Sh200+Spu Measured Value Output - Ulvac G-TRAN Series Instruction Manual

9.4.

SH200+SPU measured value output

The measured value output in several statuses that can occur during a measurement is
shown in Table 9-3 below.
Operating status
Normal measurement
+4
1×10 Pa or higher
SH200 Filament turned off forcibly
SH200 error
(such as filament disconnection)
SPU error
(such as filament disconnection)
Power supply voltage error, controller
failure
1.0E+04
1.0E+03
1.0E+02
1.0E+01
1.0E+00
1.0E-01
1.0E-02
1.0E-03
1.0E-04
1.0E-05
1.0E-06
1.0E-07
1.0E-08
0 1
※ SH200 outputs errors even when SPU has errors.
However, SH200 error clears when filament turns off.
Table 9-3 Measured value output status
Voltage corresponding to the measurement
pressure: 0.27V to 8.75V
8.75V
Measurable pressure range of SPU: 5V to 8.75V
Measurable pressure range of SPU: 5V to 8.75V
9.9V or higher
0.1V or lower
2 3 4
OUTPUT VOLTAGE (V)
25
Measured value output voltage
B-A GAUGE FIL OFF
5 6 7 8 9 10