Ulvac G-TRAN Series Instruction Manual
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Ulvac G-TRAN Series Instruction Manual

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G-TRAN Series
1-Channel Display Unit
Model ISG1
Instruction Manual
This manual is for the display units of the
following serial numbers:
Serial No. 09501 and higher.
Read this manual before operation and keep it at
hand for immediate reference.
Model
Multi Ionization Gauge ST2-1
Multi Ionization Gauge SH2-1
Multi Ionization Gauge ST200-A
Multi Ionization Gauge SH200-A
Cold-Cathode Ion Gauge SC1
Pirani Vacuum Gauge SW1-1
Pirani Vacuum Gauge SP1
Ceramic Capacitance Manometer CCMT-D series
i
YK06-0044-EI-003-18
Serial numbers
00901～
06001～
00001～
00001～
02300G～
00001～
00001～
00001～
Components Division,
ULVAC, Inc.

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  • Page 1 YK06-0044-EI-003-18 G-TRAN Series 1-Channel Display Unit Model ISG1 Instruction Manual This manual is for the display units of the following serial numbers: Serial No. 09501 and higher. Read this manual before operation and keep it at hand for immediate reference.

  • Page 2: Prior To Operation

    The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc. You are also prohibited from disclosing or transferring this instruction manual to third parties without the express written consent of ULVAC Inc.

  • Page 3: Safety Precautions

    Safety Precautions For safe operation of this unit, read this manual and the following safety precautions. Servicing For repair and servicing, contact your local ULVAC representative or Components Division, ULVAC, Inc., Japan. Turn OFF power. If the unit fails, immediately turn off the power.
  • Page 4 ULVAC about once every 3 years. Cautions in shipping the unit If the unit is to be shipped back to ULVAC, pack it in the original condition. If it is shipped bare, it may be damaged.

  • Page 5: Revision History

    Revision History DATE Reason Apr. 4, 2008 S/N:00001～ first version ・Added CCMT-1000D/100D/10D/1D Aug. 25, 2009 ・Section 2.1, added output impedance to specifications. ・Chapter 22, added EC DECLARATION OF CONFORMITY. ・Chapter 18, added Interlock function. ・Changed A5 version to B6 version. July 27, 2011 ・Added multi-ionization gauge SH2 Mar.

  • Page 6: Table Of Contents

    Safety Notations ........................ii Safety Precautions ........................iii Revision History ........................v Contents ..........................vi GETTING STARTED ....................1 1.1. Overview of G-TRAN Series ......................1 1.2. Terminology ............................1 1.3. Features of This Unit ........................... 2 SPECIFICATIONS AND COMPONENTS ..............3 2.1.
  • Page 7 SETPOINT ......................21 7.1. What is Setpoint? ..........................21 7.2. Setpoint Setting Range........................21 7.3. How to Set Setpoint .......................... 21 7.3.1. How to Set Setpoint from Front Panel ......................22 7.3.2. How to set setpoint from RS-485 ........................23 CONNECTION WITH EXTERNAL DEVICES ............24 8.1.
  • Page 8 10.6. Signals ..............................32 10.6.1. Output voltage ..............................32 10.6.2. HV ON signal: Pin 5 ............................33 10.6.3. Discharge check signal: Pin 4 ........................33 10.6.4. Setpoint: Pins 3, 7, 11.............................33 10.6.5. RS485 communication: Pins 10, 12 ......................33 PIRANI GAUGE BPR2/SP1 ..................34 11.1.
  • Page 9 12.6.4. Filament1/2 changeover signal ........................42 12.6.5. Pressure protection signal ..........................43 12.6.6. Emission valid signal .............................43 12.6.7. Setpoint ................................43 12.6.8. RS485 communication ..........................43 MULTI IONIZATION GAUGE SH2/ST2/SH200/ST200......... 44 13.1. Sensor Unit Setting: “Sh2” ......................44 13.2. Front Panel ............................44 13.2.1. Pressure display ...............................44 13.2.2.
  • Page 10 14.3.3.2. Degas operation setting “dE” .........................51 14.3.3.3. Filament changeover setting “FL” ......................51 14.3.4. Operation setting method ..........................52 14.4. Connection with The Sensor Unit ....................53 14.5. Connection with external devices ....................53 14.6. Various Signals ..........................54 14.6.1. Output voltage ..............................54 14.6.2.
  • Page 11 16.1. Sensor Unit Setting: “SAU” ......................62 16.2. Front Panel ............................62 16.2.1. Pressure display ...............................62 16.2.2. Description of front panel keys ........................62 16.3. Setting Operation ..........................63 16.3.1. Setting overview .............................63 16.3.2. RS-485 communication operation setting “L1”, “L2” ................63 16.3.3.
  • Page 12 17.7.1. Operation front panel .............................71 17.7.2. Operation external I/O ...........................71 17.7.3. RS-485 communication ..........................71 CALCULATING FUNCTION ................. 72 18.1. Display Pressure Value in CAL Function ..................72 Displayed pressure value = Actual measured pressure × CAL set value ............72 18.2.
  • Page 13 22.4.9. Writing the setpoint2 set value ........................84 22.4.10. Writing the setpoint3 set value ........................84 22.4.11. SW1 ZERO point adjustment command ....................84 22.4.12. SW1 atmospheric pressure adjustment command ...................84 22.4.13. SW1 zero point, atmospheric pressure adjustment correction reset command........84 22.4.14. CCM zero point adjustment command ......................85 22.4.15.

