Command; Reading Measurement Values; And Status; Writing Status - Ulvac G-TRAN Series Instruction Manual

15.3.

Command

Reading measurement values and status
Command : AD0
Return format from this unit to PC.
： AD0 AD1

「X．XXE±XX」is the measured pressure value.
e.g.1) 3.00E+03
e.g.2) 5.00E+00
e.g.3) 4.00E-01

When "E．EEE＋EE" is returned: Sensor error
 When "F．FFE＋FF" is returned: In SH200 stand-alone mode only, when the

Please refer to another section for the status "SH" and "SL."

Writing status

Command : AD0

Please refer to another section for the status "SH" and "SL."

When the command is received normally, "o" which means that the command is
received normally, will be returned.

Reading status

Command : AD0
Return format from this unit to PC.
： AD0 AD1

Please refer to another section for the status "SH" and "SL."

Checking errors

Command : AD0
Return format from this unit to PC.
： AD0 AD1 ERR

"#"means the following:
S0: SH200 main unit related error, such as SH200-A/R internal voltage error
or short circuit on the output side.
SG: Grid related error, such as abnormal grid voltage and short circuit on
the sensor side.
SF: Filament related error such as emission current error.
SB: Filament disconnection of SH200.
SP: Pressure protection of SH200.
A0: SAU power supply error, unit cable error with SAU.
P0: SWU/SPU power supply error, unit cable error with SWU/SPU.
PF: Filament disconnection of pirani gauge of SWU/SPU.
SAU/SWU/SPU atmospheric pressure adjustment command
Command : AD0

SAU/SWU/SPU atmospheric pressure adjustment range: 7.1E+4Pa to 1.2E+5Pa

When the atmospheric pressure is adjusted, 'o' is returned.

When the pressure is beyond the range of the atmospheric pressure adjustment,
'n' is returned.
AD1 D
D X . X X E
⇒ 3.00×10
⇒ 5.00×10
⇒ 4.00×10
AD1 SW
AD1 SR
S
AD1 ERR
## CHKH CHKL
AD1 ATM
CHKH CHKL CR
± X X SH
+3
+0
-1
measurement range is exceeded, or filament
is off.
SH SL CHKH
CHKH CHKL CR
SH SL CHKH
CHKH CHKL CR
CR
CHKH CHKL CR
39
SL CHKH CHKL CR
CHKL CR
CHKL CR