Ulvac GI-M2 Quick Manual

SK00-7723-EQ-003-01
Metal Ionization Vacuum Gauge
GI-M2
Ionization Vacuum Gauge GI-D7
Quick Manual
Introduction
This quick manual is for quick check of operation and display of the product.
Please refer to instruction manual attached in advance for detailed
information about operation, precautions and safety for proper use.
Available for download from ULVAC website.
https://showcase.ulvac.co.jp/en
This manual is for the following gauges. Serial Nos.
GI-M2：S/N32000G、GI-D7：S/N30030G and higher
1. Setting
1.1. Initial Setting
Set value
Mode
GI-M2
Sensor head setting SEn Not used
SEn(1) 6.00 -2
Sensitivity factor set value
SETPOINT-1 SEt-1 1.00 -0
SETPOINT-2 SEt-2 1.00 -1
Range changeover set value rAn(1) -8
dGS(1) 01
Degas auto OFF set value
Filament FIL FIL 1
Analog output rEC rEC 1
REC-HOLD set value rEC -8
Activated filament setting Act Not used
Baud rate bPS 9600
1.2. Selection of Sensor Head（GI-D7 Only）
SnS:1 ⇒ WIT SnS:2 ⇒ WIB
1.3. Selecting the Sensitivity Factor Function
GI-M2 GI-D7
SEn:1 N2
SEn:2 Ar
SEn:3 Any value Any value
*: N2 and the Ar sensitivity are calculated by normal sensitivity
1.3.1. Details of Sensitivity Set Values
"Sensitivity" referred to here is the total sensitivity obtained by multiplying the
sensitivity constant (K) of the ULVAC sensor head (M type) for nitrogen by the
relative sensitivity (Srj) for various types of gases, where the sensitivity for nitrogen
is given as 1.
-1
In case of M-11, intrinsic sensitivity 0.05 Pa (normal sensitivity is 0.06 Pa
＝ Srj(N
-1
N : 0.05 Pa )
2 2
-1 ≒ Srj(N ) × Srj ＝ 0.05 Pa -1
Ar： 0.067 Pa ×1.34
2
1.4. Setting of SetPoint 1/2
GI-M2 GI-D7
-1 ～ 1.00×10
WIT : 6.79×10
Setiing
～ 5.00×10
9.99×10 -0 -8
range -2 ～ 1.00×10
WIB : 2.00×10
1.5. Selection of Range Changeover Function
rAn:1 ⇒ AUTO RANGE MODE rAn:2 ⇒ RANGE HOLD MODE
1.6. Setting of Range HOLD
GI-M2 GI-D7
Setting range -0 ~ -8 -1 ~ -7
1.7. Selection of DEGAS Function
(1) dGS:1 ⇒ MANUAL MODE
A single press on the DEGAS switch turns ON degassing and a second press
turns OFF degassing.
(2) dGS:2 ⇒ AUTO MODE
A single press on the DEGAS switch turns ON degassing. It is automatically
turned OFF when an arbitrarily designated time elapses. If it is desired to turn it
OFF before the time elapses, press the DEGAS switch, and degassing will be
turned OFF.
1.7.1. Setting of DEGAS Function
Settable numeric values are 01 to 99 minutes.
