Sh200 Stand - Alone Mode Standard; Specifications; Standard Specifications - Ulvac G-TRAN Series Instruction Manual

2.3. SH200 stand-alone mode standard specifications
Measurable
pressure range
(N )
2
Accuracy (N )
2
POWER LED status
Control input
signal
2.4. SWU combination mode (SH200+SWU) standard specifications
Measurable
pressure range
(N )
2
Accuracy (N )
2
POWER LED status
Control input
signal
-8
5.0×10 Pa to 1.0×10
-8
5.0×10 Pa to 1.0×10
White : Start up
Blue : Normal operation
Green : Filament is on
Blinking Red: Power failure
FIL ON/OFF, FIL 1/2
DEGAS ON/OFF
Open collector input,
Negative logic
-8
5.0×10 Pa to 1.0×10
When pressure drops: SWU indicates 2Pa or lower, SWU ⇒SH200
When pressure rises: SWU indicates 3Pa or higher, SH200⇒SWU
※ SH200 measurement can be forcibly turned off with the
control signal.
Pressure range
-8
5.0×10 Pa to 4.0×10
-1
4.0×10 Pa to 3.0×10
+0
3.0×10 Pa to 1.0×10
+4
1.0×10 Pa to 1.0×10
In the overlapping pressure range of 0.4Pa to 3.0Pa, the
measured pressure of the Pirani gauge and SH200 is adjusted and
output.
※ SWU and SH200 have gas species dependency. Please note
the difference in pressure indication when gauges switch.
White : Start up
Blue : Normal operation to SWU measurement range
Green : SH200 filament is on
Red : SWU power failure
Blinking Red: SH200 power supply voltage error
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Open collector input, Negative logic
※ When FIL ON/OFF signal is Lo input, the filament of SH200
is off.
+1
Pa
+1
Pa: ±15%
+5
Pa
Accuracy
-1
Pa ±15%
+0
Pa ±10% to ±15%
+4
Pa ±10%
+5
Pa ±20%
6