Degas On/Off Signal - Ulvac G-TRAN Series Instruction Manual

8.4.

DEGAS ON/OFF signal

Pressure during DEGAS
The DEGAS of This unit uses the electron bombardment method. If
performing DEGAS at a pressure higher than about 0.1 Pa, an electrical
discharge may occur inside this unit, damaging the internal
*Note*
electrodes, such as the filament. Also, the electrical discharge may
spread to the system side and damage the equipment.
Although SH200 will stop DEGAS for protection when the pressure
exceeds 1.0×10
SH200-A can turn on DEGAS by short-circuiting the terminals to GND.
SH200-R uses serial communication to control. See chapter 15 for details.
When the pressure measured by SH200-A during DEGAS exceeds 1.0×10
off DEGAS automatically, and when the pressure decreases at 1.0×10
SH200-A turns on DEGAS automatically.
If there is no emission gas from SH200, the pressure indication value of SH200-A
during DEGAS is about 1/2 of the actual pressure.
-3
Pa, do not increase the pressure rapidly.
22
-3
Pa, SH200 turns
-3
Pa or lower again,