Safety Precautions - Ulvac G-TRAN Series Instruction Manual

To use the G-TRAN series sensor unit (hereinafter referred to as this unit) safely,
please be sure to read the instruction manual and the following safety precautions:
Power shutoff
*WARNING*
If this unit is damaged, shut off the power immediately. Failure to do so may
cause fire or electric shock.
Power shutoff
*WARNING*
If this unit generates abnormal heat, smoke, or unusual smells, shut off the
power immediately. Failure to do so may cause a fire.
High-temperature warning
*WARNING*
Do not touch the sensor unit during and immediately after the operation because
its surface is hot. Touching it may cause burns.
Power supply voltage
Before turning on the power supply, make sure that this unit's operating voltage
*WARNING*
and the power supply are correct. If the wrong power supply is connected, it may
damage this unit and the equipment connected to it or cause a fire. In particular,
do not apply a voltage exceeding DC28V. The overvoltage category is Category I.
Power supply with lightning surge protection
Use a power supply with lightning surge protection.
*WARNING*
If the power supply does not have lightning surge protection, it may damage this
unit and the equipment connected to it or cause a fire.
Excess pressure in a vacuum chamber
Do not connect the sensor unit to a place where the pressure inside the sensor
unit exceeds the atmospheric pressure. If the pressure inside the sensor unit
exceeds the atmospheric pressure, the sensor unit may be damaged, or the sensor
*WARNING*
unit may fly out from the connection, causing harm to the surrounding, including
the human. If the pressure inside the sensor unit exceeds the atmospheric
pressure, install an isolation valve to prevent the pressure inside the sensor
unit from exceeding the atmospheric pressure.
Protective earth
This unit must be electrically connected to a grounded vacuum chamber. Use a
conductive metal clamp for the NW flange. If failing to ground properly, it cannot
*WARNING*
indicate the correct pressure. It may also damage this unit and the equipment
connected to it or cause a fire.
If insulation from the vacuum chamber is required, the case part (the shell part
of the D-sub connector) needs to be D-type-grounded (class 3).
Operating environment (Condensation, Humidity)
Do not use this unit in a place where humidity is high, and condensation occurs
or where this unit is exposed to water. If water enters inside this unit, it may
*WARNING*
cause a failure, electrical leakage, or fire.
Also, operating this unit outside the temperature range of the specification may
cause failure and fire.
Turn off the power supply when replacing the sensor
*WARNING*
Be sure to turn off the power supply when replacing the sensor unit. DC330V may
be applied to the grid, which may cause fire or electric shock.
Disassembly is prohibited
*WARNING*
Do not disassemble this unit. Disassembling this unite may cause fire or electric
shock. The operation is not guaranteed if the unit is disassembled.
Modification is prohibited
*WARNING*
Do not modify this unit. Modifying this unite may cause fire or electric shock.
The operation is not guaranteed if the unit is modified.

Safety precautions

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