Setpoint On/Off Pressure; Setpoint Setting Of Sh200-A; Filament Power Monitoring Signal - Ulvac G-TRAN Series Instruction Manual

11.2.

Setpoint ON/OFF pressure

Setpoints have hysteresis between on pressure and off pressure.
Pressure value when Setpoint is on : Set value
Pressure value when Setpoint is off: Set value+10%
ｾｯﾄﾎﾟｲﾝﾄ
Setpoint
設定圧力値+10%
Set pressure Value +10%
ｾｯﾄﾎﾟｲﾝﾄ
Setpoint
設定圧力値
Set pressure Value
11.3.

Setpoint setting of SH200-A

The setpoint can be set on the G-TRAN setting tools "UL-MOBI_Android" or "UL-
MOBI_Windows." Please refer to the application manual for details.
※ A password is required to change the settings, as careless setting change may
cause the failure of the vacuum system.
The password can be set to any four numbers.
Download:
UL-MOBI_Android Google Play
UL-MOBI_Windows
UL-MOBI_Windows Instruction manual
12.

Filament power monitoring signal

This function outputs an on (Lo) signal when the power supplied to the SH200 filament
exceeds the specified range. This is an indication that the service life is
approaching due to the wear of the filament.
Since the filament life varies greatly depending on the operating environment and
other factors, please consider it an indicator. The signal is output when the filament
life is about 90% of the new one (assuming 100% at full operation).
This is just for reference, but the remaining life is a few weeks under the
environment that uses active gases (such as O
use in a high vacuum.
This signal turns off when the filament turns off. The signal outputs more when the
emission current is at 1mA (1.0×10
グラフ タイトル
SETPOINT Hi SETPOINT Lo
https://www.ulvac.co.jp/download/en/application/
https://www.ulvac.co.jp/download/en/application/
-3
Pa or less) than at 10μA (1.0×10
33
SETPOINT Hi
, H ) and about one year under constant
2 2
(5.5Pa)
(5.0Pa)
-3
Pa or more).