Sensor Error Signal (Sh200-Aonly ); Sh200 Stand-Alone Mode; Swu Combination Mode; Spu Combination Mode - Ulvac G-TRAN Series Instruction Manual

10.3. Sensor error signal (SH200-A only)
SH200-A outputs sensor error signal when each sensor has errors.
When a sensor error occurs, the signal is Lo output, and the POWER LED lights up red,
and the pressure signal output is 9.9V or higher.

SH200 stand-alone mode

Error
SH200-A/R
Internal voltage error
Grid voltage error
Filament disconnection
error
Pressure protection

SWU combination mode

Error
SH200-A/R
Internal voltage error
Grid voltage error
Filament disconnection
error
SWU power supply error
Unit cable error
Filament disconnection
of pirani gauge

SPU combination mode

Error
SH200-A/R
Internal voltage error
Grid voltage error
Filament disconnection
error
SPU power supply error
Unit cable error
Filament disconnection
of pirani gauge

SAU combination mode

Error
SH200-A/R
Internal voltage error
Grid voltage error
Filament disconnection
error
SWU/SPU power supply
error
Unit cable error
Filament disconnection
of pirani gauge
SAU power failure
Unit cable error
POWER LED LED Status
Red lights on All LEDs off
Red blinks
All LEDs off
for 1 second
Red blinks
All LEDs off
for 3 seconds
POWER LED LED Status
Red lights on All LEDs off
Red blinks SPU/SWU LED
for 1 second on
SPU/SWU LED
Red lights on
blinks
POWER LED LED Status
Red lights on All LEDs off
Red blinks SPU/SWU LED
for 1 second on
SPU/SWU LED
Red lights on
blinks
POWER LED LED Status
Red lights on All LEDs off
Red blinks
All LEDs on
for 1 second
SPU/SWU LED
Red lights on
blinks
SAU LED
Red lights on
blinks
30
I/O
Output 9.9V or
No.2: Lo output
higher
Errors clear when
No.2: Lo output
filament turns
No.4: Hi output
off.
Output 9.9V or
No.2: Lo output
No.4: Hi output higher
I/O
Output 9.9V or
No.2: Lo output
higher
No.2: Lo output
Output SWU pressure
No.4: Hi output
No.2: Lo output Output 9.9V or
No.4: Hi output higher
I/O
Output 9.9V or
No.2: Lo output
higher
No.2: Lo output
Output SPU pressure
No.4: Hi output
No.2: Lo output Output 9.9V or
No.4: Hi output higher
I/O
Output 9.9V or
No.2: Lo output
higher
No.2: Lo output Output SWU/SPU or
No.4: Hi output SAU pressure
No.2: Lo output
Output SAU pressure
No.4: Hi output
No.2: Lo output Output 9.9V or
No.4: Hi output higher
Note
Note
Note
Note