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No.SK00-9656-EI-003-11 G-TRAN Series Multi-Ionization gauge Sensor Unit Standard Type Model SH2-1 Serial Communications Type Model SH2-2 Instruction Manual (OPTION) (OPTION) (OPTION) This manual is for this unit units of the following serial numbers: SH2-1: S/N 06001 and higher. SH2-2: S/N 03001 and higher.
The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc.
Safety Precautions In order to safely use the G-TRAN Series sensor unit (below, "this unit"), please read the instruction manual and the safety precautions below. Repair Request repairs for this unit from the dealer where purchased, from ULVAC Inc., or from the URL listed in this instruction manual.
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Gas type dependency The pressure value and accuracy for this unit and SPU differ by the type of gas measured. The accuracy for this unit is based on measuring nitrogen gas. Be careful when using gases other than nitrogen. Power off When replacing the gauge head, always turn off the power supply.
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Disposal When disposing of this unit, please follow all local laws and regulations. In particular, if the gauge head was used in an atmosphere that can cause harm to the human body, dispose of it through specialized waste handler. Customers are responsible for expenses related to disposal. Setting of set point Output of set point and pressure signal comes from same terminal.
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The electrical circuitry inside this unit uses aluminum electrolytic capacitors. In general, aluminum electrolytic capacitors possess an operating ✔ Note life and that operating life decreases the more the ambient temperature increases. To prevent damage to the device, we recommend maintenance at ULVAC about once every three years.
Revision History DATE Description Mar. 9, 2012 version ・Section 13.1. Adjustment of atmospheric pressure: Corrected to pressing of Aug. 2, 2012 ADJ button ・Section 14.2.1.1. RS-232C wiring diagram Wrong) SENSOR GND 11 - 7 Host GND Correct) SENSOR GND 14 - 5 Host GND ・Safety Precautions: Jan.
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Jul. 8, 2014 Correction of errors ・Section 8.3. FIL 1/2 signal: Added the necessity to turn off the filament when Apr. 15, 2015 changing filament 1/2 May. 20, 2016 ・ Safety Precautions: Added the Note when using in a flammable gas atmosphere ・Section 2.1.
Contents Prior to Use ......................I Safety Symbols ......................I Safety Precautions ....................II Revision History ....................VI Contents ......................VIII 7.2. SPU LED STATE INDICATORS INTRODUCTION ..... 1 (SH2-1/SH2-2) ......19 ..1 7.3. SAU LED 1.1. G-TRAN S STATE INDICATORS ERIES OVERVIEW (SH2-1/SH2-2) ......
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...... 41 CONFIGURING THE SETPOINTS 15.5. HECKSUMS (SH2-1 ONLY) ......32 ....42 15.6. TATUS SETTINGS LIST When writing the status ..42 15.6.1..32 11.1. ETPOINT SETTING PRESSURE When reading ....43 15.6.2....32 ETPOINT SETTING PRESSURE ....
1.1. G-TRAN Series overview There are a number of units in the G-TRAN Series vacuum gauge and these are classified as shown below. "Sensor unit" in the text indicates all types and models of box units and sensor units. as of 2019...
Specifications The SH2-1/SH2-2 has the following modes: ① ② ③ ④ SH2 independent mode SPU Combination mode SAU Triple Combination Combination mode mode B-A gauge only Pirani vacuum pressure sensor Pirani vacuum gauge measuring unit gauge measuring unit (SAU) and the Pirani (SWU) and B-A gauge (SPU) and B-A gauge vacuum...
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FIL: B-A gauge filament status indicator SET1: Setpoint 1 LED SET2: Setpoint 2 LED SET3: Setpoint 3 LED Gauge head material Filament 1: Ir/Y -coated, Filament 2: Tungsten Others : PtC-Mo, SUS304, W, Kovar glass, Kovar/Ni plating Gauge head withstand B-A: 2x10 Pa (absolute pressure) pressure...
