Specification - Ulvac G-TRAN Series Instruction Manual

2.

Specification

The Multi ionization gauge sensor unit SH200 is a vacuum gauge that can measure the
high vacuum pressure by connecting a dedicated sensor unit (B-A gauge type).
The following three types of interfaces are available. Users can select the
specification that best suits the communication protocol.
Analog output type
Serial communication type
EtherCAT communication type
(Hereinafter, SH200 refers to both SH200-A and SH200-R.)
By connecting an optional unit to SH200, SH200 can control each connected unit.
According to the unit connected, the three modes below are available to measure from
high vacuum to atmospheric pressure.
※ SWU series is available in the Windows/Android-compatible【SWU10-U】and
RS-485 communication-compatible 【SWU10-R】. SWU written in this manual
is SWU10-R. SWU10-U cannot connect to SH200.
※ SPU and SWU cannot operate at the same time.
※ SAU cannot connect to SH200 without SPU or SWU.
ﾓｰﾄﾞおよび構成
Mode and configuration
SH200単体ﾓｰﾄﾞ
SH200 Stand-alone mode
SH200のみ
SH200 only
SPU/SWUｺﾝﾋﾞﾈｰｼｮﾝﾓｰﾄﾞ
SPU/SWU Combination
ﾋﾟﾗﾆｹﾞｰｼﾞ(SWU/SPU) mode
Pirani gauge (SWU/SPU)
＋SH200
+ SH200
SAUｺﾝﾋﾞﾈｰｼｮﾝﾓｰﾄﾞ
SAU Combination mode
圧力ｾﾝｻﾕﾆｯﾄ(SAU)
Pressure sensor unit
(SAU)
＋SWU/SPU
+ SWU/SPU + SH200
＋SH200
: SH200-A (this manual)
: SH200-R (this manual)
: SH200-E (separate manual)
10 -8 10 -7 10 -6 10 -5 10 -4
SH200
SH200
SH200
2
圧力(Pa)
Pressure (Pa)
10 -3 10 -2 10 -1 10 0 10 +1 10 +2 10 +3 10 +4 10 +5
SPU
SWU
SPU
SAU
SWU