  • Page 14: Getting Started

    1.1. Overview of G-TRAN Series Units of the G-TRAN series vacuum gauges are varied in type and include the following types. “Sensor Unit” indicates all models and types of box units and sensor units throughout this manual. as of 2021...

  • Page 15: Features Of This Unit

    1.3. Features of This Unit • This display unit is for exclusive use with G-TRAN series: Sensor unit SP1 Pirani gauge Sensor unit SW1 Box unit BPR2 (end of sale) Cold cathode gauge Hot cathode gauge Box unit BMR2 (end of sale)

  • Page 16: Specifications And Components

    2. SPECIFICATIONS AND COMPONENTS 2.1. Specifications Name 1-channel digital display unit ISG1 Number of sensor units 1 pc. connected Sensor unit G-TRAN Pirani sensor unit SP1 4.0 × 10 to 3.0 × 10 series Pirani box unit BPR2 5.0 × 10 to 1.2 ×...
  • Page 17 Analog output 0V to 10VDC pseudo-log. output, log, linear output Note: The output differs with each unit. Update time 70msec Resolution Output error ±10mV 100Ω Impedance ± 10mV against the voltage converted value of pressure display Accuracy Control input signal Actuated by open collector input, negative logic.

  • Page 18: Standard Accessories

    Connected cable length Length of cable from this unit to the sensor unit, calculated with 24AWG. Pirani sensor unit up to 50m Pirani box unit BPR2 up to 100m Pirani gauge up to 100m Cold cathode ion gauge up to 100m Hot cathode ion gauge BMR2 up to 10m...

  • Page 19: Dimensional Drawings Din Panel Size

    2.4. Dimensional Drawings DIN Panel Size (R50) (105) 44.5...

  • Page 20: Installation Din Panel

    2.5. Installation DIN Panel Panel thickness: <4mm...

  • Page 21: Dimensional Drawings Jis Panel Size

    2.6. Dimensional Drawings JIS panel size (R50) 45.5...

  • Page 22: Names Of Components And Description Of Functions

    3. NAMES OF COMPONENTS AND DESCRIPTION OF FUNCTIONS 3.1. Front Panel Lights Fig. 3.1 Front Panel Lights Name (inscription) Function Lit when setpoint1 is actuated. ① Blinks when a setpoint value is being set. Lit when setpoint2 is actuated. ② Blinks when a setpoint value is being set.

  • Page 23: Front Panel Switch Program Mode

    3.2. Front Panel Switch Program Mode Fig. 3.2 Front Panel Switches Name (inscription) Functions of menu Operating functions ① PROG Program key Enters into the program mode. ② Upward arrow key Changes a value. ③ Rightward arrow key Changes a numeric value. Enter key ④...

  • Page 24: Front Panel Switch Measurement Mode

    3.3. Front Panel Switch Measurement Mode Fig. 3.3 Front Panel Switches Name (notation) Functions of menu Operating functions ① PROG Program key Not used in measurement. Zero point adjustment ON/OFF switch ② ZERO Zero key for CCM series ③ Degassing key Switch that turns ON/OFF degassing.

  • Page 25: Rear Panel

    3.4. Rear Panel SE NSOR I / O 10 11 12 14 15 DC24V Fig. 3.4 Rear Panel Name (notation) Functions of menu Connector to connect to the sensor unit ① SENSOR (D-sub 15pin connector female, M2.6mm screw) I/O connector for data and signals ②...

  • Page 26: Sensor Connector (D-Sub 15Pin Connector Female, M2.6Mm Screw)

    3.5. Sensor Connector (D-sub 15pin connector female, M2.6mm screw) SE NSOR Fig. 3.5 Sensor Connector Pin Assignment (D-sub 15pin connector female, M2.6mm screw) Terminal No. * Description Signal direction Connected to +24V power output Sensor error input Not used FIL/HV input, Unit connection check signal FIL/HV ON, adjustment output FIL 1/2 output...

  • Page 27: I/O Connector (D-Sub 15Pin Connector Male, M2.6Mm Screw)

    3.6. I/O Connector (D-sub 15pin connector male, M2.6mm screw) I / O 10 11 12 14 15 Fig. 3.6 I/O Connector Pin Assignment (D-sub 15pin connector male, M2.6mm screw) Terminal No. * Description Signal direction Connected to Not used Error signal output Setpoint1 actuating signal FIL/HV output signal Remote host...

