Ulvac G-Tran Series Manuals

Manuals and User Guides for Ulvac G-Tran Series. We have 12 Ulvac G-Tran Series manuals available for free PDF download: Instruction Manual, Manual, Quick Manual

Ulvac G-Tran Series Instruction Manual (107 pages)

1CH Display Unit

Brand: Ulvac | Category: Control Unit | Size: 2 MB

Prior to Operation
3
Safety Notations
3
Safety Precautions
4
Revision History
6
Table of Contents
7
1 Getting Started

13
- Overview of G-Tran Series
  13
- Terminology
  13
- Features of this Unit
  14
2 Specifications and Components

15
- Specifications
  15
- Standard Accessories
  17
- Options
  17
- Dimensional Drawings DIN Panel Size
  18
- Installation DIN Panel
  19
- Dimensional Drawings JIS Panel Size
  20
3 Names of Components and Description of Functions

21
4 Installation

28
- Preparations
  28
  - Installing the Display Unit
    28
  - Circuit in the Power Supply
    28
  - Installation
    29
5 Front Panel Operation

30
- Description of Front Panel Keys
  30
  - Program Mode
    30
  - Key Operation in Measurement
    30
6 Selection of Sensor Unit

31
- Reset the Unit to the Factory Default Settings
  32
- Factory Set Values
  32
7 Setpoint

33
- What Is Setpoint
  33
- Setpoint Setting Range
  33
- How to Set Setpoint
  33
  - How to Set Setpoint from Front Panel
    34
  - How to Set Setpoint from RS485
    35
8 Connection with External Devices

36
- Output Signal
  36
- Input Signal
  37
  - RS485 Communication
    37
9 Pirani Gauge SW1

38
- Sensor Unit Setting: "SP2
  38
- Front Panel
  38
  - Pressure Display State
    38
  - Description of Front Panel Keys
    38
- Setting Operation
  38
- Connection with Sensor Unit
  40
- Connection to External Device
  40
- Various Signals
  40
  - Output Voltage
    40
  - Filament Burnout Signal
    41
  - ADJ Adjustment
    41
  - Setpoint
    41
  - RS485 Communication
    41
- Zero Point Adjustment and Atmospheric Pressure Adjustment
  41
  - Adjusting Method
    41
10 Cold Cathode Gauge Sc1

42
- Setting the Sensor Unit
  42
- Front Panel
  42
  - Pressure Display
    42
  - Front Panel Key Description
    42
- Settings Operation
  42
- Connection to the Sensor Unit: "SENSOR" Connector
  44
- Connection with External Devices: "I/O" Connector
  44
- Signals
  44
  - Output Voltage
    44
  - HV on Signal: Pin 5
    45
  - Discharge Check Signal: Pin 4
    45
  - Setpoint: Pins 3, 7, 11
    45
  - RS485 Communication: Pins 10, 12
    45
11 Pirani Gauge BPR2, SP1

46
- Sensor Unit Setting: "SP1
  46
- Front Panel
  46
  - Pressure Display
    46
  - Description of Front Panel Keys
    46
- Setting Operation
  46
  - RS485 Communication Operation Setting "L1", "L2
    46
  - Operation Setting Method
    47
- Connecting to the Sensor Unit
  48
- Connection with External Devices
  48
- External Input/Output Signal
  48
  - Output Voltage
    48
  - Burnout Signal
    49
  - Setpoint
    49
  - RS485 Communication
    49
12 Hot Cathode Gauge BMR2

50
- Sensor Unit Setting: "Sn1
  50
- Front Panel
  50
  - Pressure Display
    50
  - Description of Front Panel Keys
    50
- Setting Operation
  50
- Connection with the Sensor Unit
  53
- Connection with External Devices
  53
- Various Signals
  53
  - Output Voltage
    53
  - Filament on Signal
    54
  - Degas on Signal
    54
  - Filament 1/2 Changeover Signal
    54
  - Pressure Protection Signal
    54
  - Emission Valid Signal
    54
  - Setpoint
    55
  - RS485 Communication
    55
13 Multi-Ionization Gauge SH2/ST2