2.2. SPU combination mode key specifications Measurement pressure SPU : 5x10 Pa to 1x10 range When pressure falling: Automatically switches from Pirani vacuum gauge to B-A gauge at 2x10 Pa(SPU) When pressure rising: Automatically switches from B-A gauge to Pirani vacuum gauge at 3x10 Pa(SPU) * B-A gauge measurements can be forced off with the control signal...
2.4. SWU combination mode key specifications Measurement pressure 5x10 Pa to 1x10 range When pressure falling: Automatically switches from Pirani vacuum gauge to B-A gauge at 2x10 Pa(SWU) When pressure rising: Automatically switches from B-A gauge to Pirani vacuum gauge at 3x10 Pa(SWU) * B-A gauge measurements can be forced off with the control signal Accuracy...
Handling Precautions Please check this section prior to use. 3.1. Post-operation checks SAU pressure reading check Check the SAU atmospheric pressure immediately after use. Adjust the atmospheric pressure as necessary. Tolerance of SAU at altitude and atmospheric depression. The atmospheric and 0 point adjustment is required at the altitude of more than 500m around and at atmospheric depression lower than 950hPa.
In case of flammable gas using This unit and pirani gauge SPU heats filaments by electrification. ✔ Note Therefore it is recommended installing a valve between the sensor head and chamber to prevent the explosion by flammable gas and heated electrification.
3.4. Power supply Power supply voltage Before turning on the power supply, check that this unit operating voltage and the supply power are the same. If the wrong power supply is connected, there is a risk of damage to this unit and to devices connected to this unit and a risk of fire. Voltage supply to this unit If voltage supplied to this unit is less than DC20V, it does not show accurate pressure.
Part Names and Functions 4.1. Controller Figure 4-1 Mechanical section explanatory drawing Name Function Mating screws (M2.6 mm screws) for the I/O connector clamp hood. I/O connector (D-sub 15-pin male M2.6 mm screws) Blue on: Operating normally POWER/ERROR Red on : Error such as a filament break : Power off Gauge head locking Screws to lock the gauge head (M3 mm screws) 2 locations...
4.2. Panel - SH2-1 Standard Type Figure 4-2 SH2-1 Standard Type panel explanatory drawing Name (symbol) Function I/O connector for signals including the power supply and data. I/O connector (D-sub 15-pin male M2.6 mm screws) ADJ switch Adjustment switch when adjusting pressure for the SAU Selection switch for pressure measurements, setpoint configuration, and SELECT switch SAU pressure adjustments...
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4.3. Panel LEDs - SH2-1 Standard Type Figure 4-3 SH2-1 Standard Type panel LEDs explanatory drawing Name (symbol) Function : MODE 0/3/4 FIL OFF MODE 1/2 POWER OFF FIL LED 0.5 second flashing : Filament power monitor abnormality 1 second flashing : B-A gauge filament break, emission current abnormality 3 second flashing : Pressure protection (SH2 independent mode only) SET-1 LED When the setpoint1 do ON, the LED turns on.
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4.4. Panel - SH2-2 Serial Communications Type Figure 4-4 SH2-2 Serial Communications Type panel explanatory drawing Name (symbol) Function I/O connector for signals including the power supply and data I/O connector (D-sub 15-pin male M2.6 mm screws) bps switch Baud rate (communication speed) configuration switch MSD switch Communication address configuration switch, 10s place LSD switch...
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4.5. Panel LEDs - SH2-2 Serial Communications Type Figure 4-5 SH2-2 Serial Communications Type panel LEDs explanatory drawing Name (symbol) Function : Operating normally SPU LED Flashing: Error including Pirani vacuum gauge filament break : Mode not configured, power off : Operating normally SAU LED Flashing: Error such as SAU fault, or when adjusting pressure...