  • Page 28: Power Supply Connector (Phoenix Model Mstb2.5/3-Gf-5.08)

    3.7. Power Supply Connector (Phoenix model MSTB2.5/3-GF-5.08) DC24V P(+) N(-) Fig. 3.7 Power Supply Connector Pin Assignment (Phoenix model MSTB2.5/3-GF-5.08) Description (notation) Function ① DC24V P(+) Pin that supplies +24VDC power ② DC24V N(-) GND in supplying +24VDC power ③ DC24V Frame ground.

  • Page 29: Installation

    4. INSTALLATION Operating environment Use this instrument within the scope of the environment set forth in the specifications. Keep out foreign objects If any foreign objects, such as metals or combustibles, are admitted into the unit through an opening, remove them. Also keep foreign objects away from the terminals on the rear panel of the unit.

  • Page 30: Installation

    DISPLAY UNIT SENSOR Dsub-15S D-sub_15P MEASURING/CONTROLL CIRCUIT Power -GND +24V FILTER CIRCUIT +24V DC24V FUSE VARISTOR Fig. 4.1 Equivalent Circuit in The Power Supply 4.2.3. Installation Sensor Unit SE NSOR I / O 10 11 12 14 15 DC24V POWER SUPPLY DC24V...

  • Page 31: Front Panel Operation

    5. FRONT PANEL OPERATION This section describes the operating procedure on the front panel. 5.1. Description of Front Panel Keys 5.1.1. Program mode The table below gives the operating procedure in the program mode. Notation Name Function Enters into the program mode. PROG Program key Also a key for shifting to each setting.

  • Page 32: Selection Of Sensor Unit

    6. SELECTION OF SENSOR UNIT Before using this unit, select a sensor unit to connect to this unit. 6.1. Selection of Sensor Unit The currently selected sensor unit blinks for 3sec after power is applied to this unit. Press the (up arrow) key while the sensor unit is blinking and, when the sensor unit is displayed, press the (enter) key.

  • Page 33: Reset The Unit To The Factory Default Settings

    6.2. Reset The Unit to The Factory Default Settings The factory parameter setting is activated by keeping the “ZERO” key ( (up arrow) key) depressed for at least 3sec after power on. So display is “nc”. Select a sensor unit, check the setpoint value and calculation value. 6.3.

  • Page 34: Setpoint

    7. SETPOINT Display of 10 , 10 is “A (A of capital letter)”, 10 is “b (B of small letter)”. Please note “b (B of small letter)” to make a mistake as '6' of the figure. This section describes the settings of setpoint. Before reading this section, read the standard operating procedure described in the preceding sections.

  • Page 35: How To Set Setpoint From Front Panel

    7.3.1. How to Set Setpoint from Front Panel Pressure display PROG Setpoint1 setting: ST1 LED blinks PROG Setpoint2 setting: ST2 LED blinks PROG Setpoint3 setting: ST3 LED blinks PROG CALCULATION setting: see section on CALCULATION PROG RS485 setting: see section on RS485 PROG Interlock setting PROG...

  • Page 36: How To Set Setpoint From Rs-485

    7.3.2. How to set setpoint from RS-485 Refer to section 22 for how to set through RS-485. In the RS-485 mode, the setpoint value can be checked with the PROG key, but it cannot be changed.

  • Page 37: Connection With External Devices

    8. CONNECTION WITH EXTERNAL DEVICES The table below gives the pin assignment in the connection with external devices. * Connector for connection “I/O”: D-sub 15pin female (M2.6mm screw) 『I/O』 Description Remarks Output signal Lo when actuated, 30VDC , 50mA , 70mW Setpoint1 actuating signal Lo when actuated, 30VDC , 50mA...

  • Page 38: Input Signal

    8.2. Input Signal Contact capacity Use a capacity for externally installed contacts greater than the input power supply voltage and 30VDC or higher. Contact leak current Be aware of contact leak current. If a current of 0.08mA or higher flows between the input signal pin to the GND terminal, that may be treated as signal input.

  • Page 39: Pirani Gauge Sw1

    9. PIRANI GAUGE SW1 Connection with a standard type SW1-1 is recommended. Zero point and atmosphere adjustment will be impossible if it connects with a serial communication type. Moreover, Filament error signal may not be outputted. This section describes the operation of the sensor unit of the Pirani gauge SW1. Before reading this section, read the standard operating procedure in the preceding sections.

  • Page 40: Front Panel, External I/O Operation Setting: "Aj

    9.3.2. Front panel, external I/O operation setting: “AJ” Selects whether the zero point and atmospheric pressure adjustment are not be made on the front panel or with external I/O. Display Detail “F” Operation on the front panel only “o” Only I/O is operated. 9.3.3.

