Ulvac G-TRAN Series Quick Manual

SK00-9662-EQ-003-00
G-TRAN SERIES
Pirani Vacuum gauge SWU10-R
Quick Manual

Introduction

This quick manual is for quick check of operation and display of the product.
Please refer to instruction manual in advance for detailed information about
operation, precautions and safety for proper use. Available for download from
ULVAC website. https://showcase.ulvac.co.jp/ja
This manual is for the following gauges. Serial Nos. 00001 and higher.

Part Names and Functions

SWU10-R controller section
①
② ③
Name Function
The I/O connector for the power supply and signals
I/O connector
①
(RJ-45 jack connector).
Gauge head
The clamp to hold and lock the gauge head.
②
clamp
Mating screws Mating screws (M3) for the clamp hood.
③
SWU10-R I/O connector
8 1
No This unit Connection destination
1 Power supply +5 VDC
2 GND
3 Power supply +5 VDC
4 Communication terminal
SH2/ST2
Multi-ionization gauge
5 Communication terminal
6 GND
7 Power supply +5 VDC
8 GND
SWU10-R LED
Name (symbol) Function
On : Operating normally
Flashing: Error such as a filament
POWER/ERROR LED break, this unit is malfunctioning
①
Off : Power off, this unit or the
SH2 / ST2 is malfunctioning

Attaching the Product

Loosen the clamp locking screws to loosen the clamp. Then attach the gauge
head with the procedure below.
① Align the pins for the gauge head and push it all the way in
② Clamp the gauge head with the clamp
③ Tighten the locking screws to secure the gauge head

Handling Precautions

3.1. Precautions related to usage
・
Secure cables as much as possible so that force is not applied to cable
connectors.
・
Firmly insert the RJ-45 connector.
・
To perform accurate pressure measurements, allow the pressure sensor to
age for 20 minutes or longer before measuring.
3.2. Attaching this unit
・
Attach this unit so that the gauge head attachment opening surface is
parallel to the gas flow. In particular, ensure that gases do not enter the
gauge head interior like a beam.
・
As much as possible, attach the gauge head so the filament is vertical to
the force of gravity.
・
The Pirani vacuum gauge head filament is thin at φ25 µm, so avoid use in
a location with a large amount of vibration as much as possible. The
biggest cause of filament breaks is from mechanical shock, so use caution
regarding the installation location and handling.
・
Use an O-ring to attach the gauge head that releases little gas. There is a
risk of measurement errors or the gauge head lifespan will decrease if
materials that release a large quantity of gas, such as rubber tubes or grease,
are used in the gauge head connection.
Gas flow direction
Checking the Filament and Temperature Sensor for
Burnout
Temperature
sensor
Approx. 1.1
kΩ
Filament
Approx. 5 Ω
The diagram below shows the connection of the Pirani sensor head filament. Check
continuity referring to this diagram. The resistance of the filament is about 5Ω under
atmospheric pressure and that of the temperature sensor is about 1.1 kΩunder
atmospheric pressure.
Note)Beware of over-current
If the filament or temperature sensor is energized with an over-current of 2 mA or
more, it may burn out. Be alert to the current value on the measuring instrument.
Also measure the resistance value under atmospheric pressure because in vacuum, the
filament and other components are heated and an accurate resistance value cannot be
measured.

