Panel Section Sh200-A/R - Ulvac G-TRAN Series Instruction Manual

4.2.

Panel section SH200-A/R

Name
① I/O connector
② USB connector
③ SWU/SPU connector
④ SAU connector
⑤ POWER LED
⑥ SPU/SWU LED
⑦ SAU LED
Fig. 4-2 SH200-A/R diagram of the panel section
I/O connector for power supply and various data signals
(D-sub15 pin(male), M2.6 screw)
Connector to connect with PC or smartphone (setpoint setting)
(USB type-C)
Connector to connect with pirani gauge detection unit SWU or SPU (MINI I/O
plug)
Connector to connect with the pressure sensor unit SAU (MINI I/O plug)
Filament on, error indication
Light on : Normal
Blinking : Error such as filament disconnection of pirani gauge
Light off: Not connected, power off
Light on : Normal
Blinking : Error such as SAU failure, or when adjusting pressure
Light off: Not connected, power off
13
Function