Control Input Signal; Control Input Signal (Sh200-Aonly ) - Ulvac G-TRAN Series Instruction Manual

Multi ionization gauge sensor unit
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8.

Control input signal

This chapter explains the input signal to this unit.
The analog output type inputs a signal by an open collector.
The communication type SH200-R uses serial communication to control.
8.1.
Control input signal (SH200-A only)
Contact capacity
*Note*
The capacity of the external contact should be greater than or equal
to the input power supply voltage or greater than DC30V/10mA.
Contact leak current
Please pay attention to the contact leak current. If a current of
*Note*
0.1mA or more flows between the input signal pins and the GND
terminals, it may be processed as if the leak current is an input
signal.
FIL ON/OFF, FIL 1/2, and DEGAS ON/OFF are input from this unit's I/O connector.
When using those signals, they work while the signal pins and the GND terminal are
being short-circuited.
Fig. 8-1 SH200-A input signal internal circuit diagram
20

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