4.6. I/O connector - SH2-1 Standard Type Figure 4-6 SH2-1 Standard Type I/O connector pin assignment explanatory drawing (D-sub 15-pin male M2.6 mm screws) Terminal Sensor Function number Power supply Power supply to drive this unit (20to 28 VDC) Outputs the pressure protection signal or a Sensor error signal during an error such as when there is (Low output)
4.7. I/O connector - SH2-2 Serial Communications Type Figure 4-7 SH2-2 Serial Communications Type I/O connector pin assignment explanatory drawing (D-sub 15-pin male M2.6 mm screws) Terminal Sensor Function number Power supply Power supply to drive this unit (20 to 28 VDC) RS-232C RxD RS-232C RxD Terminal resistance for...
4.8. SPU I/O connector Figure 4-8 SPU I/O connector pin assignment diagram Terminal Sensor Function number Power supply +5 VDC Power supply to drive this unit (5 VDC) Sensor ground Power supply +5 VDC Power supply to drive this unit (5 VDC) Communication Sends pressure, etc.
4.9. SAU I/O connector Figure 4-9 SAU I/O connector pin assignment diagram Terminal Sensor Function number Power supply +15 VDC Power supply to drive this unit (15VC) Sensor ground Power supply +15 VDC Power supply to drive this unit (15VDC) Analog output Pressure signal voltage (0to 5 VDC)
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Power Supply Internal Circuitry This section describes the power supply input section. Power supply voltage Before turning on the power supply, check that this unit operating voltage and the supply power are the same. If the wrong power supply is connected, there is a risk of damage to this unit and to devices connected to this unit and a risk of fire.
Mode Configurations (SH2-1/SH2-2) Configure the mode prior to use. The default is mode “1”. Please refer to section 0 for the difference of mode setting 1 and 3, 2 and 4. The mode setting is related to the serial number of ISG1 Mode Comments SH2 independent mode...
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7.4. FIL LED state indicators (SH2-1 only) The FIL LED on states are shown in the table below. LED state Description Comments Filament operating normally Mode setting 0/3/4 Filament operating normally Mode setting 1/2 or SPU and SAU operating normally Filament off Mode setting 0/3/4 Flashing...
Control Input Signals This chapter describes the signals that are input to this unit. For the Standard Type, signals are input with an open collector. For the SH2-2 Serial Communications Type, signals are input with serial communications. 8.1. Control input signals (SH2-1 only) Contact capacity Use a capacity for externally installed contacts greater than the input power supply voltage or 30 VDC or higher.
8.3. FIL 1/2 signal Operating gas warning Filament 1 is yttria-coated iridium. If this unit is exposed to chemically active gases such halogen or halogenated gases, problems will occur such as filament breaks or pressure characteristics changing. Filament 2 is tungsten. In atmospheres with a large amount of oxygen, there is a risk of the operating life decreasing from the filament burning out.( The life of Air introduction 1Pa is approximately three hours.) When using this unit in these types of environments, install an isolation valve...
Analog Output (SH2-1/SH2-2) Setting of set point Output of set point and pressure signal comes from same terminal. It may cause misreading. When you change set point value while the system is running, please pay attention not to proceed in running mode. This unit outputs the measured pressure as a 0 to 10 VDC voltage signal.
9.3. SPU combination mode analog output The analog output that can occur in several states during measurements is shown in Table 9-2 Measurement value output states. Table 9-2 Measurement value output states Operating state Analog output voltage Voltage corresponding to the measured pressure During normal measurements 0.27 to 8.75 V 1x10...
9.4. SAU combination mode analog output The analog output that can occur in several states during measurements is shown in Table 9-3. Table 9-3 Analog output states Operating state Analog output voltage Voltage corresponding to the measured pressure During normal measurements 0.27 to 9.5 V Atmospheric pressure or higher 9.5 V or higher...
9.5. SWU combination mode analog output The analog output that can occur in several states during measurements is shown in Table 9-4. Table 9-4 Analog output states Operating state Analog output voltage Voltage corresponding to the measured pressure During normal measurements 0.27 to 9.5 V 1x10 Pa or higher...
9.7. BMR2 Compatible mode (MODE 9) 9.7.1. Pressure conversion equation Convert the analog output to pressure with the following equation. P = 10 × ( V – E ) × 10 ^ ( E – 8) P: Pressure V: Output voltage (V) E: Value of V from which decimal place is omitted (V) Calculated value of V-E can be less than 0.1 depending on the output accuracy of this product or the accuracy of the apparatus which reads in.