56
- Sensor Unit Setting: "Sh2
  56
- Front Panel
  56
- Operation Setting Method
  57
- Connection with the Sensor Unit
  59
- Connection with External Devices
  59
- Various Signals
  59
  - Output Voltage
    59
  - Filament on Signal
    60
  - Degas on Signal
    60
  - Filament 1/2 Changeover Signal
    60
  - Pressure Protection Signal
    61
  - Emission Valid Signal
    61
  - Setpoint
    61
  - RS485 Communication
    61
14 Multi-Ionization Gauge SH2/ST2(SPU Combination Mode)

62
- Sensor Unit Setting: "SPU
  62
- Front Panel
  62
  - Pressure Display
    62
  - Description of Front Panel Keys
    62
- Setting Operation
  63
- Connection with the Sensor Unit
  65
- Connection with External Devices
  65
- Various Signals
  65
  - Output Voltage
    65
  - Filament off Signal
    66
  - Degas on Signal
    66
  - Filament 1/2 Changeover Signal
    67
  - Sensor Error Signal
    67
  - Emission Valid Signal
    67
  - Setpoint
    67
  - RS485 Communication
    67
15 Multi-Ionization Gauge SH2/ST2(SAU Triple Combination Mode)

68
- Sensor Unit Setting: "SAU
  68
- Front Panel
  68
  - Pressure Display
    68
  - Description of Front Panel Keys
    68
- Setting Operation
  69
- Connection with the Sensor Unit
  71
- Connection with External Devices
  71
- Various Signals
  71
  - Output Voltage
    71
  - Filament off Signal
    72
  - Degas on Signal
    72
  - Filament 1/2 Changeover Signal
    73
  - Sensor Error Signal
    73
  - Emission Valid Signal
    73
  - Setpoint
    73
  - RS485 Communication
    73

Ulvac G-Tran Series Instruction Manual (107 pages)

Brand: Ulvac | Category: Measuring Instruments | Size: 1 MB

Prior to Operation
2
Safety Notations
2
Safety Precautions
3
Revision History
5
Table of Contents
6
1 Getting Started

14
- Overview of G-TRAN Series
  14
- Terminology
  14
- Features of this Unit
  15
2 Specifications and Components

16
- Specifications
  16
- Standard Accessories
  18
- Options
  18
- Dimensional Drawings DIN Panel Size
  19
- Installation DIN Panel
  20
- Dimensional Drawings JIS Panel Size
  21
3 Names of Components and Description of Functions

22
4 Installation

29
- Preparations
  29
  - Installing the Display Unit
    29
  - Circuit in the Power Supply
    29
  - Installation
    30
5 Front Panel Operation

31
- Description of Front Panel Keys
  31
  - Program Mode
    31
  - Key Operation in Measurement
    31
6 Selection of Sensor Unit

32
- Reset the Unit to the Factory Default Settings
  33
- Factory Set Values
  33
7 Setpoint

34
- What Is Setpoint
  34
- Setpoint Setting Range
  34
- How to Set Setpoint
  34
  - How to Set Setpoint from Front Panel
    35
  - How to Set Setpoint from RS-485
    36
8 Connection with External Devices

37
- Output Signal
  37
- Input Signal
  38
  - Communication
    38
9 Pirani Gauge Sw1

39
- Sensor Unit Setting: "SP2
  39
- Front Panel
  39
  - Pressure Display State
    39
  - Description of Front Panel Keys
    39
- Setting Operation
  39
- Connection with Sensor Unit
  41
- Connection to External Device
  41
- Various Signals
  41
  - Output Voltage
    41
  - Filament Burnout Signal
    42
  - ADJ Adjustment
    42
  - Setpoint
    42
  - Communication
    42
- Zero Point Adjustment and Atmospheric Pressure Adjustment
  42
  - Adjusting Method
    42
10 Cold Cathode Gauge Sc1

43
- Setting the Sensor Unit
  43
- Front Panel
  43
  - Pressure Display
    43
  - Front Panel Key Description
    43
- Settings Operation
  43
- Connection to the Sensor Unit: "SENSOR" Connector
  45
- Connection with External Devices: "I/O" Connector
  45
- Signals
  45
  - Output Voltage
    45
  - HV on Signal: Pin 5
    46
  - Discharge Check Signal: Pin 4
    46
  - Setpoint: Pins 3, 7, 11
    46
  - RS485 Communication: Pins 10, 12
    46
11 Pirani Gauge Bpr2/Sp1

