When Reading Status - Ulvac G-TRAN Series Instruction Manual

When reading status

Filament ON/OFF signal
*Note*
The use of the SH200 filament ON/OFF signal differs between the
SH200 stand-alone mode and the combination mode.
The output of the Em.Valid OK signal varies depending on the mode
setting.
*Note*
The output of the Em.Valid OK signal varies depending on the mode
setting. Refer to Section 10.5.3 for details.
SH(Status/high bit)
bit Status
B7 FIL 1/2
B6 FIL ON/OFF
B5 Em.Valid OK
B4 DEGAS ON/OFF
bit Status
B7 FIL 1/2
B6 FIL ON/OFF
B5 Em.Valid OK
B4 DEGAS ON/OFF
FIL 1/2
※SH200 stand-alone mode FIL ON/OFF
※Combination mode FIL OFF/ON
Em.Valid OK
DEGAS ON/OFF
SL(Status/low bit)
bit Status
B3 ERROR
B2 N･C
B1 SETPOINT2
B0 SETPOINT1
ERROR
SETPOINT2
SETPOINT1
※When an error occurs, check the error content using the command.
0 4
〔30H〕 〔34H〕 〔36H〕
0 0
0 1
0 0
0 0
8 C
〔38H〕 〔43H〕 〔45H〕
1 1
0 1
0 0
0 0
C
〔43H〕 〔34H〕
1
1
0
0
1:ERROR 0:OK
1:ON 0:OFF
1:ON 0:OFF
45
6 5 7
〔35H〕 〔37H〕
0 0 0
1 1 1
1 0 1
0 1 1
E D F
〔44H〕 〔46H〕
1 1 1
1 1 1
1 0 1
0 1 1
1:FIL1 0:FIL2
1:ON 0:OFF
1:OFF 0:ON
1:OK 0:NG
1:ON 0:OFF
4 6 5
〔36H〕 〔35H〕
0 0 0
1 1 1
0 1 0
0 0 1