Separately; Sh200 Standard Specifications - Ulvac G-TRAN Series Instruction Manual

2.2.

SH200 standard specifications

Name
Type
Model
Compatible sensor
Compatible
measuring unit
Repeatability (N )
2
Measuring gas type
Emission current
DEGAS
Sampling time
Measured Value
output
Update time
Resolution
Output
impedance
Control output
signal
Communication
Communication
speed
LED display
M-4*
Sensor
Material
M-3*
Sensor
breaking pressure
Sensor
internal volume
Operating
temperature range
Multi ionization gauge sensor unit
Analog output type
SH200-A
M-44 (NW16), M-45 (NW25), M-46(ICF70): 1
【M-34 (NW16), M-35 (NW25), M-36 (ICF70): Option】
Pirani gauge SWU
Pirani gauge SPU
Pressure sensor unit SAU : 1
SH200 stand-alone mode: ±2％
Indicate pressure as sensitivity to N
-3
1mA (1.0×10 Pa or lower), 10uA (1.0×10
Electron bombard method
SH200 starts DEGAS at an emission current of 1mA, grid voltage
of approx.330V, and approx.1.0×10
5times in 60msec moving average
Output voltage DC 0 to 10V, LOG output 0.75V/1 digit
Pressure[Pa] conversion formula
V=7.25+0.75*(LogP-2)
60msec
approx.2.5mV
100Ω
Sensor Error, Setpoint1/2/3,
Emission valid,
Filament electric power
monitoring
Rated: Less than the supply
voltage,50mA
MAX
Saturation voltage 1V
USB Type-C
POWER: Power, error, filament status display
SWU/SPU: Pirani gauge SWU/SPU status display
※SWU/SPU combination mode, SAU combination mode only
SAU: Pressure sensor SAU status display
※SAU combination mode only
Filament 1 and 2: Ir/Y
Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plated
Filament 1: Ir/Y O coated
2 3
Other: PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plated
+5
2.0×10 Pa（absolute pressure）
※ Please consider the breaking pressure of flanges and clamps

separately.

3
M-44: 17cm , M-45: 19 cm
3
M-34: 17cm , M-35: 19 cm
10℃ to 50℃
Serial communication type
SH200-R
: 1 ※SWU and SPU cannot operate
: 1 together.
gas
2
-3
-3
Pa or less.
P=10^{(V-7.25)/0.75+2}
RS-232C, RS-485 half duplex
9600/19200/38400bps
O coated
2 3
Filament 2: Tungsten
3 3
, M-46: 17 cm
3 3
, M-36: 17 cm
4
Pa or higher)