Setpoint Operation Signal; Only ); (Sh200-Aonly ); Emission Valid Signal - Ulvac G-TRAN Series Instruction Manual

10.4. Setpoint operation signal (SH200-A only)
The setpoint is a function that outputs a signal to the outside when the pressure drops
below the set pressure. The set pressure value is called the "Setpoint." When the
measured pressure value drops below the setpoint, this signal is Lo output.
Refer to chapter 11 for details on how to set the setpoint.
10.5. Emission valid signal and connection check signal (SH200-A only)
When this signal turns off (Hi) while this unit is measuring pressure, it indicates
that the unit cannot measure pressure accurately. This unit outputs the pressure as a
reference value but does not activate the setpoint.
Emission valid signal (SH200-A only)
The emission valid signal is a function that outputs a signal on (Lo) when the SH200
emission current is within the specified range.
When this signal turns off (Hi), the emission current is beyond the specified range,
and SH200 cannot measure the pressure accurately. The cause may be the wear of the
filament (the end of filament life is approaching) or the contamination. Please
replace the sensor.
Connection check signal (SH200-A only)
The connection check signal confirms the connection of SWU, SAU, and SPU. If SWU,
SAU, or SPU is not connected in the combination mode, this signal turns Hi, and the
error signal outputs Lo.

Differences between mode setting (SH200-A only)

This signal outputs differently depending on the mode setting.
In mode setting 2, monitoring this signal enables the detection of abnormal emission
current easily.
Mode setting
2(stand-alone)
3(old output mode)
2(combination)
※ When SWU, SPU, or SAU has an error, this signal is off (Hi), and the error signal
is also off (Hi).

Filament power monitoring signal (SH200-A only)

Function outputs an on (Lo) signal when the power supplied to the filament of the ion
gauge exceeds the specified range. This is an indication that the product life is
approaching due to the wear of the filament.
See chapter12 for details.
SH200
Normal
emission current emission current
on(Lo) off(Hi)
on(Lo) off(Hi)
31
SWU/SPU/SAU
Abnormal
off(Hi)
on(Lo)
Normal
※