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Summary of Contents for Ulvac GP-1000G
- Page 1 No. SK00-7011-EI-004-07 MODEL GP-1000G (Pa/Torr) PIRANI VACUUM GAUGE INSTRUCTION MANUAL This manual is for the following vacuum gauges. Serial Nos.T7000G and higher Read this manual before operation and keep it at your hand for immediate reference. ULVAC , Inc.
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Page 2: Safety Symbols
The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc. -
Page 3: Safety Cautions
If the vacuum gauge gets unusually hot or gives off smoke or unusual smell, immediately turn OFF the power. Otherwise, fire can result. For safety, contact your local ULVAC representative or ULVAC, Inc., JAPAN. Turn OFF power. Before touching any terminal on the control rear panel or if there is a possibility of touching it, turn OFF the vacuum gauge power. - Page 4 Operating conditions Operate the vacuum gauge under the environment set forth in the specifications. Beware of impact Do not give an impact to the sensor head. Repacking for transfer If the vacuum gauge is to be shipped to other site, repack it in the same way as on delivery.
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Page 5: Table Of Contents
Contents Page Prior to Use ............................i Safety Symbols ............................. i Safety Cautions ........................... ii OVERVIEW ..........................1 1.1. Specifications ........................1 Options ..........エラー! ブックマークが定義されていません。 1.2. 1.3. Description of Components ....................4 1.3.1. Front panel ........................4 1.3.2. Rear panel ........................5 1.3.3. -
Page 6: Overview
1. OVERVIEW The Model GP-1000G is a constant temperature type Pirani vacuum gauge utilizing heat conduction of gas. The measurable pressure range is 0.4 to 2700 Pa. Pressure can be set at two points and its comparator output can be taken out as setpoint (transfer type). -
Page 7: Options
CE standard Tested Norms EMC Emmission EN61000-6-4:2007 EN61326-1：2006 EN61000-3-2：2006 EN61000-3-3：1995 + A1: 2001 + A2:2005 Immunity EN61000-6-2:2005 EN61326-1：2006 Basic Standards Electrostatic discharge immunity test (ESD) EN61000-4-2：1995 + A1:1998 + A2:2001 Radiated, radio-frequency, electromagnetic field immunity test EN61000-4-3：2006 Electrical fast transient / burst immunity test (BURST) EN61000-4-4：2004 Surge immunity test (Surge) EN61000-4-5：2006... - Page 8 1.3.2. Measuring unit Measuring unit GP-H GP-BH（Conversion cable 2m） Sensor head WP-01, WP-02, WP-03, WP-16 WPB-10, WPB-10-034 GP-BH: 0.13kg Weight Conversion calbe: 0.2kg *Because of its circuitry, the indication of this vacuum gauge varies with the type of sensor head. Therefore, if the type of sensor head is changed after delivery, re-adjustment will be required.
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Page 9: Description Of Components
1.4. Description of Components 1.4.1. Front panel Fig. 1-1 Front panel of controller ① LCD display panel Pressure indicator. Displays the indicated pressure value, unit of pressure, set pressure value of each setpoint and relay status of each setpoint. Refer to 1.3.3 "LCD panel" for more information. ②... -
Page 10: Rear Panel
1.4.2. Rear panel Fig. 1-2 Rear panel of controller ③ Sensor head cable connector Connector for connecting the sensor head cable. Connect the supplied sensor head cable. ④ Ground terminal Ground terminal for this gauge. Attach M3 solderless terminal before use. Analog ground, digital ground and frame ground are common. -
Page 11: Lcd Panel
1.4.3. LCD panel ⑥ ① ② ③ ④ SET 1 ⑤ SET 2 SET 3 Fig. 1-3 LCD panel ① Unit of pressure Indicates the measured pressure in Pa or Torr. ② Pressure mantissa part Indicates the mantissa part of the measured pressure. ③... -
Page 12: Installing The Pirani Vacuum Gauge
2. INSTALLING THE PIRANI VACUUM GAUGE Turn OFF power. Whenever mounting the vacuum gauge, unplug the power cable. 2.1. Preliminary Operation • Unpack the vacuum gauge and check quantities. • Check components for possible damage. 2.2. Installation 2.2.1. Installing the controller Ventilation Do not plug the air vents of the vacuum gauge controller. -
Page 13: Installing The Sensor Head
2.2.2. Installing the sensor head Operating environment Do not connect the sensor head to a test object of which pressure is in excess of atmospheric pressure. If the pressure in the sensor head exceeds atmospheric pressure, the sensor head will be damaged or it will pop out from the connector, causing injury to the surrounding, including human body. -
Page 14: Electrical Connection
