Edwards iXH100 Instruction Manual page 3

A
Booster Size
High Voltage
Low Voltage
A = None
0 = None
1 = r B = r
C = r
2 = r
3 = r D = r
4 = 1800 E = 1800
F = 3000
5 = 3000
Dry Pump
0 = None
1 = r
2 = r
3 = 250
4 = r
5 = 500
6 = 750
Where r = reserved for future use
iXL Dry Pumping Systems
S X X X
TMS System
0 = Standard
1 = r
Gas Module
0 = None
1 = Loadlock (4 slm flow)
2 = r
3 = r
4 = r
X X X X
Exhaust Seals
0 = r
0 = r
1 = r
1 = Standard
2 = Standard
without
3 = EES
check valve.
2 = r
3 = r
X 0 0
Pump
Motor
0 = None
1 = 4.5 kW
2 = 7.5 kW
3 = 11 kW
Booster
Motor
0 = None
1 = r
2= 4.5 kW
3 = 7.5 kW
4 = r