Sh200-R; Atmospheric Pressure Adjustment Of Sh200-A; Zero Point Adjustment Of Sh200-A; Adjustment Of Sh200-R - Ulvac G-TRAN Series Instruction Manual

Multi ionization gauge sensor unit
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12.1.
How to check the filament power monitoring signal on SH200-R
Enter the command via serial communication.
13.
SAU atmospheric pressure adjustment
Errors due to the altitude of SAU and low atmospheric pressure
*Note*
When using SAU at an altitude of 500m or higher or the atmospheric
pressure of 950hPa or less, adjust the atmospheric pressure.
Adjusting the atmospheric pressure and zero point of SAU enables more accurate
measurements.
Before using a new SAU, or if there is a discrepancy in the indicated value, please
follow the instruction below to adjust them.
13.1.

Atmospheric pressure adjustment of SH200-A

The atmospheric pressure adjustment range is from 0.1V to 2.2V for the output voltage
of SAU and from 7.1×10
range, the atmospheric pressure adjustment cannot be performed.
Please follow the instructions below to adjust the atmospheric pressure.
① Connect a PC or smartphone to the USB connector of the main unit. Run ATM.ADJUST
on the G-TRAN setting tool "UL-MOBI_Android" or "UL-MOBI_Windows".
※ A password is required to change the settings, as careless setting change may
cause the failure of the vacuum system.
The password can be set to any four numbers.
② Press the filament key of the one channel display unit "ISG1" twice within 1
second.
Please refer to the application manual for details.
Download:
UL-MOBI_Android Google Play
UL-MOBI_Windows
UL-MOBI_Windows Instruction manual
13.2.

Zero point adjustment of SH200-A

The zero point is automatically adjusted at 1,000Pa or less.
13.3.

Adjustment of SH200-R

Enter the command via serial communication.
+4
+5
Pa to 1.2×10
Pa in pressure conversion. If it exceeds this
https://www.ulvac.co.jp/download/en/application/
https://www.ulvac.co.jp/download/en/application/
34

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