Operation; Troubleshooting; Figure 5-1 Cryo Meter Mbd Display - Ulvac MBD Series Instruction Manual

MBD CRYO-METER Instruction Manual
5.

Operation

Operation
Turn on the power Turn on the power
Turn on the input power of the MBD. If there is any sign of abnormal behavior and/or Turn on the input power of the MBD. If there is any sign of abnormal behavior and/or
hazard of the MBD, cut off the branch circuit power for MBD immediately. Then check the hazard of the MBD, cut off the branch circuit power for MBD immediately. Then check the
wiring referring to "6. Troubleshooting" in this instruction manual. wiring referring to "6. Troubleshooting" in this instruction manual.
After turning on the power, ensure that the POWER lamp on the display panel lights on. After turning on the power, ensure that the POWER lamp on the display panel lights on.
Temperature monitoring Temperature monitoring
MBD displays the second stage temperature of cryopump with numeric numbers so that the MBD displays the second stage temperature of cryopump with numeric numbers so that the
temperature can be checked with eyes easily. temperature can be checked with eyes easily.
The second stage temperature
of cryopump
6. 6.

Troubleshooting

Troubleshooting
Preventive maintenance and inspection Preventive maintenance and inspection
Following points should be ensured at periodic inspections. Following points should be ensured at periodic inspections.
No damage on the housing and/or the cables. No damage on the housing and/or the cables.
No stress or force on the cables. No stress or force on the cables.
All plugs of the cables are tightened. All plugs of the cables are tightened.
If any problem is found at an inspection, follow the troubleshooting procedures in the If any problem is found at an inspection, follow the troubleshooting procedures in the
troubleshooting lists on page 13 and 14 or contact our customer support. troubleshooting lists on page 13 and 14 or contact our customer support.
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Figure 5-1 Figure 5-1
CRYO METER MBD Display CRYO METER MBD Display
ULVAC CRYOGENICS INCORPORATED
POWER lamp