Ulvac AxTRAN ISX2 Manuals

Manuals and User Guides for Ulvac AxTRAN ISX2. We have 1 Ulvac AxTRAN ISX2 manual available for free PDF download: Instruction Manual

Ulvac AxTRAN ISX2 Instruction Manual

Ulvac AxTRAN ISX2 Instruction Manual (84 pages)

EXTREME-HIGH VACUUM GAUGE

Brand: Ulvac | Category: Measuring Instruments | Size: 1 MB

Table of Contents

Before Use of this Gauge
3
Safety Denotations
3
Safety Precautions
4
Table of Contents
7
1 Features of Isx2

10
2 Specifications and Components

11
- Standard Specifications
  11
- Performance
  12
- Utilities
  12
- Standard Accessories
  12
- Options
  12
3 Nomenclature and Functions of Components

13
4 Installation

20
- Preliminary Operation
  20
5 Flow of Program Run

22
6 Starting up Gauge (Supply of Power)

23
7 Front Panel Operation

24
- Filament ON/OFF
  24
  - When Pressure Protection Is Activated
    25
- Initialization
  26
- Offset
  26
- Degassing ON/OFF
  27
8 Initial Setting

28
- Sensitivity Factor Setting
  31
- Specific Sensitivity Factor Function Setting
  32
- Degassing Time Setting
  33
- Filament No. Selection
  34
- Recorder Selection
  34
- Filter Setting
  35
- Offset Adjustment Interval Setting
  36
- Setting of Baud Rate
  37
9 Functions

38
- Setting of Sensitivity Factor
  38
  - Sensitivity Factor
    38
  - Details of Specific Sensitivity
    38
- Set Point
  39
  - What Is the Set Point
    39
  - Setting of Set Point
    39
  - Internal Processing
    39
  - Set Point Activating Conditions
    39
- Degassing
  40
  - What Is Degassing
    40
  - Setting the Degassing Time
    40
  - Degassing Operation
    40
- Filament Change
  41
  - Cautions in Operation
    41
- Changing over Recorder Output
  42
  - Setting of Recorder Mode
    42
  - Measurement Value Output in each Status
    42
  - LIN Output
    42
  - LOG Output
    44
  - Resolution and Output Period
    45
10 External Inputs/Outputs

46
- Set Point Output
  46
- Option Board
  47
- EXT-I/O Connector
  48
- External Digital Output
  49
- External Control Input
  52
- Method of External Control
  54
11 How to Use Communication (Rs-232C)

55
- Communication Specifications
  55
  - Key Specifications
    55
  - Baud Rate Setting
    55
  - Communication Cable/Connector
    55
- List of Commands
  56
- Explanation of Command Action
  57
  - Changing over Remote/Local Control
    57
  - Reading the Emission Valid Signal
    57
  - Control of Filament
    57
  - Control of Degassing
    57
  - Reading the Gauge Status
    58
  - Setting Sensitivity Factor
    58
  - Setting Specific Sensitivity Factor
    58
  - Setting and Reading the Setpoint
    58
  - Reading the Measured Pressure Value
    59
  - Reading the External Protection Status
    59
  - Setting of Filter
    59
  - Control of Offset
    59
  - Reading the Controller Status
    59
  - Error Resetting
    60
  - Setting the Recorder Output
    60
- Cautions in Operation
  60
12 Troubleshooting

61
- Cause and Measures Where Emission Current Doesn't Flow
  68
- About the Malfunction Indication
  68
13 Appendix

69
- Principles of Operation
  69
- Types of Measurable Gas and Specific Sensitivity
  73
14 Appendix: Test Mode

75
15 Warranty

76
16 Ec Declaration of Confortmity

77
17 China Rohs Declaration

78
18 Certificate of Decontamination

79
19 Related Drawings

80

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