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14
Error Messages
error value
action
error message
description
error value
action
error message
description
error value
action
error message
description
error value
392
23071
test laser current not in limits
23072
current laser safety did not trigger at overcurrent
Please return the unit to your local service center for repair
Main Piezo Amp. Selftest Failed (error value)
Verifies if the piezo amplifier reaches the upper and lower limit. An error may indicate a defect amplifier
transistor
23091
piezo amplifier could not set to maximum voltage
23092
piezo amplifier could not set to minimum voltage
Please return the unit to your local service center for repair
Main Cavity Motor Selftest Failed (error value)
Verifies the functionality of the cavity motor
23081
indicates an open motor connector
23082
indicates that a motor coil is defect
23083
indicates a short in a motor coil
Please return the unit to your local service center for repair
TCFS DC Selftest Failed (error value)
Tests all fixed DC voltages available at the TCFS board mux
25011
+10V measurement voltage on TCFS board not in limits
25012
-10V measurement voltage on TCFS board not in limits
25013
+5V reference voltage on TCFS board not in limits
25014
-5V reference voltage on TCFS board not in limits
25015
+2.5V reference voltage on TCFS board not in limits
8163A/B, 8164A/B, 8166A/B User's Guide
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