47
- Sensor Unit Setting: "SP1
  47
- Front Panel
  47
  - Pressure Display
    47
  - Description of Front Panel Keys
    47
- Setting Operation
  47
  - Communication Operation Setting "L1", "L2
    47
  - Operation Setting Method
    48
- Connecting to the Sensor Unit
  48
- Connection with External Devices
  49
- External Input/Output Signal
  49
  - Output Voltage
    49
    
    Burnout Signal
    50
  - Setpoint
    50
  - Communication
    50
12 Hot Cathode Gauge Bmr2

51
- Sensor Unit Setting: "Sn1
  51
- Front Panel
  51
  - Pressure Display
    51
  - Description of Front Panel Keys
    51
- Setting Operation
  51
- Connection with the Sensor Unit
  54
- Connection with External Devices
  54
- Various Signals
  55
  - Output Voltage
    55
  - Filament on Signal
    55
  - Degas on Signal
    55
  - Filament1/2 Changeover Signal
    55
  - Pressure Protection Signal
    56
  - Emission Valid Signal
    56
  - Setpoint
    56
  - RS485 Communication
    56
13 Multi Ionization Gauge Sh2/St2/Sh200/St200

57
- Sensor Unit Setting: "Sh2
  57
- Front Panel
  57
  - Pressure Display
    57
  - Description of Front Panel Keys
    57
- Setting Operation
  58
- Connection with the Sensor Unit
  60
- Connection with External Devices
  60
- Various Signals
  61
  - Output Voltage
    61
  - Filament on Signal
    61
  - Degas on Signal
    61
  - Filament1/2 Changeover Signal
    62
  - Pressure Protection Signal
    62
  - Emission Valid Signal
    62
  - Setpoint
    62
  - Communication
    62
14 Multi-Ionization Gauge Sh2/St2/Sh200/St200 (Spu Combination Mode)

63
- Sensor Unit Setting: "SPU
  63
- Front Panel
  63
  - Pressure Display
    63
  - Description of Front Panel Keys
    63
- Setting Operation
  64
- Connection with the Sensor Unit
  66
- Connection with External Devices
  66
- Various Signals
  67
  - Output Voltage
    67
  - Filament off Signal
    67
  - Degas on Signal
    68
  - Filament1/2 Changeover Signal
    68
  - Sensor Error Signal
    68
  - Emission Valid Signal
    68
  - Setpoint
    68
  - Communication
    68
15 Multi Ionization Gauge SH2/ST2/SH200/ST200 (SAU Triple Combination Mode)

69
- Sensor Unit Setting: "SAU
  69
- Front Panel
  69
  - Pressure Display
    69
  - Description of Front Panel Keys
    70
- Setting Operation
  70
- Connection with the Sensor Unit
  72
- Connection with External Devices
  72
- Various Signals
  73
  - Output Voltage
    73
  - Filament off Signal
    74
  - Degas on Signal
    74
  - Filament1/2 Changeover Signal
    74
  - Sensor Error Signal
    74
  - Emission Valid Signal
    74
  - Setpoint
    74
  - Communication
    74

Ulvac G-Tran Series Instruction Manual (74 pages)

Multi Ionization Gauge Sensor unit

Brand: Ulvac | Category: Accessories | Size: 2 MB

Before Using this Product
2
Safety Symbol Marks
2
Safety Precautions
3
Revision History
5
Table of Contents
6
1 Dedicated Application

9
2 Specification

10
- Unpacking and Checking Accessories
  11
  - Accessories
    11
  - Items that Need to be Ordered
    11
  - Separately
    12
- St200 Standard Specifications
  12
- Specifications
  14
- Standard Specifications
  14
- Standard Specifications
  15
3 Handling Precautions

17
4 Name of each Part and Its Function

20
- Controller Section St200-A/R
  20
- Panel Section St200-A/R
  21
- I/Oconnector Serial Communication Type
  23
- St200-R
  23
- Swu/Spu I/O Connector
  24
- Sau I/Oconnector
  25
5 Power Supply Internal Circuit

26
6 Each Mode Setting（Common to St200

26
A/R

26
- Sau Combination Mode Only
  27
- Status of each Led
  27
- Power Led Status （ Common for St200
  27
- A/R
  27
- Swu/Spu Led Status （ Common for St200
  27
- Sau Led Status （ Common for St200-A/R
  27
- Power Led Blinking Status （St200-A
  27
  - Control Input Signal
    28
- Control Input Signal (St200-Aonly )
  28
- Fil On/Off Signal
  29
- Degas On/Off Signal
  29
7 Status of each Led

