error message
description
error value
action
error message
description
error value
action
error message
description
error value
action
error message
description
8163A/B, 8164A/B, 8166A/B User's Guide
Main Temperature Selftest Failed (error value)
Checks whether the temperature sensors are within given limits
23021
internal temperature sensor above limit
23022
T_FIRE_DIODE is possibly not connected
23023
T_OPTIZ_DIODE is possibly not connected
23024
T_BASEPLATE is possibly not connected
Please return the unit to your local service center for repair
Main Power Loop Selftest Failed (error value)
Verifies the electronic of the power loop regulator
23051
power loop CW path failed
23052
power loop modulation path failed
23053
power loop regulator circuit failed
Please return the unit to your local service center for repair
Main Shutter. Selftest Failed (error value)
Verifies the shutter drive electronic
23061
shutter 1 drive electronic failed
23062
shutter 2 drive electronic failed
Please return the unit to your local service center for repair
Main Laser Safety Selftest Failed (error value)
Verifies if the test laser current is within limits and whether the safety current sets an alarm if a current
limit is reached
Error Messages
14
391