Sau Combination Mode Only; Status Of Each Led; Power Led Status （ Common For Sh200; A/R - Ulvac G-TRAN Series Instruction Manual

7.

Status of each LED

7.1. POWER LED status（common for SH200-A/R）
The status of POWER LED is shown in the table below.
LED
White
Blue
Green
Red
7.2. SWU/SPU LED status（common for SH200-A/R）
The status of SWU/SPU LED is shown in the table below.
LED
ON
Blinking
OFF
7.3. SAU LED status（common for SH200-A/R）
The status of SAU LED is shown in the table below.
LED
ON
Blinking
OFF
7.4. POWER LED blinking status（SH200-A only）
The blinking status of POWER LED is shown in the table below.
LED
Blinking red
(every 3 seconds)
Blinking red
(every 1 second)
Blinking green
(every 0.5
seconds)
Status
Start up
Power on, SH200 filament is
off
SH200 filament is on
SWU/SPU main unit, cable,
sensor failure
SAU main unit, cable failure
Status
Normal operation
SWU or SPU main unit, cable
failure.
Errors such as filament
disconnection
Mode is not set.
SWU or SPU is not connected.
Status
Normal operation
SAU or main unit, cable
failure
The pressure is adjusting,
pressure adjustment error
Mode is not set
Status
Pressure protection
Filament disconnection,
abnormal emission current
Near the end of the filament
life
19
Note
In the combination mode,
LED is blue when the
pressure reaches the pirani
gauge measurement area.
In the combination mode,
SWU/SPU LED blinks.
In the combination mode,
SAU LED blinks.
Note
Check the LED of SWU or SPU
main unit.
See chapter 6.
Note
See chapter 6.
See chapter 6.
Note
Error at 10Pa or higher
SH200 stand-alone mode only
Filament disconnection or
the emission current is
below the specified value.
Filament power is above the
specified value.