Standard Specifications - Ulvac G-TRAN Series Instruction Manual

2.5. SPU combination mode (SH200+SPU) standard specifications
Measurable
pressure range
(N )
2
Accuracy (N )
2
POWER LED status
Control input
signal
-8 +4
5.0×10 Pa～1.0×10
When pressure drops: SPU indicates 2Pa or lower, SPU ⇒SH200
When pressure rises: SPU indicates 3Pa or higher, SH200⇒SPU
※ SH200 measurement can be forcibly turned off with the
control signal.
Pressure range
-8
5.0×10 Pa to 4.0×10
-1
4.0×10 Pa to 1.0×10
+0
1.0×10 Pa to 1.0×10
+3
1.0×10 Pa to 3.0×10
+3
3.0×10 Pa to 1.0×10
In the overlapping pressure range of 0.4Pa to 3.0Pa, the
measured pressure of the Pirani gauge and SH200 is adjusted and
output.
※ SPU and SH200 have gas species dependency. Please note
the difference in pressure indication when gauges switch.
White : Start up
Blue : Normal operation to SPU measurement range
Green : SH200 filament is on
Red : SPU Power failure
Blinking Red: SH200 Power failure
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Open collector input, Negative logic
※ When FIL ON/OFF signal is Lo input, the filament of SH200
is off.
Pa
Accuracy
-1
Pa ±15%
+0
Pa ±15% to ±30%
+3
Pa ±15%
+3
Pa ±30%
+4
Pa Accuracy not guaranteed
7