Plug the power cable to a 100 VAC outlet. MEASURING UNIT GP-H MEASURING UNIT GP-BH SENSER HEAD (WP-01) CONVERSION CONTROLLER GP-1000G MEASURING UNIT CABLE POWER CALBE SETSCREW GP-BH SENSER HEAD (WPB-10- 034) Fig. 2-1 GP-1000G overall connection diagram - 9 -... -
Page 15: A Sensor Head Installation Method To Gp-H
2.2.4. A sensor head installation method to GP-H Screw for fixation The installation methods of a screw for fixation are different by a sensor head. ①Install a screw for fixation that is attached to GP-H to a sensor head. By the kind of the sensor head, installation methods are different It is inserted a screw for fixation by the... -
Page 16: Operating Procedure
3. OPERATING PROCEDURE 3.1. Cautions in Handling Start measurement more than one minute after power is turned ON and the indication is stabilized. (2) The relay set point sometimes actuated in a moment after three seconds when power is turned For precision measurement, wait for at least 10 minutes until temperature equilibrium of the sensor head is established after power is turned ON. -
Page 17: How To Set The Dip Switch
3.2. How to Set the DIP Switch JSW1 Sets the unit of pressure,Pa or Torr. The pressure display changes simultaneously with the changeover, allowing direct reading of the pressure. “ON”: Torr “OFF”: Pa JSW2 /Ar gas setting switch. "ON" : N gas sensitivity "OFF": Ar gas sensitivity. -
Page 18: Display Of Pressure Out Of Measurement Pressure Range
Factory set as shown above Table. 3-4 ON 側 ↑ 3.3. Display of Pressure out of Measurement Pressure Range Pressure out of the measurement pressure range is displayed as follows. When pressure is lower than 4.0 × 10 Pa : Displayed as 0.0 × 10 When pressure is higher than 2.7 ×... -
Page 19: Relay Setpoint Output
3.4. Relay Setpoint Output 3.4.1. Setpoint The setpoint relay output is actuated (reversed) when the measured pressure value is lower than the set pressure value. What is meant by "Pressure is higher or lower" is as follows. 2.0 × 10 [Pa] is lower than, or 8.0 ×... -
Page 20: External Inputs/Outputs
4. EXTERNAL INPUTS/OUTPUTS 4.1. External Input/Output Connector Assignment Pa/Torr, N /Ar can be changed over by external inputs. Refer to Table. 4-1 "I/O Connectors" for the input terminals. For changeover, input TTL level Lo/Hi or relay setpoint SHORT/OPEN. For external changeover of Pa/Torr, turn OFF JSW1 of the DIP switch. For external changeover of Ar/N , turn OFF JSW2 of the DIP switch. -
Page 21: Bcd Output
4.2. BCD Output Digital signals of pressure values are outputted from the I/O connector on the rear panel of the controller. Refer to Table. 4-1 "I/O Connectors". The relationship between mantissa parts A, B and C is as shown below. SYMBOL ．... -
Page 22: Strobe Signal
4.3. Strobe Signal ② 200[ms] ① 1.5[ms] Strobe ストローブ データ Data Fig. 4-1 Strobe signal output ① Duration of strobe signal The duration from the rise to fall of the strobe signal is 1.5 [ms]. ② Interval of strobe signal The interval of strobe signals is 200 [ms]. -
Page 23: Recorder Outputs
5. RECORDER OUTPUTS Recorder outputs DC [V] can be taken out from the recorder output terminal (pin 1, pin 20) of the I/O connector on the rear panel of the controller. The following three outputs are available by setting the DIP switch. Refer to 3.2 "How to Set the DIP Switch". -
Page 24: Paf.s
Linear Output 1.0 × 10 5.2. Paf.s. The output is 0 to 10 V and is delivered linearly to the pressure indication. The relationship between the pressure indication and recorder output voltage is as shown below. (with Pa display) Table. 5-2 Pressure-Recorder Output Voltage: Linear 1.0×10 Pa(1.0×10 Torr) f.s. -
Page 25: Dummy Log Output Each Range 1V
5.3. Dummy Log Output Each Range 1V The recorder output is 1 V per pressure range within the output range of 0 to 4.27 V and the scale range is linear. The relationship between the output indication and the recorder output voltage is as shown in the table below. -
Page 26: Non-Linear Output
5.4. Non-Linear Output Non-Linear output is compatible with S-range output of GP-2G/2GRY and GP-2A/2ARY. The relationship between the pressure indication and recorder output voltage is as shown below. Table. 5-4 Pressure-Recorder Output Voltage: Non-Linear output with Pa display with Torr display Pressure Voltage Pressure... - Page 27 0.0E+00 2.0E+02 4.0E+02 6.0E+02 8.0E+02 1.0E+03 1.2E+03 P ressu re (P a ) Fig. 5-1 Recorder output voltage graph (Linear output 1.0×10 Pa f.s.） 0.0E+00 2.0E+01 4.0E+01 6.0E+01 8.0E+01 1.0E+02 1.2E+02 P ressu re (P a ) Fig. 5-2 Recorder output voltage graph (Linear output 1.0×10 Pa f.s.）...
