Swu/Spu I/O Connector - Ulvac G-TRAN Series Instruction Manual

Multi ionization gauge sensor unit
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4.5.

SWU/SPU I/O connector

Pin number
1
Power supply DC+5V
2
GND
3
Power supply DC+5V
4
Communication terminal
5
Communication terminal
6
GND
7
Power supply DC+5V
8
GND
Case
Frame ground
Fig. 4-5 SWU/SPU I/O connector pin layout
(Mini I/O plug)
This unit
Power supply for driving this unit
Ground for this unit
Power supply for driving this unit
Communication for pressure
Communication for pressure
Ground for this unit
Power supply for driving this unit
Ground for this unit
Ground for frame
16
Function
(DC5V)
(DC5V)
(DC5V)

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