  • Page 41: Connection With Sensor Unit

    9.4. Connection with Sensor Unit The table below gives the pin assignment in connecting with the sensor unit SW1-1. In connecting with the sensor unit, it is recommended to connect all of the following pins. * Connector for connection “SENSOR”: D-sub 15pin connector male, M2.6mm screw * Connector for connection “SW1”: D-sub 15pin connector female, M2.6mm screw “SENSOR”...

  • Page 42: Filament Burnout Signal

    1.0E+05 1.0E+04 1.0E+03 1.0E+02 1.0E+01 1.0E+00 1.0E-01 1.0E-02 OUTPUT VOLTAGE (V) 9.6.2. Filament burnout signal The filament burnout signal is output when the sensor head filament has burnt out. If the filament burns out, Lo is output in the open collector format. Photocoupler rating: 30V , 50mA , 70mW...

  • Page 43: Cold Cathode Gauge Sc1

    10. COLD CATHODE GAUGE SC1 This section describes the operation of the cold cathode gauge SC1. Before reading this section, go through the standard operating procedure described in the preceding sections and the manual for the sensor unit. 10.1. Setting The Sensor Unit Turn on the power to this unit and make sure that “Sc1”...

  • Page 44: Operation Setting Method

    10.3.3. Operation setting method Press the PROG key to change over the mode. Each press on the PROG key changes the display as follows. If HV is on (local or remote), this unit cannot do HV settings operation. Pressure display PROG ST1 setting: ST1 LED blinks Change the setting...

  • Page 45: Connection To The Sensor Unit: "Sensor" Connector

    10.4. Connection to The Sensor Unit: “SENSOR” Connector The table below gives the pin assignment in the connection with the sensor unit. In the connection with the sensor unit, it is recommended to connect all of the following pins. * Connector for connection “SENSOR”: D-sub 15pin connector male, M2.6mm screw * Connector for connection “SC1”: D-sub 15pin connector female, M2.6mm screw “SENSOR”...

  • Page 46: Hv On Signal: Pin 5

    10.6.2. HV ON signal: Pin 5 Before turning on HV, short pin 5 to GND with the external switch. When front panel operation or RS-485 communication is set, input of this signal will be invalid. 10.6.3. Discharge check signal: Pin 4 Start of discharge is output as a signal.

  • Page 47: Pirani Gauge Bpr2/Sp1

    11. PIRANI GAUGE BPR2/SP1 Power supply to the BPR2 If 24VDC is supplied to the BPR2, the display when the sensor unit is unconnected is shown. This section describes how to use the Pirani gauge BPR2 or SP1 sensor unit. Before reading this section, refer to the standard operating procedure in the foregoing sections.

  • Page 48: Operation Setting Method

    11.3.2. Operation setting method Press the PROG key to change over the mode. Each press on the PROG key changes the display as follows. Pressure display PROG ST1 setting: ST1 LED blinks Change the setting PROG ST2 setting: ST2 LED blinks Change the setting PROG ST3 setting: ST3 LED blinks...

  • Page 49: Connection With External Devices

    11.5. Connection with External Devices The table below gives the pin assignment in connecting to an external device. * Connector for connection “I/O”: D-sub 15pin connector female, M2.6mm screw “I/O” pin Description Remarks Burnout signal output Lo when error, 30VDC , 50mA , 70mW Setpoint1 actuating signal...

  • Page 50: Burnout Signal

    11.6.2. Burnout signal Burnout detection ✔ Note If the main component of the measurement gas is hydrogen (H ) or helium (He), this output signal may be output even if the filament is broken. The burnout signal is a signal that is output when a the sensor head filament has burnt out. If the filament burns out, Lo output is given in the open collector format.

  • Page 51: Hot Cathode Gauge Bmr2

    12. HOT CATHODE GAUGE BMR2 Cable connecting the basic unit and BMR2 The cable (24AWG) connecting the basic unit and BMR2 is 10m long maximum. If a longer cable is necessary, connect the power source directly to the BMR2 or use a cable with a larger diameter. This section describes the operation of the BMR2 ionization vacuum gauge.

  • Page 52: Communication Operation Setting "L1", "L2

    12.3.2. RS-485 communication operation setting “L1”, “L2” Selects if filament ON/OFF, degassing ON/OFF or filament1/2 changeover is to be operated through RS-485 communication. Refer to section 22 for more information about the detailed setting of RS-485. Display Details Remarks “L1” Operation on the front panel and external I/O RS-485: Pressure reading only “L2”...

  • Page 53: Operation Setting Method

    12.3.3.4. Operation setting method Press the program key to change over the set mode. Each press on the program key changes over the display as follows. If filament is on (local or remote), this unit cannot do filament setting, degas setting, and filament1/2 setting. Filament off: Display“FiF”...

