(Sh200+Swu/Spu+Sau) Standard Specifications - Ulvac G-TRAN Series Instruction Manual

2.6. SAU combination mode (SH200+SWU/SPU+SAU) standard specifications
Measurable
pressure range
(N )
2
Accuracy (N )
2
POWER LED status
Control input
signal
-8
5.0×10 Pa to 1.0×10
When pressure drops:
SAU indicates 10000Pa or lower, SAU
SWU/SPU indicates 2Pa or lower, SWU/SPU ⇒ SH200
When pressure rises:
SWU/SPU indicates 3Pa or higher, SH200
SAU indicates 10000Pa or higher, SWU/SPU ⇒ SAU
※ SH200 measurement can be forcibly turned off with the
control signal.
Pressure range
-8
5.0×10 Pa to 4.0×10
When
-1
4.0×10 Pa to 3.0×10
using
+0
3.0×10 Pa to 1.0×10
SWU
+4
1.0×10 Pa to 3.0×10
-8
5.0×10 Pa to 4.0×10
-1
4.0×10 Pa to 1.0×10
When
+0
using 1.0×10 Pa to 1.0×10
+3
SPU 1.0×10 Pa to 1.0×10
+4
1.0×10 Pa to 3.0×10
In the overlapping pressure range of 0.4Pa to 3.0Pa, the
measured pressure of SWU/SPU and SH200 is adjusted and output.
※ Since SAU measures by gauge pressure and SWU/SPU measures
by absolute pressure, errors between SAU and SWU/SPU
occur due to the altitude and air pressure.
※ SWU/SPU and SH200 have gas species dependency. Please
note the difference in pressure indication when gauges
switch.
White : Start up
Blue : Normal operation to SAU, SWU/SPU measurement range
Green : SH200 filament is on
Red : SWU/SPU, SAU Power failure
Blinking Red: SH200 Power failure
FIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Open collector input, Negative logic
※ When FIL ON/OFF signal is Lo input, the filament of SH200
is off.
+5
Pa
Accuracy
-1
Pa ±15%
+0
Pa ±10% to ±15%
+4
Pa ±10%
+5
Pa ±3%F.S. (±3.0×10
-1
Pa ±15%
+0
Pa ±15% to ±30%
+3
Pa ±15%
+4
Pa Accuracy not guaranteed
+5
Pa ±3%F.S. (±3.0×10
8
⇒ SWU/SPU
⇒ SWU/SPU
+3
Pa)
+3
Pa)