27
9 Measured Value Output（Common to St200-

30
A/R

30
10 Control Output Signal

35
- Only
  35
- Serial Communication Output Signal (St200-Ronly )
  35
- Sensor Error Signal (St200-Aonly )
  36
  - ST200 Stand-Alone Mode
    36
  - SWU Combination Mode
    36
  - SPU Combination Mode
    36
  - SAU Combination Mode
    36
- Setpoint Operation Signal
  37
- Only
  37
- (St200-Aonly )
  37
11 Setpoint Setting (St200-A Only)

38
12 Filament Power Monitoring Signal

39
13 SAU ATMOSPHERIC PRESSURE ADJUSTMENT. Checking the Value of

40
- St200-R
  40
- Atmospheric Pressure Adjustment of St200-A
  40
- Zero Point Adjustment of St200-A
  40
- Adjustment of St200-R
  40
14 Swu Atmospheric Pressure and Zero

41
Point Adjustment

41
- St200-A
  41
- Zero Point Adjustment of St200-A
  41
- Adjustment of St200-R
  41
15 How to Use Serial Communication

42

Ulvac G-Tran Series Instruction Manual (76 pages)

Multi ionization gauge sensor unit

Brand: Ulvac | Category: Measuring Instruments | Size: 2 MB

Before Using this Product
2
Safety Symbol Marks
2
Safety Precautions
3
Revision History
5
Table of Contents
6
Dedicated Application
9
Specification
10
Unpacking and Checking Accessories
11
Accessories
11
Items that Need to be Ordered
11
Separately
12
Sh200 Standard Specifications
12
Sh200 Stand - Alone Mode Standard
14
Specifications
14
Standard Specifications
14
Standard Specifications
15
(Sh200+Swu/Spu+Sau) Standard Specifications
16
Handling Precautions
17
Precautions on Operating Environment
17
Precautions on Power Supply
18
Precautions on Installation
18
Precautions on Operation and Handling
19
Operation
19
Name of each Part and Its Function
20
Controller Section Sh200-A/R
20
Panel Section Sh200-A/R
21
I/Oconnector Serial Communication Type
23
Sh200-R
23
Swu/Spu I/O Connector
24
Sau I/Oconnector
25
Power Supply Internal Circuit
26
Each Mode Setting（Common to Sh200
26
A/R
26
Sau Combination Mode Only
27
Status of each Led
27
Power Led Status （ Common for Sh200
27
A/R
27
Swu/Spu Led Status （ Common for Sh200
27
Sau Led Status （ Common for Sh200-A/R
27
Power Led Blinking Status （Sh200-A
27
Control Input Signal
28
Control Input Signal (Sh200-Aonly )
28
Fil On/Off Signal
29
Fil 1/2 Signal
29
Degas On/Off Signal
30
A/R
31
Pressure Conversion Formula
31
Sh200+Swu Measured Value Output
32
Sh200+Spu Measured Value Output
33
Simplified Conversion Table
35
BMR2 Compatibility Output（Mode Setting
36
Pressure Conversion Formula
36
Control Output Signal
37
Ontrol Output Signal
37
Only )
37
Serial Communication Output Signal (Sh200-Ronly )
37
Sensor Error Signal (Sh200-Aonly )
38
SH200 Stand-Alone Mode
38
SWU Combination Mode
38
SPU Combination Mode
38
SAU Combination Mode
38
Setpoint Operation Signal
39
Only )
39
(Sh200-Aonly )
39
Emission Valid Signal
39
Connection Check Signal
39
Differences between Mode Setting (SH200-A Only)
39
Filament Power Monitoring Signal (SH200-A Only)
39
Setpoint Setting (Sh200-A Only)
40
Operating Pressure Range of Setpoint
40
Setpoint On/Off Pressure
41
Setpoint Setting of Sh200-A
41
Filament Power Monitoring Signal
41
Sh200-R
42
Atmospheric Pressure Adjustment of Sh200-A
42
Zero Point Adjustment of Sh200-A
42
Adjustment of Sh200-R
42
Swu Atmospheric Pressure and Zero
43
Point Adjustment
43
Atmospheric Pressure Adjustment of Sh200-A
43
Zero Point Adjustment of Sh200-A
43
Adjustment of Sh200-R
43
How to Use Serial Communication
44
Sh200-R
44
Communication Specifications
44
Settings
44
Connection Diagram
44
Baud Rate Setting
45
Address Setting
45
Standard Data Format
46
Command List
46
When the Command Is Received
46
Normally
46
When the Command Is Not
46
Received Normally
46
Command
47

