solution
Check the continuity of the filament.
⇒ Replace the sensor if the filament is
disconnected.
Install the sensor.
Measure the insulation between each pin and the
case. ⇒ Replace the sensor if the insulation
deteriorates.
This unit requires repair or inspection by ULVAC.
Solution
Check the continuity of the filament.
⇒ Replace the sensor if the filament is
disconnected.
Replace with another sensor and check the issue.
If no issue occurs with another sensor, there is
a problem with the current one.
Check the power supply voltage with a tester.
(Power supply voltage: DC20V to DC28V)
The emission current error occurs due to
insufficient power to the filament.
In particular, ensure that the power supply
voltage is more than DC20V when the filament is
on.
49

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