  • Page 54: Connection With The Sensor Unit

    12.4. Connection with The Sensor Unit The table below gives the pin assignment in connecting to the sensor unit. In connecting to the sensor unit, it is recommended to connect all pins below. * Connector for connection “SENSOR”: D-sub15 pin connector male, M2.6mm screw * Connector for connection “BMR2”: D-sub15 pin connector female, M2.6mm screw “SENSOR”...

  • Page 55: Various Signals

    12.6. Various Signals 12.6.1. Output voltage The output voltage is output with + [8pin] of the I/O connector → GND [15pin] In case CAL function is enabled, the conversion formula is different from the above The equation for converting pressure: P = 10 ×...

  • Page 56: Pressure Protection Signal

    12.6.5. Pressure protection signal If the sensor unit exceeds the higher limit of measurement pressure, pressure protection will be actuated. If it is actuated, the open collector will be Lo output. Photocoupler rating: 30V , 50mA , 70mW For more information about pressure protection and actions in case of pressure protection signal being turned on, refer to the sensor unit manual.

  • Page 57: Multi Ionization Gauge Sh2/St2/Sh200/St200

    13. MULTI IONIZATION GAUGE SH2/ST2/SH200/ST200 The support model of SH2 becomes manufacturing numbers after 01000 If manufacturing number of SH2 is before 01000, this unit may not output setpoints. We recommended a connection with the analog output type When connecting to the serial communication type SH2-2/ST2-2/SH200- R/ST200-R, FIL ON, etc., cannot be performed with the sensor.

  • Page 58: Setting Operation

    13.3. Setting Operation 13.3.1. Setting overview The following settings are available for turning on the filament or degassing and for changing over the filament1/2. Setting Overview RS-485 communication mode Only RS-485 communication is available Front panel operation mode Only front panel operation is available External I/O operation mode Only external I/O operation is available 13.3.2.

  • Page 59: Operation Setting Method

    13.3.3.4. Operation setting method Press the program key to change over the set mode. Each press on the program key changes over the display as follows. If filament is on (local or remote), this unit cannot do filament setting, degas Setting, and filament1/2 setting. Filament off: Display“FiF”...

  • Page 60: Connection With The Sensor Unit

    13.4. Connection with The Sensor Unit The table below gives the pin assignment in connecting to the sensor unit. In connecting to the sensor unit, it is recommended to connect all pins below. * Connector for connection “SENSOR”: D-sub 15pin connector male, M2.6mm screw * Connector for connection “SH2/ST2/SH200/ST200”: D-sub 15pin connector female, M2.6mm screw “SENSOR”...

  • Page 61: Various Signals

    13.6. Various Signals 13.6.1. Output voltage The output voltage is output with + [8pin] of the I/O connector → GND [15pin] P = 10 ^ { ( V - 7.25 ) / 0.75 + k } × ←→ V = 7.25 + 0.75 × ( log ( P / C – k ) P: Pressure value V: Measurement value output voltage (V) C: Calculation value (Refer to section 18)

  • Page 62: Filament1/2 Changeover Signal

    13.6.4. Filament1/2 changeover signal Filament1/2 materials M-44/M-45/M-46: Both filament1 and filament2 are yttria-coated iridium wire. M-34/M-35/M-36: Filament1 is a yttria-coated iridium wire. Filament2 is a tungsten wire. Setting only filament1, if you used ST2/ST200 ST2/ST200 has only one filament. Setting only filament1. Signal that changes over filament1/2.

  • Page 63: Multi-Ionization Gauge Sh2/St2/Sh200/St200 (Spu Combination Mode)

    14. MULTI-IONIZATION GAUGE SH2/ST2/SH200/ST200 (SPU COMBINATION MODE) The support model of SH2 becomes manufacturing numbers after 01000 If manufacturing number of SH2 is before 01000, this unit may not output setpoints. We recommended a connection with the standard type When connecting to the serial communication type SH2-2/ST2-2/SH200- R/ST200-R, FIL ON, etc., cannot be performed with the sensor.

  • Page 64: Setting Operation

    14.3. Setting Operation 14.3.1. Setting Overview The following settings are available for turning on the filament or degassing and for changing over the filament1/2. Setting Overview RS-485 communication mode Only RS-485 communication is available. Front panel operation mode Only front panel operation is available. External I/O operation mode Only external I/O operation is available 14.3.2.

  • Page 65: Operation Setting Method

    14.3.3.4. Operation setting method Press the program key to change over the set mode. Each press on the program key changes over the display as follows. If filament is on (local or remote), this unit cannot do filament setting, degas setting, and filament1/2 setting. Filament off: Display“FiF”...

  • Page 66: Connection With The Sensor Unit

    14.4. Connection with the Sensor Unit The table below gives the pin assignment in connecting to the sensor unit. In connecting to the sensor unit, it is recommended to connect all pins below. * Connector for connection “SENSOR”: D-sub 15pin connector male, M2.6mm screw * Connector for connection “SH2/ST2/SH200/ST200”: D-sub15 pin connector female, M2.6mm screw “SENSOR”...

