Replacement Of Sensor; Tool; Removing Sensor; Installing Sensor - Ulvac G-TRAN Series Instruction Manual

16.

Replacement of sensor

Turn off the power supply.
When replacing the sensor, be sure to turn off the power supply. Do
*WARNING*
not turn on the power until you finish the replacement. Inserting or
removing the sensor with the power on may damage this unit and the
equipment connected to it or cause a fire.
16.1.

Tool

Hex wrench of opposite side size 1.5 mm.
16.2.

Removing sensor

Loosen the sensor fixing screw to remove the sensor. Pull out the sensor slowly.
Sensor fixing screw
16.3.

Installing sensor

Insert the sensor into SH200 slowly. Inserting quickly may cause a strong force,
which may cause the sensor to leak or damage the circuit board. After inserting
firmly, tighten the sensor fixing screw.【Torque：0.4N･m】
Sensor fixing screw
48