Setpoint Setting (Sh200-A Only); Operating Pressure Range Of Setpoint - Ulvac G-TRAN Series Instruction Manual

11.

Setpoint setting (SH200-A only)

The setpoint is a function that outputs a signal to the outside when the pressure
drops below a set pressure. The set pressure value is called "Setpoint."
When using the setpoint, follow the instruction to make the necessary settings.
The factory default setting for SH200-A is 5.0×10
3.
11.1.

Operating pressure range of setpoint

Setting the setpoint at 10Pa or lower
When SH200 emission current error occurs, the setpoint set at 10 Pa
or lower turns off.
*Note*
For example, in the combination mode, when the setpoint is set at
9Pa, even if the pirani gauge turns the setpoint on, the setpoint will
turn off when the SH200 emission current error occurs.
The operating pressure range of the setpoint for the setpoint, pressure sensor,
Pirani gauge, and SH200 is shown in the table below.
Model Operating pressure range
SAU 1.0×10
※1
SWU 1.0×10
SWU ※2 1.0×10
※1
SPU 1.0×10
※2
SPU 4.0×10
SH200 5.0×10
※1: In the automatic switching mode, the SH200 filament turns on at 2Pa and
turns off at 3Pa.
For example, when the setpoint is set at 9Pa in the combination mode, even
if the pirani gauge turns the setpoint on, the setpoint turns off when the
SH200 emission current error occurs.
※2: When using SH200 filament with the forced off state, SWU/SPU can use the
setpoint up to 0.4Pa.
If an emission current error occurs when the SH200 filament is on, the
setpoint set below 10Pa will turn off. Also, when the filament turns off
forcibly, the setpoint of SWU/SPU may turn on.
+4 +5
Pa to 1.0×10 Pa
+1 +5
Pa to 1.0×10 Pa
-2 Pa to 1.0×10 +5 Pa
+1 +4
Pa to 1.0×10 Pa
-1 +4
Pa to 1.0×10 Pa
-8 +1
Pa to 1.0×10 Pa
32
-8
Pa for both set points 1, 2, and
Note
Automatic switching mode
SH200 filament forced off state
Automatic switching mode
SH200 filament forced off state