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M561-00-880 Issue C
Use the following procedure to change the gas module mode:
1. Access the Config menu on the PDT (contact Edwards for advice).
2. Scroll down to Gas Process - press ENTER.
3. Scroll through options to choose gas process - use ENTER to select desired option.
4. Scroll down to Default N
5. PDT displays: Set Default Yes (Press Enter) - confirm default - Press ENTER.
5.6.3
iXL variants
iXL variants are not fitted with gas modules.
5.7
System operating temperature configuration
The system operating temperature configuration may be adjusted to suit process demands. Contact Edwards service
personnel for instructions on how to access the configuration menu (via the PDT) and for process-specific
recommendations.
Use the following procedure:
1. Access the Config menu on the PDT (requires an access code, contact Edwards).
2. Scroll to Temp Setpoints – press ENTER.
3. Scroll to Set DP Temp or Set MB Temp – press ENTER.
4. Scroll to desired temperature – Press ENTER.
Notes:
1 The Dry Pump set point is the desired surface temperature of the internal low vacuum stage.
2 The Booster set point is the temperature of the booster stator at which additional cooling is deployed
to control booster temperatures. The booster will not necessarily reach the set point temperature at
ultimate conditions.
Refer to
Table 21
for default temperature settings and ranges.
Temperature Setting
Standard iXH dry pump
iXH T variants containing 450H and 500H dry pump
iXH3030T
All other iXH T variants
iXL250Q dry pumps
iXL 500 dry pumps
iXL750Q dry pumps
Booster (except iXH610)
Booster (iXH610 only)
Page 50
Setup - press ENTER.
2
Table 21 - Dry pump and booster temperature settings
Edwards and the Edwards logo are trademarks of Edwards Limited.
Range in which temperature
can be set (°C)
70 - 135
110 - 150
110 - 160
110 - 150
-
126 - 136
-
60 - 100
0 - 55
© Edwards Limited 2012. All rights reserved.
Default value (°C)
110
140
160
150
105
131
120
100
55
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