  • Page 67: Various Signals

    14.6. Various Signals 14.6.1. Output voltage The output voltage is output with + [8pin] of the I/O connector → GND [15pin] P = 10 ^ { ( V - 7.25 ) / 0.75 + k } × ←→ V = 7.25 + 0.75 × ( log ( P / C ) - k ) P: Pressure value V: Measurement value output voltage (V) C: Calculation value (Refer to section 18)

  • Page 68: Degas On Signal

    14.6.3. Degas on signal Signal that turns on degassing. To turn it on, connect it to GND with the external switch. In the case of front panel operation or RS-485 communication setting, input of this signal will be invalid. 14.6.4. Filament1/2 changeover signal Filament1/2 materials M-44/M-45/M-46: Both filament1 and filament2 are yttria-coated iridium wire.

  • Page 69: Multi Ionization Gauge Sh2/St2/Sh200/St200 (Sau Triple Combination Mode)

    15. Multi Ionization Gauge SH2/ST2/SH200/ST200 (SAU combination mode) The support model of SH2 becomes manufacturing numbers after 01000 If manufacturing number of SH2 is before 01000, this unit may not output setpoints. We recommended a connection with the analog output type When connecting to the serial communication type SH2-2/ST2-2/SH200- R/ST200-R, FIL ON, etc.

  • Page 70: Description Of Front Panel Keys

    15.2.2. Description of front panel keys Inscription Function Remarks PROG Enters into program mode Refer to section 5 and this section ZERO Not used Degassing ON/OFF Cannot be operated when RS485 and external I/O are set operation Filament off operation Cannot be operated when RS485 and external I/O are set 15.3.

  • Page 71: Operation Setting Method

    15.3.4. Operation setting method Press the program key to change over the set mode. Each press on the program key changes over the display as follows. If filament is on (local or remote), this unit cannot do filament setting, degas Setting, and filament1/2 setting. Filament off: Display“FiF”...

  • Page 72: Connection With The Sensor Unit

    15.4. Connection with The Sensor Unit The table below gives the pin assignment in connecting to the sensor unit. In connecting to the sensor unit, it is recommended to connect all pins below. * Connector for connection “SENSOR”: D-sub 15pin connector male, M2.6mm screw * Connector for connection “SH2/ST2/SH200/ST200”: D-sub 15pin connector female, M2.6mm screw “SENSOR”...

  • Page 73: Various Signals

    15.6. Various Signals 15.6.1. Output voltage The output voltage is output with + [8pin] of the I/O connector → GND [15pin] P = 10 ^ { ( V - 7.25 ) / 0.75 + k } × ←→ V = 7.25 + 0.75 × ( log ( P / C - k ) P: Pressure value V: Measurement value output voltage (V) C: Calculation value (Refer to section18)

  • Page 74: Filament Off Signal

    15.6.2. Filament off signal Signal that turns off the filament. To turn off the filament, connect it to GND with the external switch. In the case of front panel operation or RS-485 communication setting, input of this signal will be invalid. 15.6.3.

  • Page 75: Multi Ionization Gauge Sh2/St2/Sh200/St200 (Swu Combination Mode)

    16. MULTI IONIZATION GAUGE SH2/ST2/SH200/ST200 (SWU COMBINATION MODE) The support model of SH2 becomes manufacturing numbers after 01000 If manufacturing number of SH2 is before 01000, this unit may not output setpoints. We recommended a connection with the analog output type When connecting to the serial communication type SH2-2/ST2-2/SH200- R/ST200-R, FIL ON, etc.

  • Page 76: Setting Operation

    16.3. Setting Operation 16.3.1. Setting overview The following settings are available for turning on the filament or degassing and for changing over the filament1/2. Setting Overview RS-485 communication mode Only RS-485 communication is available Front panel operation mode Only front panel operation is available External I/O operation mode Only external I/O operation is available 16.3.2.

  • Page 77: Operation Setting Method

    16.3.4. Operation setting method Press the program key to change over the set mode. Each press on the program key changes over the display as follows. If filament is on (local or remote), this unit cannot do filament setting, degas setting, and filament1/2 setting. Filament off: Display“FiF”...

  • Page 78: Connection With The Sensor Unit

    16.4. Connection with The Sensor Unit The table below gives the pin assignment in connecting to the sensor unit. In connecting to the sensor unit, it is recommended to connect all pins below. * Connector for connection “SENSOR”: D-sub 15pin connector male, M2.6mm screw * Connector for connection “SH2/ST2/SH200/ST200”: D-sub15pin connector female, M2.6mm screw “SENSOR”...