10. Control Output Signals This chapter describes signals output from the SH2. For the Standard Type, signals are output with an open collector. For the SH2-2 Serial Communications Type, signals are output with serial communications. 10.1. Control output signals (SH2-1 only) Sensor error and setpoint signals are output from this unit's I/O connector in open collector format.
10.3. Sensor error signal (SH2-1 only) Sensor errors are signals that are output when an error occurs on this units. When a sensor error occurs, the signal becomes low output. When a sensor error occurs, the POWER/ERROR LED turns red and the pressure signal output becomes 9.9 V or higher.
10.4. Setpoint operation signal (SH2-1 only) Set point signal When set point is set, external I/O output gets Lo/Hi (ON/OFF) linking flash of LED of each set point. The setpoint is a function that outputs an external signal and illuminates LEDs when the pressure falls below the configured pressure.
11. Configuring the Setpoints (SH2-1 only) Setting of set point Output of set point and pressure signal comes from same terminal. It may cause misreading. When you change set point value while the system is running, please pay attention not to proceed in running mode. Set point signal When set point is set, external I/O output gets Lo/Hi (ON/OFF) linking flash of LED of each set point.
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11.3. Configuring the setpoints Analog output becomes the setpoint adjustment voltage mode by pressing the "SELECT" button. The setpoint adjustment voltage changes between 0.27 and 9.5 V. Coarse adjustment: Push the <ADJ> button and keep it depressed, the setpoint value sweeps. Fine adjustment: Push the <ADJ>...
12. Filament Power Monitor Signal The filament power monitor signal is a function that outputs a signal as on (low) when the power supplied to the B-A gauge filament has exceed the specified value range. This is a guide that the filament is approaching the end of its operating life due to filament consumption.
14. Adjusting SWU Pressure You can take even more accurate measurements by adjusting the atmospheric pressure and zero pressure for the SWU. Before using a new SWU, or when you see a deviation reading, adjust this unit following procedure below. 14.1.
15. Using Serial Communications (SH2-2 only) Caution when laying down cables When laying down a communications transmission line to the equipment, do not wire it in proximity or parallel to electrical lines, power lines, high voltage lines, or high frequency lines. There is a risk of malfunction. Remote host noise resistance Use highly noise resistant insulated-type PC and PLC (programmable logic controller) remote hosts.
15.2.1.3. RS-485 with terminal resistance (example) For RS-485 wiring, the diagram below describes the National Instruments USB Serial Interface USB-485 as an example. When there are many RS-485 connections, when the total length of the connection cables is over 15 m, or when there are frequent communications errors, attach a terminal resistor to the terminal device.
15.3. Basic data format The basic data format for sending and receiving data is described below..CHKH CHKL Colon Device address, upper (0 to 9) Device address, lower (0 to 9) Command (case sensitive) Data Data Status upper Status lower CHKH Checksum upper (0 to 9, A to F) CHKL Checksum lower (0 to 9, A to F) Carriage return...
15.4. Command 15.4.1. Read measurement value, status Command CHKH CHKL Sensor -> PC response format ± CHKH CHKL The measured pressure value goes in "X.XXE±XX". Example 1: 3.00E+03 -> 3.00x10 Example 2: 5.00E+00 -> 5.00x10 Example 3: 4.00E-01 -> 4.00x10 ...
15.4.7. SWU atmospheric adjustment command Command CHKH CHKL SWU atmospheric adjustment range:1.0x10 Pa to 1.0x10 "o" is returned for a pressure that can be set. "n" is returned for a pressure that cannot be set. 15.4.8. Check B-A gauge filament current value Command CHKH CHKL...
15.5. Checksums Checksums are used to check if the sent data could be correctly received. This unit cannot receive commands if a checksum is not added. The checksum calculation is an XOR (exclusive OR) of the data from the address to the character before the checksum.