Ulvac G-Tran Series Instruction Manual (77 pages)

Multi ionization Gauge Sensor Unit

Brand: Ulvac | Category: Accessories | Size: 2 MB

Safety Symbols
3
Safety Precautions
4
Revision History
8
Table of Contents
10
1 Introduction

12
- G-Tran Series Overview
  12
- Commentary on Phrasing
  12
2 Specifications

13
- Only )
  13
- Sh2-1/Sh2-2 Specifications
  13
- Spu Combination Mode Key Specifications
  15
- Control Input Signals
  15
- Specifications
  16
- Fil
  16
- Unpacking and Quantity Check
  16
3 Handling Precautions

17
- Post - Operation Checks
  17
- Operating Environment
  17
- Precautions Related to Use
  18
- Power Supply
  19
- Attaching this Unit
  19
  - Sensor Attachment Environment
    19
  - Attaching the Gauge Head
    19
4 Part Names and Functions

20
- Controller
  20
- Anel - Sh2-1 Standard Ype
  21
- Type
  25
- Communications Type
  26
- Spu I/Oconnector
  27
- Sau I/Oconnector
  28
5 Power Supply Internal Circuitry 18

30
- (Sh2-1/Sh2-2)
  30
6 Mode Configurations (Sh2-1/Sh2-2)

30
7 Led State Indicators

30
8 Control Input Signals

32
- Sau Combination Mode Key 8.2. Fil On/Off Signal
  32
- Swu Combination Mode Key 8.4. Degas On/Off Signal
  33
9 Analog Output (Sh2-1/Sh2-2)

34
10 Control Output Signals

40
- Serial Communications Signals
  40
- Ontrol Output Signals
  40
- Communications Type (Sh2-2 Only )
  40
- I/O
  41
- Sensor Error Signal
  41
  - SH2 Independent Mode
    41
  - SPU Combination Mode
    41
  - (Sh2-1 Only )
    41
  - SAU Combination Mode
    41
- I/OCONNECTOR - SH2-2 SERIAL 10.3.4. SWU Combination Mode
  41
- Etpoint Operation Signal
  42
- Only )
  42
- Connection Check Signal
  42
11 Configuring the Setpoints (Sh2-1 Only)

43
- Setpoint Setting Pressure Setpoint Setting Pressure
  43
12 Filament Power Monitor Signal34

45
- Filament Power Monitor Signal
  45
13 Adjusting Sau Pressure

45
- Adjusting on the
  45
  - St2-2
    45
- St2-1
  45
14 Adjusting Swu Pressure

46
- Adjusting on the
  46
- Sh2-1
  46
  - Sh2-2
    46

Ulvac G-Tran Series Instruction Manual (84 pages)

4ch digital display unit

Brand: Ulvac | Category: Monitor | Size: 1 MB

Table of Contents
7
1 Introduction

9
- Overview of G-TRAN Series
  9
- Terminology
  10
2 Features of Im1R1/Im2R1 Display Unit

11
3 Specifications and Configuration

12
- Key Specifications
  12
- Standard Accessories
  13
- Options
  13
- Compatible Measuring Unit
  14
4 Operation

15
- Operation Overview
  15
- Operation of Components
  16
  - Front Panel: Operation Switches
    16
  - Front Panel: Lamp
    17
  - Rear Panel
    18
- Operation
  19
  - Setting of Display Mode
    19
  - Operation Mode Setting CONTROL MODE
    25
    
    Baud Rate Value
    27
    
    Lcd Contrast Set
    28
  - FIL HV On/Off Degas On/Off
    29
  - ZERO Point/Atm Point Adjustment and Reset
    31
- Explanation of Operation 2 - Setting of Basic Conditions - PROGRAM MODE
  32
5 External Input/Output

43
- About Sensor Connector
  43
  - Sensor Connector
    43
- About External IO
  44
  - IO Connector
    44
  - About Measurement Value Output
    46
  - About Remote Operation
    52
  - About Setpoint Output
    53
  - Other Outputs
    55
- About Serial Communication
  56
6 Installation