Specifications

Name Pirani vacuum gauge measuring unit
Model SWU10-R
Measurement principle Pirani vacuum gauge that uses thermal
conduction by gas molecule
Number of gauge heads 1pc
Applicable gauge head SWP-16,SWP-R1/8,SWP-P18,SWP-P15, SWP-
25, SWP-CF16, SWP-1S
Measurement pressure range 5.0×10 -2 to 1.0×10 +5 Pa
Output pressure range 5.0×10 -2 to 1.0×10 +5 Pa
Accuracy (N ) 1×10 -1 Pa to 1×10 +4 Pa: ±10%
2
5×10 -2 Pa to 1×10 -1 Pa: ±20%
1×10 +4 Pa to 1×10 +5 Pa: ±20%
-1 +4
Repeatability 1×10 Pa to 1×10 Pa: ± 2%
Sampling time 50 ms, 5x moving average
Measurement value output Output by serial communication
LED display POWER/ERROR LED
Gauge head material Filament：Pt
Other：SUS304, FeNiCo, Ni, Au, Glass, Ceramic
+5
Gauge head withstand 2×10 Pa(abs)
pressure *Take the withstand pressure for flanges,
clamps, and other components into account
separately.
Operating temperature range
10 to 40℃
Operating humidity range 15 to 85% RH (no condensation)
Storage temperature
-20 to 65℃(no condensation)
Bake out 150℃(without electronics unit)
Mounting position Free
IP protection class IP30
5VDC±5%
Power supply voltage
I/O connector RJ-45 jack connector
Gauge head internal volume Pirani vacuum gauge head(SWP-16): 7.3cm
Weight Controller: Approx. 38 g,
External dimensions φ40×51 (controller section only)
Standard Accessories
Quick manual(This paper) 1copy

Trouble shooting

Bad electrical wiring is a major cause of this unit malfunctions. If this unit
behaves in a manner you find unusual, first check the wiring between this unit and
the SH2/ST2. Refer to the SH2/ST2 instruction manual as well.
The POWER/ERROR LED is off even though power is being supplied
Cause Action
Miswired or broken cable Repair the wiring and check continuity
with a tester.
The power supply voltage to the Check the power supply voltage with a
SH2/ST2 is not within the specified tester.
range
This unit or the SH2/ST2 is Requires inspection and repairs at
malfunctioning ULVAC.
The POWER/ERROR LED is flashing or the SH2/ST2 keeps outputting the
error signal
Cause Action
Filament break or short circuit Measure filament continuity and
isolation between each pin and the case.
⇒Replace the gauge head when there is
a problem.
The gauge head is not attached Attach the gauge head.
This unit or the SH2/ST2 is Requires inspection and repairs at
malfunctioning ULVAC.
Pressure does not reach 5×10 -2 Pa or lower even when pumping to vacuum
Cause Action
-2 Check the pressure with an ionization
The actual pressure is not 5×10 Pa
vacuum gauge.
or lower
Room temperature, gas temperature This is normal. Measurements are
is different when measuring temperature dependent.
This unit or the SH2/ST2 is Requires inspection and repairs at
malfunctioning ULVAC.
The pressure reading does not show a steady value.
Cause Action
The pressure is actually fluctuating This is normal.
This unit is affected by pump Suppress vibrations as much as possible.
vibrations and fluctuating Measurements are affected by the
principle of the Pirani vacuum gauge.
Attached to a location with a gas Attach this unit to a location with no gas
flow flow.
Measurements are affected by the
principle of the Pirani vacuum gauge.
The environmental temperature is Wait for the environmental temperature
fluctuating to stabilize.
Measurements are affected by the
principle of the Pirani vacuum gauge.
High temperature and low Implement corrective action such as
temperature gases are flowing in attaching the gauge head to a location
unaffected by gas temperature.
Measurements are affected by the
principle of the Pirani vacuum gauge.
Dirty gauge head interior Replace the gauge head
Affected by moisture and dirt Attach the gauge head to a location as
unaffected as possible
Influenced by heat of vaporization by
gradual vaporization.
There is a leak in the gauge head Gauge head leak ⇒ Replace the gauge
or the area where the gauge head is
head
attached
Other leaks ⇒ Stop the leak
Bad cable contact, increased wire Check the cable connection and
resistance resistance.
The cable is affected by Change the cable installation location.
electromagnetic induction. Use this unit with the device generating
(By external noise) the noise turned off.
Review how the cables are installed
Examine separate measures for noise
3