A/R; Pressure Conversion Formula - Ulvac G-TRAN Series Instruction Manual

9. Measured value output（common to SH200-A/R）
This unit outputs the measured pressure as a voltage signal of DC 0V to 10V.
I/O connector: Pin8 [measured value output+] – Pin15[GND]
9.1.

Pressure conversion formula

Use the following formula to convert to pressure.
P = 10 ^ { ( V - 7.25 ) / 0.75 + k }
9.2. SH200 stand-alone mode measured value output
The measured value output in several statuses that can occur during a measurement is
shown in Table 9-1 below.
Operating status
Filament is off
Normal measurement
SH200 error
(such as filament disconnection)
Power supply voltage error,
controller failure
1.0E+01
1.0E+00
1.0E-01
1.0E-02
1.0E-03
1.0E-04
1.0E-05
1.0E-06
1.0E-07
1.0E-08
0 1
⇔ V = 7.25 + 0.75 × (Log P – k )
P: Pressure V: Output voltage (V)
k: Pressure unit factor(see table below)
Pressure unit
Pa
Torr
mbar
Table 9-1 Measured value output status
9.9V or higher
Voltage corresponding to the measurement
pressure: 0.27V to 6.5V
9.9V or higher
0.1V or lower
2 3 4
OUTPUT VOLTAGE (V)
23
k
2
0.1249
0
Measured value output voltage
5 6 7 8 9 10