15.6. Status settings list This list shows the settings for filament on and degas on, as well as the status for errors and setpoints. 15.6.1. When writing the status Filament on/off signal During SH2 independent mode and combination modes, the method for using the B-A gauge filament on/off signal differs.
15.6.2. When reading Filament on/off signal During SH2 independent mode and combination modes, the method for using the B-A gauge filament on/off signal differs. The output of Em. Valid OK signal varies according to mode setting. The output of Em. Valid OK signal varies according to mode setting. Please refer to section 10.5.
16. Gauge Head Replacement Power off When replacing the gauge head, always turn off the power supply. Do not turn on the power supply until finished replacing the gauge head. If the gauge head is attached or removed with the power on, there is a risk of damage to this unit and to devices connected to this unit and a risk of fire.
16.2. Mesh/Baffle installation and removal. 16.2.1. Jig tool A clean thin tip tweezers and clean gloves will be required as a Jig. 16.2.2. Removal including mesh or baffle Insert the tweezers into the gap of mesh and lift it slowly. Procedure ①...
The power supply voltage is not within the specified Check the power supply voltage with a tester. range Internal circuit fault Requires inspection and repairs at ULVAC. ● The POWER LED is on but this unit is outputting 0 V Cause Action Miswired or broken cable Repair the wiring and check continuity with a tester.
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● The pressure reading does not show a steady value. Cause Action The pressure is actually fluctuating This is normal. This unit is affected by pump vibrations and is Suppress vibrations as much as possible. fluctuating Measurements are affected by the principle of the Pirani vacuum gauge.
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● At combination mode: In case the salutation occurs around 1E+4Pa when pumping down is proceeded. Cause Action High altitude or Low atmospheric pressure Adjust the atmospheric and zero pressure. Refer to section13. SAU contamination To exchange the contaminated sensor head with new one.
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Terminal resistance not set on RS-485 If the cable is long and in noisy environments, set terminal resistance Internal circuit fault Requires inspection and repairs at ULVAC. The cable is affected by electromagnetic induction Change the cable installation location. Use this unit (By external noise) with the device generating the noise turned off.
17.2. Checking for an internal electrode break The interior of the gauge head is wired as shown in the figure below. Check continuity referring to this figure. Filament 1 Grid Grid Case Ground Filament 2 Ioncollector Figure 17-1 Gauge head internal wiring diagram 17.3.
18. Technical Report 18.1. Measurement principle When gas molecules collide with particles that carry energy above a certain value, no matter what the substance, electrons are emitted and the gas molecules become ions. This is called gas ionization. To ionize a gas, a filament is heated and something is used to accelerate the thermoelectrons produced from the filament.
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for the correct value. To correct the measured value output by gas type, you should divide the vacuum gauge measured value output by the relative sensitivity factor (absolute sensitivity to nitrogen gas) possessed by that gas according to equation 4. Example: Measuring argon (Ar) gas with an ionization vacuum gauge When the measured value output P(Ar) at this time was 5x10 [Pa], to find the actual...
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Xj 1.66±0.27 1.30±0.17 2.50 2.41 Starred items (*) are contained 3.30±1.04 2.07±0.04 in reference material 2. 1.58* 1.63±0.30 2.58* 2.74±0.45 Unfortunately, ULVAC does 3.44* 3.64±0.37 not have data for other gases. 4.04* 4.57±0.47 5.60±0.76 6.60 6.77±1.44 7.60 7.72 8.18 8.86 0.614*...
This product was shipped after rigid company inspection. However, in case any failure occurs under ULVAC’s responsibility, such as defect in manufacturing and damage during transportation, Buyer shall inform ULVAC, Inc. or the local ULVAC representatives. ULVAC will repair or exchange it at free of charge.
Please pack the product carefully before shipment because the shipper (user) is liable for damage that may be caused by contaminant in transit to ULVAC. It is also to be understood that ULVAC may decline to repair the product depending on the type of contaminant and degree of contamination and return it to the user.
22. China RoHS Declaration This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.
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