Status Setting List; When Writing Status - Ulvac G-TRAN Series Instruction Manual

15.4.

Status setting list

This shows the setting of the filament on and the degas on, errors, and setpoint status.

When writing status

Filament ON/OFF signal
*Note*
The use of the SH200 filament ON/OFF signal differs between the
SH200 stand-alone mode and the combination mode.
SH (Status/high bit)
bit Status
B7 FIL 1/2
B6 FIL ON/OFF
B5 N･C
B4 DEGAS ON/OFF
FIL 1/2
※SH200 stand-alone mode FIL ON/OFF
※Combination mode FIL OFF/ON
DEGAS ON/OFF
SL (Status/low bit)
bit Status
B3 N･C
B2 N･C
B1 N･C
B0 N･C
※ Both [1] and [0] work for N･C.
Example) When turning on the filament using the filament1, the status is as
follows:
bit
B7
B6
B5
B4
Therefore, when the address "11", the command to be sent is as follows:
command :
:
0 8
〔30H〕 〔38H〕
0 1
0 0
0 0
0 0
0〔30H〕
0
0
0
0
Status C〔43H〕
FIL 1 1
FIL ON 1
N.C 0
DEGAS ON 0
AD0 AD1 SW
↓ ↓ ↓
1 1 SW
C 4
〔43H〕 〔34H〕
1 0
1 1
0 0
0 0
1:FIL1 0:FIL2
1:ON 0:OFF
1:OFF 0:ON
1:ON 0:OFF
bit Status
B3 N.C
B2 N.C
B1 N.C
B0 N.C
SH SL CHKH
↓ ↓
C 0
44
D 5
〔44H〕 〔35H〕
1 0
1 1
0 0
1 1
0〔30H〕
0
0
0
0
CHKL CR
↓ ↓
7 7 CR