Table Of Contents - Ulvac G-TRAN Series Instruction Manual
Multi ionization gauge sensor unit
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Also See for G-TRAN Series:
- Instruction manual (107 pages) ,
- Manual (18 pages) ,
- Quick manual (2 pages)
Table of Contents
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BEFORE USING THIS PRODUCT ....................................... II
SAFETY SYMBOL MARKS ............................................. II
SAFETY PRECAUTIONS ............................................. III
REVISION HISTORY ................................................. V
TABLE OF CONTENTS ............................................... VI
1.
DEDICATED APPLICATION ............... 1
2.
SPECIFICATION ....................... 2
2.1.
Accessories ................. 3
separately .......................... 3
2.2.
2.3.
-
........................... 6
2.4.
SWU
COMBINATION MODE
2.5.
SPU
COMBINATION MODE
2.6.
3.
HANDLING PRECAUTIONS ................ 9
3.1.
3.2.
3.3.
3.4.
3.5.
C
HECK ITEMS IMMEDIATELY AFTER THE
.............................. 11
4.
4.1.
4.2.
SH200-A/R .......... 13
4.3.
I/O
CONNECTOR ANALOG OUTPUT TYPE
A
............................... 14
4.4.
SH200-R .............................. 15
4.5.
Table of contents
..... 3
........ 4
(SH200+SWU)
.................... 6
(SH200+SPU)
.................... 7
... 9
.......... 10
.......... 10
.. 11
SH200-A/R ....... 12
SH200-
............ 16
4.6.
5.
POWER SUPPLY INTERNAL CIRCUIT ...... 18
6.
A/R） .................................. 18
7.
STATUS OF EACH LED ................. 19
7.1.
A/R） ................................19
7.2.
A/R） ................................19
7.3.
................................19
7.4.
） ................................19
8
8.
CONTROL INPUT SIGNAL ............... 20
8.1.
8.2.
8.3.
8.4.
9.
MEASURED VALUE OUTPUT（COMMON TO SH200-
A/R） .................................. 23
9.1.
9.2.
SH200
STAND
................................23
OUTPUT
9.3.
9.4.
9.5.
SH200＋SWU(SPU)+SAU
................................26
OUTPUT
9.6.
9.7.
VI
.................17
（
（
（
.................21
....................21
...............22
..........23
-
ALONE MODE MEASURED VALUE
......24
......25
MEASURED VALUE
..........27
（
) ..20
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