68
- Preparations
  68
  - Installing the Display Unit
    68
  - Dimensional Drawings
    70
  - Electrical Connection
    72
  - Wiring in Serial Communication
    73
- Setting the Measuring Unit
  76
  - About Setting of Box Unit Operation Mode
    76
  - About Cable Connecting to Measuring Unit and Display Unit
    76

Ulvac G-Tran Series Instruction Manual (49 pages)

Pirani Vacuum Gauge Sensor Unit

Brand: Ulvac | Category: Accessories | Size: 2 MB

Prior to Operation
3
Safety Notations
3
Safety Precautions
4
Revision History
7
Table of Contents
8
1 Specifications

10
- Standard Specifications
  10
- Unpacking and Quantity Check
  11
- Dimensional Drawings
  12
  - SW1-1/SW1-2 Dimensional Drawings
    12
  - SWP-16 Dimensional Drawings
    13
- Unpacking and Quantity Check
  13
2 Cautions in Operation

14
3 Names of Components and Description of Functions

17
4 Circuit in the Power Supply

22
5 Signals

23
6 Setting the Setpoint (Standard Type SW1-1 Only)

26
- Set Point ON/OFF Pressure
  26
- Wiring in Setting Setpoint
  26
- Setting of Setpoint
  27
7 How to Use Serial Communication (Serial Communication Type SW1-2 Only)

28
- Communication Specifications
  28
- Various Settings
  28
  - Connection Diagram
    28
  - Baud Rate Setting
    29
  - Address Setting
    29
- Standard Data Format
  30
  - List of Commands
    30
  - When Receiving Is Normal
    30
  - When Receipt Is Not Normal
    30
- Command
  31
- Checksum
  33
- Status
  34
  - SH (Higher Case of Status)
    34
  - Lower Case of Status)
    34
- ASCII Code Table
  35

Ulvac G-Tran Series Instruction Manual (54 pages)

COLD-CATHODE ION GAUGE

Brand: Ulvac | Category: Accessories | Size: 1 MB

Prior to Operation
3
Safety Denotations
3
Safety Precautions
4
Table of Contents
7
Introduction
10
Overview of G-TRAN SERIES
10
Terminology
10
FEATURES of SC1 Ion Gauge
11
Specifications and Components
12
Key Specifications
12
Standard Accessories
13
Options
13
Service Parts
13
Nomenclature and Functions of Components
14
Assembly
14
Front Panel
15
Input/Output Connector
16
Installation
17
Preparations
17
Installing the Sensor Head to the Sensor Unit
17
Installing the Sensor Unit
17
Electrical Connection
18
Cautions in Handling
19
Output Signals
20
Control Operation
20
High Voltage ON/OFF [HV ON/OFF]
20
Setpoint Actuating Signal [SET-1 ON/OFF][SET-2 ON/OFF]
20
Discharge Valid Signal [Discharge OK/NG]
20
Setting of Setpoint
21
Functions
22
Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF]
22
Setpoint
22
Setting of Setpoint
22
Setpoints of Measuring Unit and Display Unit
22
Measurement Value Output
23
Measurement Value Voltage Output Form
23
Measurement Value Outputs in each Condition
24
Maintenance
25
Preparation of Tools and Others
25
Necessary Tools and Others
25
Necessary Equipment
25
Removing the Sensor Unit and Sensor Head
26
Removing Screws
26
Removing the Sensor Head
26
Disassembling the Sensor Head
27
Exploded View of Sensor Head
27
Removing the Internal Electrode
28
Cleaning the Electrode in the Sensor Head
31
Insulation Check of Anode
31
Cleaning the Anode
31

Ulvac G-Tran Series Instruction Manual (39 pages)

PIRANI VACUUM GAUGE

Brand: Ulvac | Category: Accessories | Size: 1 MB

Prior to Operation
3
Safety Denotations
3
Safety Cautions
4
Revision History
6
Table of Contents
7
1 Explanation of Terms

9
2 Features of Sp1

9
3 Specifications and Components

10
- Key Specifications
  10
- Standard Accessories
  11
- Options
  11
4 Nomenclature and Functions

12
- Assembly
  12
- Front Panel
  13
- Input/Output Connector
  14
5 Installation

15
- Preparations
  15
6 Cautions in Handling

19
7 Output Signals

20
- Setpoint Actuating Signal [SET-1 ON/OFF][SET-2 ON/OFF]
  20
- Filament Open Signal [ERR ON/OFF]
  20
8 Setting of Setpoint