  • Page 79: Various Signals

    16.6. Various Signals 16.6.1. Output voltage The output voltage is output with + [8pin] of the I/O connector → GND [15pin] P = 10 ^ { ( V - 7.25 ) / 0.75 + k } × ←→ V = 7.25 + 0.75 × ( log ( P / C ) - k ) P: Pressure value V: Measurement value output voltage (V) C: Calculation value (Refer to section 18)

  • Page 80: Filament Off Signal

    16.6.2. Filament off signal Signal that turns off the filament. To turn off the filament, connect it to GND with the external switch. In the case of front panel operation or RS-485 communication setting, input of this signal will be invalid. 16.6.3.

  • Page 81: Ccm Series Ceramic Capasitance Manometer

    17. CCM SERIES CERAMIC CAPASITANCE MANOMETER This section describes the operation of the CCMT-A series, CCMT-D series and CCMH-A series ceramic capacitance manometers. Before reading this section, read the standard operating procedure in the preceding sections. 17.1. Sensor Unit Setting Turn on the power to this unit and make sure that the following display lights for several seconds.

  • Page 82: Setting Method

    17.3.3. Setting method Press the PROG key to change over the setting mode. Each press on the program key changes the display as follows. Pressure display PROG ST1 setting: ST1 LED blinks Change the setting PROG ST2 setting: ST2 LED blinks Change the setting PROG ST3 setting: ST3 LED blinks...

  • Page 83: Connection To Sensor Unit

    17.4. Connection to Sensor Unit The table below gives pin assignment in the connection with the sensor unit. It is recommended to connect all of the following pins in connecting to the sensor unit. * Connector for connection “SENSOR”: D-sub 15pin connector male, M2.6mm screw * Connector for connection “CCM”: D-sub 15pin connector female, M2.6mm screw “SENSOR”...

  • Page 84: Setpoint

    0.01 0.001 0.0001 0.001% 0.010% 0.100% 1.000% 10.000% 100.000% Pressure(Full scale %) 　(K×133.33) 17.6.2. Setpoint Refer to section 7 for how to adjust and use the setpoint. Photocoupler rating: 30V , 50mA , 70mW 17.6.3. RS-485 communication Refer to section 22 for RS-485 communication. 17.7.

  • Page 85: Calculating Function

    18. CALCULATING FUNCTION Display of 10 , 10 is “A (A of capital letter)”, 10 is “b (B of small letter)”. Please note “b (B of small letter)” to make a mistake as '6' of the figure. CALCULATION function （Hereafter, it abbreviates to CAL） powers desired value (from 1.0×10 ～1.0×10 ) to the measured pressure value, and reflect to the display unit.

  • Page 86: Specific Sensitivity Value Of Gas In Hot Cathode Ionization Gauge

    Pressure display, etc PROG CAL(CALUCULATION) setting determine PROG Blinks: The one places of decimals of mantissa Change: The value of one places of decimals Blinks: Exponential part Change: The value of exponential part determine Blinks: Integer value Of mantissa Change: The value of integer Blinks: The one places of decimals of mantissa Setting sensor, etc 18.4.

  • Page 87: Interlock Function

    19. INTERLOCK FUNCTION This function locks the front panel button controls, under certain condition. 19.1. Interlock Setting Interlock setting can only be changed from the front panel control. Method Operation Setting PROG , set the interlock “In” to “o” Hit any key on the front panel while displaying the pressure value so that Unlocking the numbers start blinking.

  • Page 88: Measurement Units Function

    20. MEASUREMENT UNITS FUNCTION 20.1. Measurement Units Setting Measurement unis setting can only be changed from the front panel control. method Operation PROG , set the measurement units “un” to “P”, “t” or “b” Setting Display Detail “P” “t” Torr “b”...

  • Page 89: Measurement Display Range Setting

    21. MEASUREMENT DISPLAY RANGE SETTING The pressure measurement display setting is the function which sets the range which measurement of the pressure. Indication lower than the lower limit which isn't indicated beyond the upper limit value isn't done. 21.1. Measurement display Range rA Setting Pressure display,etc PROG ST1 setting: ST1 LED blinks...
  • Page 90 『　　　』、『　　　』 setting Blinks determine Blinks: The one places of decimals of mantissa Change: The value of one places of decimals Blinks: Exponential part Blinks 『DEG』 determine Change: The value of exponential part Blinks: Integer value Of mantissa Change: The value of integer Blinks: The one places of decimals of mantissa Blinks determine...

  • Page 91: Communication Specifications

    22. RS-485 Caution in laying cables When laying transmission lines for communication in the unit, see to it that they are not in the proximity of, or parallel to, the power line, high voltage line, high frequency line, etc. Failure to comply with this caution can cause malfunction.

  • Page 92: Setting The Checksum Collating Function

    22.2.4. Setting the checksum collating function Checksum collating function checks if all the data sent and received have been acquired. Display Detail “o” Checksum is collated. “F” Checksum is not collated. [Checksum off] This instrument receives the checksum value of the data on the host side, but does not collate it with command data.

