Ulvac G-TRAN CCMT-D Series Manual

G-TRAN SERIES
Ceramic Capacitance Manometer
MODEL CCMT-D SERIES
Be sure to read this manual before use and keep it in your
file for future reference.
This manual is for the capacitance manometers of the
following serial numbers.
CCMT-1000D S/N 00001～
CCMT-100D S/N 00001～
CCMT-10D S/N 00001～
CCMT-1D S/N 00001～
Components Division,
ULVAC , Inc.
2500 Hagisono, Chigasaki City, Kanagawa-ken,
Japan
http://www.ulvac.co.jp/

Prior to Operation

Upon receipt of this detector, make sure that it is the correct model you ordered
and that it is not damaged in transit.
Read this manual before installation, operation,
!
inspection or maintenance and fully understand safety
WARNING cautions, specifications and operating procedure of
this instrument so that the unit can be used for a long
time.
No part of this manual may be reproduced for use by a
!
third party without written consent by ULVAC.
NOTICE

Safety Denotations

The following denotations are used throughout this
!
manual to call operator's attention to safety. The
WARNING denotations are classified as follows.
! Failure to comply with DANGER involves possibility
of impending loss of life or serious personal injury.
DANGER
! Failure to comply with WARNING involves the
possibility of loss of life or serious personal injury.
WARNING
Failure to comply with CAUTION can lead to a
!
medium degree of personal injury or serious damage
CAUTION
to the equipment.
! Failure to comply with NOTICE can lead to damage
to the equipment or malfunction.
NOTICE

Safety Cautions

For safe use of this Ceramic Capacitance Manometer, carefully read this
manual and comply with the warnings and cautions given in the manual.
Turn OFF power.
!
If the unit fails, immediately turn OFF the power.
WARNING
Use of a failed unit may cause fire or electric shock. For
repair, contact your local ULVAC representative or
ULVAC,Inc..
Turn OFF power.
!
Before touching the power terminal of this unit or if there is
WARNING
a possibility of touching it, turn OFF the power to this unit.
Some of the power terminals are energized with a line
voltage of +14～30 VDC. Contact with the terminal will
cause an electric shock. (When GM-1000, GM-2001 or GM-
2002 is used, the terminal is also energized with -15 volts.)
Operating environment
!
Do not connect this unit, except the VCR joint type, to a test
WARNING
object of which pressure is in excess of atmospheric
pressure. If the pressure in this unit exceeds atmospheric
pressure, this unit will pop out from the connection, causing
damage to the surrounding, including injury to human body.
If the pressure in this unit exceeds the maximum operating
pressure, this unit may be damaged or fail. If it is likely that
the pressure exceeds the maximum operating pressure,
provide an isolation valve so that the pressure in this unit
does not exceed the maximum operating pressure.
Don't disassemble.
!
Do not disassemble this unit.
CAUTION
Don't modify.
!
Do not modify this unit. If it is modified, its functions are
CAUTION
not warranted. Also fire or electric shock may result.
Check connection.
!
Ground the power ground and frame ground.
CAUTION
Check connection.
!
Prior to turning ON the power, make sure that there is no
CAUTION
error in wiring. Connecting incorrect power may cause
damage to this unit or fire.
Operating conditions
!
When you do zero point adjustment, please use the attached
CAUTION
pin(max.φ1.1mm).
Check line voltage.
!
Prior to turning ON the power, make sure that this unit
CAUTION
operating voltage and the supply voltage are in agreement.
Connection of incorrect power can cause damage to this unit
or fire.The supply voltage is +14～30 VDC (pin 7 or 11).
Operating conditions
!
Use this unit under the environment set forth in the
CAUTION
specification.
Operating environment
!
Do not use this unit in a place where it may be splashed with
CAUTION
water. If it is splashed with water, failure, earth leakage or
fire can result.
Model
Range full scale
Lowest reading
Lowest suggested reading
Accuracy 1)
Resolution
Temperature effect on zero
Temperature effect on span
Ambient operating temperature
Storage temperature
Max temperature at flange
Pressure max. (absolute)
Response time
Materials exposed to process media
Standards
Protection type
Supply voltage
Output Signal
Flange
No.SK00-7510- Weight
EI-102-09
Internal volume

Electrical connection

1)Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation、 after adjustment for
ZERO, We recommend regular zero point adjustments before use, depending on the customer's environment.
2)non operation
3)28% Ni, 23% Co, 49% Fe
Beware of impact.
!
Do not give an impact to this unit.
CAUTION
Repacking for transfer
!
If this unit is to be shipped to another site, repack it in the
CAUTION
same way as on delivery. If it is shipped bare, it may be
damaged.
Discarding
!
When discarding this unit, comply with your local
CAUTION
regulations. Especially, if this unit was used in an
atmosphere that can cause hazards to human body, it must
be disposed of by a specialist in disposal. Customer shall be
responsible for the cost relating to disinstallation.
Operating conditions
!
When you do zero point adjustment, please use the
attached pin(max.φ1.1mm).
CAUTION

Feature

The Model CCMT-D is a capacitance manometer that detects
displacement of ceramic diaphragm caused by change of gas pressure by
utilizing electrostatic capacitance.
The heart of the sensor being a mono block made of ceramics, this
manometer provides high repeatability and stability and permits high
accuracy measurement of pressure in the low and medium vacuum regions
regardless of the type of gas.

