Sau I/Oconnector - Ulvac G-TRAN Series Instruction Manual

Multi ionization gauge sensor unit
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4.6.
SAU I/O connector
Pin number
1
Power supply DC+15V
2
GND
3
Power supply DC+15V
4
Measured value output
5
6
GND
7
Power supply DC+15V
8
GND
Case
Frame ground
Fig. 4-6 SAU I/O connector pin layout
(Mini I/O plug)
This unit
Power supply for driving this unit
Ground for this unit
Power supply for driving this unit
Pressure signal voltage
Ground for this unit
Power supply for driving this unit
Ground for this unit
Ground for frame
17
Function
(DC15V)
(DC15V)
(DC0V to 5V)
(DC15V)

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