21
9 Functions

23
10 Troubleshooting

25
11 Warranty

27
12 Certificate of Decontamination

28
13 China Rohs Declaration

29
14 Appendix

30

Ulvac G-Tran Series Instruction Manual (54 pages)

Magnetron type cold cathode vacuum gauge sensor unit

Brand: Ulvac | Category: Measuring Instruments | Size: 2 MB

Table of Contents
8
1 Terminology

11
- Terminology
  11
- FEATURES of SC1 Ion Gauge
  11
2 FEATURES of SC1 Ion Gauge

12
3 Specifications and Components

12
- Key Specifications
  12
- Standard Accessories
  13
- Options
  13
- Service Parts
  13
4 Nomenclature and Functions of Components

14
- Assembly
  14
- Front Panel
  15
- Input/Output Connector
  16
5 Installation

17
- Preparations
  17
6 Cautions in Handling

19
7 Output Signals

20
- Control Operation
  20
  - High Voltage ON/OFF [HV ON/OFF]
    20
  - Setpoint Actuating Signal [SET-1 ON/OFF][SET-2 ON/OFF]
    20
8 Setting of Setpoint

22

Ulvac G-Tran Series Manual (18 pages)

Pirani Vacuum Gauge Sensor Unit

Brand: Ulvac | Category: Measuring Instruments | Size: 0 MB

Ulvac G-Tran Series Quick Manual (2 pages)

Pirani Vacuum gauge

Brand: Ulvac | Category: Control Unit | Size: 0 MB

Ulvac Categories

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Power Supply Measuring Instruments Industrial Equipment

More Ulvac Manuals

Ulvac G-Tran Series Manuals

Table of Contents

1 Getting Started

2 Specifications and Components

3 Names of Components and Description of Functions

4 Installation

5 Front Panel Operation

6 Selection of Sensor Unit

7 Setpoint

8 Connection with External Devices

9 Pirani Gauge SW1

10 Cold Cathode Gauge Sc1

11 Pirani Gauge BPR2, SP1

12 Hot Cathode Gauge BMR2

13 Multi-Ionization Gauge SH2/ST2

14 Multi-Ionization Gauge SH2/ST2(SPU Combination Mode)

15 Multi-Ionization Gauge SH2/ST2(SAU Triple Combination Mode)

Table of Contents

1 Getting Started

2 Specifications and Components

3 Names of Components and Description of Functions

4 Installation

5 Front Panel Operation

6 Selection of Sensor Unit

7 Setpoint

8 Connection with External Devices

9 Pirani Gauge Sw1

10 Cold Cathode Gauge Sc1

11 Pirani Gauge Bpr2/Sp1

12 Hot Cathode Gauge Bmr2

13 Multi Ionization Gauge Sh2/St2/Sh200/St200

14 Multi-Ionization Gauge Sh2/St2/Sh200/St200 (Spu Combination Mode)

15 Multi Ionization Gauge SH2/ST2/SH200/ST200 (SAU Triple Combination Mode)

Table of Contents

1 Dedicated Application

2 Specification

3 Handling Precautions

4 Name of each Part and Its Function

5 Power Supply Internal Circuit

6 Each Mode Setting（Common to St200

A/R

7 Status of each Led

9 Measured Value Output（Common to St200-

A/R

10 Control Output Signal

11 Setpoint Setting (St200-A Only)

12 Filament Power Monitoring Signal

13 SAU ATMOSPHERIC PRESSURE ADJUSTMENT. Checking the Value of

14 Swu Atmospheric Pressure and Zero

Point Adjustment

15 How to Use Serial Communication

Table of Contents

Table of Contents

1 Introduction

2 Specifications

3 Handling Precautions

4 Part Names and Functions

5 Power Supply Internal Circuitry 18

6 Mode Configurations (Sh2-1/Sh2-2)

7 Led State Indicators

8 Control Input Signals

9 Analog Output (Sh2-1/Sh2-2)

10 Control Output Signals

11 Configuring the Setpoints (Sh2-1 Only)

12 Filament Power Monitor Signal34

13 Adjusting Sau Pressure

14 Adjusting Swu Pressure

Table of Contents

1 Introduction

2 Features of Im1R1/Im2R1 Display Unit

3 Specifications and Configuration

4 Operation

5 External Input/Output

6 Installation

Table of Contents

1 Specifications

2 Cautions in Operation

3 Names of Components and Description of Functions

4 Circuit in the Power Supply

5 Signals