Check; Of The Sensor - Ulvac G-TRAN Series Instruction Manual

17.2. The internal electrode disconnection check
The wiring inside the sensor is shown in the figure below. Please refer to the figure
below and check the continuity.
17.3. Insulation between the pin and the case of the sensor.
Excluding the case ground of the sensor and between the filament and grid pin, the
insulation between the pin and the case is 100MΩ or more and the withstand voltage is
DC500V.
If the insulation resistance decreases due to contamination, it will affect the pressure
indication. The effect on the pressure indication varies depending on the location of
the insulation resistance that decreases.
Filament 1
Grid
Filament 2
Fig. 17-1 Diagram of wiring inside the sensor
Grid
Case Ground
Ioncollector
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