  • Page 93: Setting Method

    22.2.6. Setting method Press the PROG key to change over the setting mode. Each press on the program key changes the display as follows. Pressure display,etc PROG ST1 setting: ST1 LED blinks Change the setting PROG ST2 setting: ST2 LED blinks Change the setting PROG ST3 setting: ST3 LED blinks...
  • Page 94 “L2” setting Baud rate setting “br” determine Each baud rate blinks Select baud rate determine Checksum setting: “CS” determine “F” or “o” blinks Select“F” or “o” determine Address setting: “Ad” determine Display current address Change address determine Setting terminator: “Tr” determine “F”...

  • Page 95: Standard Data Format

    22.3. Standard Data Format The table below gives the standard data sending/receiving format. ･･････ CHKH CHKL Colon Device address high order (0 - 9) Device address low order (0 - 9) Various commands (note uppercase character/lowercase character) Data Data High order of status Low order of status CHKH High order of checksum (0 - 9, A - F)

  • Page 96: Command

    22.4. Command 22.4.1. Reading the measurement value/status Command CHKH CHKL Format of returning from this instrument to PC ± CHKH CHKL * The measured pressure value is entered in the “X.XXE±XX” section. Example 1: 3.00E+03 ⇒ 3.00×10 Example 2: 5.00E+00 ⇒ 5.00×10 Example 3: 4.00E-01 ⇒...

  • Page 97: Reading The Setpoint3 Value

    22.4.7. Reading the setpoint3 value Command CHKH CHKL Format of returning from this instrument to PC ± CHKH CHKL * “±” denotes “+” or “-“. 22.4.8. Writing the setpoint1 set value Command ± CHKH CHKL * A numeric value that can be set varies with each sensor. If a value lower than the lower limit set value of each sensor is set, it will be set at the lower limit value of setting or, if a value higher than the higher limit set value, it will be set at the higher limit value of setting.

  • Page 98: Ccm Zero Point Adjustment Command

    22.4.14. CCM zero point adjustment command Command CHKH CHKL * The adjustable pressure range is about ±20mV. * Arithmetically processed in this instrument. * If a command is normally received, normal receipt ‘o’ will be returned though adjustment is not made. Read the measurement value and others after adjustment and check them. 22.4.15.

  • Page 99: Status Setting List

    22.6. Status Setting List 22.6.1. When writing Only BMR2, SC1, SH2, ST2, SH200, ST200 SH (high order Status) 0〔30H〕 8〔38H〕 C〔43H〕 4〔34H〕 D〔44H〕 5〔35H〕 FIL-2/1 FIL-ON/OFF N･C DEGAS-ON/OFF FIL-2/1 1: FIL1 0: FIL2 「Sn1」「SC1」：FIL(HV) ON/OFF 1: ON 0: OFF 「Sh2」「SPU」「SAU」：FIL OFF/ON 1: OFF 0: ON DEGAS-ON/OFF...

  • Page 100: When Reading

    22.6.2. When reading SH (high order Status) * CCM: This SH is all “0” = plus This SH is all “F”:= minus (display by blinking) 0〔30H〕 4〔34H〕 6〔36H〕 5〔35H〕 7〔37H〕 FIL-2/1 FIL-ON/OFF Em.Valid DEGAS-ON/OFF 8〔38H〕 C〔43H〕 E〔45H〕 D〔44H〕 F〔46H〕 FIL-2/1 FIL-ON/OFF Em.Valid DEGAS-ON/OFF...

  • Page 101: Ascii Code Table

    22.7. ASCII Code Table ASII ASII ASII ASII (nul) (sp) ‘ (soh) (stx) “ (etx) (eot) (enq) (ack) & (bel) ‘ (bs) (tab) (lf) (vt) (ff) (cr) (so) (si) (dle) (dc1) (dc2) (dc3) (dc4) (nak) (syn) (etb) (can) (em) (sub) (esc) (fs) <...

  • Page 102: Troubleshooting

    Corrective measures against noise should be taken otherwise. Internal fuse has blown out. Check and/or repair at ULVAC are necessary. Failure of display unit indicating circuit. Check and/or repair at ULVAC are necessary. Failure in the display unit circuit.
  • Page 103 → Refer to the sensor unit manual. Failure of the internal circuit in the display Check and/or repair at ULVAC is necessary. unit. (The sensor unit itself operates normally.) The actual pressure differs from the expected Check pressure using another vacuum gauge.

  • Page 104: Warranty

    Response procedure 1) Domestic business in Japan: ULVAC send a replacement or Buyer return the defective items to ULVAC, Inc. or to the local ULVAC representatives for repair.

  • Page 105: China Rohs Declaration

    25. China RoHS Declaration This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the cautions for safe use regarding the products are observed.

  • Page 106: Ec Declaration Of Conformity

    26. EC DECLARATION OF CONFORMITY...

  • Page 107: Certificate Of Decontamination

    27. Certificate of Decontamination...

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