Fil On/Off Signal; Fil 1/2 Signal - Ulvac G-TRAN Series Instruction Manual

8.2.

FIL ON/OFF signal

FIL ON/OFF signal
*Note*
How to use SH200 FIL ON/OFF signal differs between the SH200 stand-
alone mode and the combination mode.
Pressure when the filament is on
*Note*
Please note that if SH200 filament turns on under high pressure, the
filament will break.
Gas introduction after the filament turns off
Introduce gas more than 5 seconds after the filament turns off. The
*Note*
filament is still hot within 5 seconds after it turns off, so
introducing gas within 5 seconds may damage the filament and shorten
its life.
SH200-A can turn on and off the SH200 filament by short-circuiting the terminals to
GND.
Mode
SH200 stand-alone
Combination
※ Use forced FIL OFF when returning SH200 to atmospheric pressure while filament
is on, when turning off the filament during a process, or when not turning on
the filament automatically.
SH200-R uses serial communication to control. See chapter 15 for details.
8.3.

FIL 1/2 signal

*Note*
Precautions for gases used
Both filaments 1 and 2 are Ir/Y
active gases such as halogens and halogen-based gases, problems such
M-44 as filament disconnection and changes in pressure characteristics may
M-45 occur.
M-46 If operating this unit in such an environment, install an isolation
valve between this unit and the vacuum chamber to protect it from
exposure to these gases.
Filament 1 is Ir/Y
such as halogens and halogen-based gases, problems such as filament
disconnection and changes in pressure characteristics may occur.
M-34 Filament 2 is made of tungsten. In an atmosphere containing a lot of
M-35 oxygen, the life of the filament may be shortened due to burnout
M-36 (approx. 3 hours at 1Pa air introduction).
If operating this unit in such an environment, install an isolation
valve between this unit and the vacuum chamber to protect it from
exposure to these gases.
SH200-A can switch to filament 2 by short-circuiting the terminals to GND.
SH200-R uses serial communication to control. See chapter 15 for details.
The filaments do not switch even if this signal is input while the filament is on.
Lo (GND is short-
circuited)
FIL ON
※
forced FIL OFF
O coated. If exposed to chemically active gases
2 3
21
Hi (GND is open)
FIL OFF
Automatic FIL ON/OFF
(Combination with pirani gauge)
O coated. If exposed to chemically
2 3