1.8. Setting of Filament 1/2
FIL:1 ⇒ Filament 1 FIL:2 ⇒ Filament 2
1.9.Selection of Analog Function
GI-M2
rEC:1 Eeach-digit linear output mode
rEC:2 Pseudo-logarithmic mode
rEC:3 Range hold liniea mode
rEC:4 logarithmic mode
rEC:5 Not used
Status Measurement value output voltage
Filament OFF
Filament ON [Em.Valid OK] Voltage corresponding to measured pressure
Filament ON [Em.Valid NG]
When pressure protection is
activated (Filament is OFF)
1.9.1. LIN output in each status
Ｐ＝Ｖ×１０＾－Ｓ (Pa)
P: Pressure , V: Output voltage, S:Measured pressure range
10
9
8
7
GI-D7
6
SnS 1
5
8.00 -2
4
5.00 -3
5.00 -4 3
-7
2
01
1
FIL 1
rEC 1 0
1.0E-05 1.0E-(N-2) 1.0E-04 1.0E-(N-1)
-7
Pressure (Pa)
Not used
9600
1.9.2. GI-M2 Pseudo-LOG output
Ｐ＝１０（Ｖ－Ｅ）×１０＾（Ｅ－８） (Pa）
P: Pressure , V:Output voltage, E:V from which decimal point is rounded down
10
9
8
N2
7
Ar
6
5
4
3
2
1
-1
)
0
1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01
Pressure (Pa)
1.9.3.GI-D7 Pseudo-LOG output
Ｐ＝１０（Ｖ－Ｅ）×１０＾（Ｅ－７） (Pa）
P: Pressure, V:Output voltage, E:V from which decimal point is rounded down
-5
8
-6
7
6
5
4
3
2
1
0
1.0E-06 1.0E-05 1.0E-04 1.0E-03
Pressure (Pa)
1.9.4. Range Hold Linear Output (REC-HOLD)
10
GI-D7
1
GI-D6 compatibility output mode
GI-TL3 compatibility output mode
0.1
0.00V
0.00V
0.01
1.0E-07 1.0E-06
0.00V
1.9.5. Logarithmic Output (GI-M2)
Ｐ＝１０＾（Ｖ－８） ⇔ Ｖ＝ｌｏｇＰ＋８
P: Pressure, V: Output voltage
10
9
8
7
6
5
Pressure increase
4
Pressure decrease
3
2
1
0
1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01
1.0E-03 1.0E-(N)
1.9.6.GI-D6 Compatibility output setting WIT （GI-D7 Only）
Ｐ＝１０×（Ｖ－Ｅ）×１０＾（Ｅ－５） (Pa)
P: Pressure, V: Output voltage, E: V from which decimal point is rounded down
6
5
4
3
2
1
0
1.0E-05 1.0E-04
1.9.7.GI-D6 Compatibility output setting WIB （GI-D7 Only）
Ｐ＝１０×（Ｖ－Ｅ）×１０＾（Ｅ－６） (Pa)
P: Pressure, V: Output voltage, E: V from which decimal point is rounded down
6
5
4
3
2
1
1.0E-02 1.0E-01 1.0E+00
0
1.0E-06 1.0E-05
(by E-4) 1.9.8.GI-TL3 Compatibility output （GI-D7 Only）
Ｐ＝１０＾（Ｖ／２－５） (Pa)
P: Pressure, V: Output voltage
1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Pressure (Pa)
2. Nomenclature and Functions of Components
Name (Inscription)
Pressure (Pa)
① POWER
② FIL
③ DEG
④ F1
⑤ O PRG
⑥ 
⑦
⑧
1.0E-03 1.0E-02 1.0E-01 1.0E+00
Pressure (Pa)
① SET1 lamp
② SET2 lamp
③ PROTECT lamp
④ REMOTE lamp
⑤ Em-Lo lamp
1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Pressure (Pa)
⑥ Em-Hi lamp
10
9
8
7
6
5
4
3
2
1
0
1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Pressure (Pa)
1 2 3 4 5 6 7 8
Function
Pressing the top of the POWER switch turns on power
and pressing the bottom turns it off. When the power is
on, the LED in the switch is lit.
Used to turn on/off the filament. The first press on the
key turns on the filament and a second press turns it off.
Used to turn on/off degassing. The first press on the key
turns on degassing and a second press turns it off.
Degassing is automatically turned off after a preset time
when used in the auto OFF mode.
Not used
Switch to change over to the setting mode.
Holding down the switch for 2 seconds or more changes
over the measurement mode/setting mode.
Each press on the switch increments a value by one.
Shifts a value to the right.
Used to store a set value in memory.
A set value cannot be changed unless this switch is
pressed because it is not stored in EEPROM.
2 1 4 3 5 6
Pa
10
7 8 9
Name Function
Lit when set point 1 is activated.
Lit when set point 2 is activated.
Lit when filament protection is activated by an external
input signal.
Lit when the gauge is set in the REMOTE status by
external control (external I/O, RS-232C).
GI-M2: Lit when emission current is 10 A.
GI-D7: Not used.
GI-M2: Lit when emission current is 1 mA.
GI-N7: Not used.