- Page 28 4.50 4.00 3.50 3.00 2.50 2.00 1.50 1.00 0.50 0.00 1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 P ressu re (P a) Fig. 5-3 Recorder output voltage graph (Dummy LOG output） 1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 P ressu re (P a) Fig. 5-4 Recorder output voltage graph (Non-Linear output) - 23 -...
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Page 29: How To Use Communication (Rs-232C)
6. HOW TO USE COMMUNICATION (RS-232C) 6.1. Specifications (1) System : Half duplex (2) Data bit length : 8 bits (3) Stop bit length : 1 stop bit (4) Parity : None (5) Code : ASCII (6) Baud rate : Selectable from 1200, 2400, 4800 and 9600. Refer to 3.2 "How to Set the DIP Switch"... -
Page 30: Communication Commands
6.3. Communication Commands Table. 6-2 RS-232C Commands Answer Command Meaning 'CO' + CR 'OK' + CR '?' + CR Remote command 'CF' + CR 'E' + CR '?' + CR Local (communication reset) command 'KN' + CR 'OK' + CR '?' + CR sensitivity designation 'KA' + CR... -
Page 31: Appendix
The constant temperature type Pirani gauge supplies the energy lost by collision of gas molecules from the heated filament and maintains the filament temperature constant all the time. ULVAC Pirani gauge is this type of gauge. This type of gauge is less susceptible to change of α and more advantageous over other types of Pirani vacuum gauges in terms of small change in α, stability and responsibility. -
Page 32: Types Of Gas Measured And Indication
7.2. Types of Gas Measured and Indication As briefly explained in "7.1 Principles of Operation", the indication of the Pirani vacuum gauge changes with the type of gas measured. In the molecular flow region, A (free molecule thermal conductivity) is given by the following equation. - Page 33 Ｈ ２ Ｈ ｅ Ｎ ２ Ｏ ２ Ａ ｒ Ｃ Ｏ ２ Indication of Pirani gauge (Pa) Indication of Absolute pressure of Gas (Pa) Pirani gauge (Pa) 3.1E-1 9.7E-1 5.3E-1 5.3E-1 5.9E-1 3.7E-1 7.4E-1 2.0E-1 4.3E-1 7.8E-1 8.2E-1 6.0E-1 8.2E-1 1.5E+1 1.3E+1...
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Page 34: Change Of Indication With Ambient Temperature
7.3. Change of Indication with Ambient Temperature Ｐ ＝ ２ ０ ０ ０ Ｐ ａ Ｐ ＝ １ ０ ０ ０ Ｐ ａ Ｐ ＝ ５ ０ ０ Ｐ ａ Ｐ ＝ ２ ０ ０ Ｐ ａ Ｐ ＝ １ ０ ０ Ｐ ａ Ｐ... -
Page 35: Troubleshooting
8. TROUBLESHOOTING Symptom: No display appears on the front panel when power is turned ON. Possible cause Corrective action • The power cord is disconnected. 1) Check the power cord for connection. • The line voltage is below the specified 1) Check the line voltage by a circuit tester. - Page 36 The display does not blink at 2.7 × 10 Symptom: Pa when atmospheric pressure is being measured. Possible cause Corrective action • The type of sensor head differs from the 1) Change the sensor head with the specified type. specified one. Or re-adjust and re-calibrate the one in use.
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Page 37: Warranty
Response procedure 1) Domestic business in Japan: ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the local ULVAC representatives for repair. If field service is required, Buyer shall ask ULVAC, Inc. -
Page 38: Ce Declation Of Conformity
10. CE DECLATION OF CONFORMITY - 33 -... -
Page 39: China Rohs Declaration
11. China RoHS Declaration This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed. -
Page 40: Certificate Of Decontamination
Certificate of Decontamination - 35 -... -
Page 41: Related Drawings
13. RELATED DRAWINGS Space for power cable and sensor head cable Panel cut dimensonal drawing Fig. 13-1 Dimensional drawing for GP-1000G - 36 -... - Page 42 Fig. 13-2 Dimensional drawing for measuring unit GP-H Fig. 13-3 Dimensional drawing for measuring unit GP-BH - 37 -...
- Page 43 BS (Ni plating) Pt (φ 25µ) φ 3/8 WP-03 BS (Ni plating) Pt (φ 25µ) WP-16 BS (Ni plating) NW-16（φ 30） Pt (φ 25µ) WPB-10-034 UFC-034 SUS304 Pt (φ 25µ) Fig. 13-4 Sensor heads compatible with GP-1000G - 38 -...
- Page 44 ＷＰＢ－１０－＊＊＊ ＷＰ－０１，０２，０３，１６ Fig. 13-5 Sensor head filament connection diagram (2,5,10,15,20,30,50,100m) Pin No. +5 V +15 V V– Cover Fig. 13-6 Sensor head cable GP-1000 cable side GP-1000G side Fig. 13-7 Conversion connector from GP-1000 to GP-1000G - 39 -...
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