Specifications

Please refer to the spec chart.

Accessories

Pin(max.φ1.1mm)
Instruction manual

Option

Display
Display Cable
Test results certificate
Calibration certificate

Installation of CCMT-D

1. Preliminary Operation
・Unpack this unit and check quantities.
・Check components to see if any of them is damaged in transit.
2. Installing this unit
Install this unit to the gauge port of a vacuum system.
2.1. Measuring position
・This unit measures static pressure in the position where it is connected. If
there is gas flow or an outgas source or an intense electron or ion
generating source, the measurement value will be affected. So select the
measuring position carefully.
・Note that if this unit is subjected to vibration, heat radiation, high intensity
magnetic field or intense radiation, correct pressure measurement may not
be made.
・Be careful that the ambient temperature deviates considerably from the
calibrating temperature (25°C).
2.2. Installing this unit
・Install this unit in such a manner that this unit mounted opening plane is
parallel with gas flow. See to it that gas does not enter this unit in the form
of beam. Avoid use in a place where vibration is at a high level, if
possible.
・Be careful in selecting the installation place and handling this unit.
・To install this unit, use an O-ring that releases little outgas.
・Use of a material that releases much outgas like rubber pipe or grease for
connection of this unit can be a cause of error.
Specifications
CCMT-1000D
133kPa F.S.
13Pa
66.6Pa
2)
4x10 +5 Pa
Aluminum oxide ceramic（Al
1/2 inch tube:5.8 cm3、DN 16 ISO-KF:6cm3、8VCR:8.15cm3
×1
(this manual) ×1
ISG1、GM-2001、GM-2002
Calibration certificate, JCSS Calibration
certificate
CCMT-100D CCMT-10D
13.3kPa F.S. 1.33kPa F.S.
1.3Pa 0.13Pa
6.7Pa 0.67Pa
±0.2% of Reading ± Temperature effect
0.003% F.S.
0.005% F.S./℃
0.01% Reading/℃
10～50℃
-40 ～60℃
110℃
2.6x10 +5 Pa
≦30msec
）、Vacon70 、SUS316、glass ceramics solder、AgTiCu hard Solder
O 3)
2 3
CE
IP30
DC14-30V,1W
DC0-10V
input impedance(recommended): >10kohm, ≦0.1uF
1/2 inch tube、DN 16 ISO-KF、8VCR
1/2 inch tube:329g、DN 16 ISO-KF:344g、8VCR:386g
15 pole D-Sub. Male (inch screw #4-40)
Electrical connection
Use the D-Sub 15-pin female connector (inch screw #4-40) to supply
power to this unit and to connect the output signal from this unit. Apply
power of +14～30 VDC to pin 7 or 11.
The signal from the capacitance manometer is outputted between pins 2
and 12.
Pin No.
2
5
7
11
12
15
Fig.1. Capacitance manometer connection diagram
Wiring connection check
!
Do not connect the PIN number 1,3,4,6,8,9,10,13
CAUTION and 14.

Operation

1. Turning on power to the manometer will start measurement.
<RUN> LED lighting: measuring
<RUN> LED flashing: over pressure or zero adjustment
2. However, wait for more than 30 minutes after turning on the power until
the output voltage is stabilized.
Especially when a manometer for measuring a low pressure range (for
example, Model CCMT-10D) is used or when an effective digit below
1/1000 of the full scale is required, start measurement after the
temperature equilibrium of the manometer is fully established by applying
power for several hours continuously.
Do not turn off the power when a sequence of measurements is going on.
At switch on, the output voltage value shows as -5V, in order to
initialize the inner circuit. Therefore, please import the output voltage
after 2 or more seconds from turning on.
3. This is an absolute pressure type capacitance manometer of which
measurement value is not affected by the type of gas, but its characteristics
may change if it is exposed to a chemically active gas or highly absorptive
gas.
4. The proof-pressure of the capacitance manometer is according to the table
below:
CCMT-1000D ： 4.0 x10
+5
Pa (absolute pressure)
CCMT- 100D ： 2.6 x10
+5 Pa
CCMT- 10D ： 2.6 x10
+5 Pa
1D ： 2.6 x10
CCMT- +5 Pa
5. It is necessary to correct the zero point at a pressure sufficiently lower than
the measurement pressure before starting measurement.
If the ultimate pressure of the system in which this manometer is used is
not sufficiently low to make zero point correction, its specifications may
not be met. Refer to "Zero Point Adjustment Function."
CCMT-1D
133Pa F.S.
1.3x10 -2 Pa
-2
6.7x10 Pa
0.015% F.S./℃
Use
V+
Analog ground
+14～30V
+14～30V
V-
Frame ground