Installation - Edwards iXH100 Instruction Manual

3

Installation

Obey the safety instructions given below and take the appropriate precautions. If you do not, you
can cause injury to people and damage to equipment.
The system should not be operated with the enclosure panels removed.
The system contains electrolytic capacitors which may emit dangerous fumes under certain fault
conditions. Ensure the system is installed in a well-ventilated area.
Potential hazards on the dry pumping system include electricity, hot surfaces, process chemicals, Fomblin® oil,
nitrogen and water under pressure.
Detailed safety information is given in
Pump and Vacuum Systems.
Only Edwards trained engineers may install the dry pumping system. Users can be trained by Edwards to

conduct the tasks described in this manual, contact your local service centre or Edwards for more
information.
Do not remove the temporary cover or blanking plate from the dry pumping system inlet and exhaust until

you are ready to connect the dry pumping system to your vacuum or exhaust-extraction system. Do not
operate the dry pumping system unless the inlet and exhaust are connected to your vacuum and
exhaust-extraction system.
Vent and purge the process system (if the dry pumping system is to replace an existing pumping system) with

nitrogen for 15 minutes before you start installation work. Refer to
Systems containing the Loadlock gas module must not be used with hazardous process gases. If you are not

sure which gas module is fitted to your system, find the product code number on the label on the rear of the
pump and then refer to the product configurators at the start of this manual. If in doubt, consult Edwards.
Disconnect the other components in the process system from the electrical supply so that they cannot be

operated accidentally.
Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any

maintenance the supply of these sources should be locked and tagged out.
The pump system includes provision for ventilation extraction and secondary containment of oil and water

leaks. Any unintended overflows or spills must be removed immediately to avoid risk of slips.
Obey all national and local rules and safety regulations when you install the dry pumping system. Consult

Edwards Safety Manual Publication Number P400-40-100 before you pump hazardous materials. This
publication is available on request: contact your supplier or Edwards.
Route and secure cables, hoses and pipework during installation to avoid possible risk of trips.

Before you locate the pump, ensure that the installation area is clean and free from debris and

contamination (such as oil).
In order for the pumping system to perform to specification, you must provide appropriate facilities as detailed in
this manual.
© Edwards Limited 2012. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
WARNING
WARNING
WARNING
Section 4 and Edwards Safety Manual Publication Number P400-40-100 Vacuum
M561-00-880 Issue C
Section 5.
Page 23