Handling Precautions; Precautions On Operating Environment - Ulvac G-TRAN Series Instruction Manual

3.

Handling precautions

*Note*
3.1.

Precautions on operating environment

Ensure ventilation
Do not place this unit in a sealed container. Install it in a place where
ventilation is ensured. Sealing it may increase the temperature of the electronic
components in the power supply and shorten its life.
Precautions for gases used
Both filaments 1 and 2 are Ir/Y
active gases such as halogens and halogen-based gases, problems such as
M-44 filament disconnection and changes in pressure characteristics may
M-45 occur.
M-46 If operating this unit in such an environment, install an isolation
valve between this unit and the vacuum chamber to protect it from
exposure to these gases.
Filament 1 is Ir/Y
such as halogens and halogen-based gases, problems such as filament
disconnection and changes in pressure characteristics may occur.
M-34 Filament 2 is made of tungsten. In an atmosphere containing a lot of
M-35 oxygen, the life of the filament may be shortened due to burnout
M-36 (approx. 3hours at 1Pa air introduction).
If operating this unit in such an environment, install an isolation
valve between this unit and the vacuum chamber to protect it from
exposure to these gases.
Operation in the corrosive gas atmosphere
If this unit is exposed to corrosive gases or chemically active gases such as
halogen or halogen-based gases, troubles such as filament disconnection or changes
in pressure characteristics may occur. If operating this unit in such an
environment, install an isolation valve between this unit and the vacuum chamber to
protect it from exposure to these gases.
Operation in CVD gas atmosphere
If this unit is exposed to CVD (Chemical Vapor Deposition) source gases and gases
that accumulate, such as oil mist in rotary pumps, troubles such as filament
disconnection or changes in pressure characteristics may occur. If operating this
unit in such an environment, install an isolation valve between this unit and the
vacuum chamber to protect it from exposure to these gases.
Moisture and deposits
If many deposits, such as moisture or organic matters, that evaporate gradually
exist in the sensor unit, it will affect the vacuum side pressure accuracy and
response speed. Please consider the installation location and method to prevent
deposits.
Effect of magnetic field
The pressure indication of this unis is affected by a magnetic field of 0.002T (20
Gauss) by approximately 10%. If this unit is affected by a magnetic field, install a
magnetic shield.
Please read this chapter before using this unit.
O coated. If exposed to chemically active gases
2 3
O coated. If exposed to chemically
2 3
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